Biomedical device with a protective overlayer
First Claim
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1. An improved biomedical device comprising;
- A biomedical device having at least one surface to be disposed upon use to living tissue;
A protective overlayer disposed over said surface of said biomedical device;
Said protective overlayer comprising at least one thin-film of a-SiOC;
H having an oxygen to carbon ratio such that the electronic resistivity of said a-SiOC;
H is 1014 Ω
-cm and the water transport rate through a 0.5 μ
m thick film of said a-SiOC;
H is less than 5×
1014 molecules/sec-cm2.
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Abstract
A biomedical device provided with a protective overlayer with high electronic resistivity and low permeability to H2 O; the protective overlayer comprising at least one thin film of amorphous silicon oxycarbide (a-SiOC:H) in which the oxygen/carbon ratio is such that the electronic resistivity of the a-SiOC:H is greater than 1014 Ω-cm and the H2 O permeability is less than 5×1014 molecules/sec-cm2.
83 Citations
14 Claims
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1. An improved biomedical device comprising;
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A biomedical device having at least one surface to be disposed upon use to living tissue; A protective overlayer disposed over said surface of said biomedical device; Said protective overlayer comprising at least one thin-film of a-SiOC;
H having an oxygen to carbon ratio such that the electronic resistivity of said a-SiOC;
H is 1014 Ω
-cm and the water transport rate through a 0.5 μ
m thick film of said a-SiOC;
H is less than 5×
1014 molecules/sec-cm2. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14)
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Specification