Lithium ionic conducting glass thin film and carbon dioxide sensor comprising the glass thin film
First Claim
1. A thin carbon dioxide sensor comprising a lithium ionic conducting glass thin film solid electrolyte with 0.1 to 20 μ
- m thickness consisting essentially of a glass containing 20 to 80 mol % of a Li2 O component and 80 to 20 mol % of a member selected from the group consisting of SiO2, P2 O5, B2 O3 and Al2 O3 and an electrode comprising a carbonate material for detecting carbon dioxide.
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Abstract
The lithium ionic conducting glass thin film of the present invention comprises a glass containing 20 to 80 mol % of an Li2 O component. This glass thin film has a dense structure which shuts off gas and can be used as a solid electrolyte in a carbon dioxide sensor.
The thin carbon dioxide sensor of the present invention comprises the above lithium ionic conducting glass thin film as a solid electrolyte. This sensor enables complete elimination of noise attributed to gas permeation by virtue of the lithium ionic conducting glass thin film having a dense structure with the result that the accuracy of carbon dioxide concentration measurement can be enhanced. Further, the lithium ionic conducting glass is formed into a thin film, so that the sensor has a low internal resistance, acts at low operating temperatures and exhibits a high response speed. Therefore, a heater having a capacity smaller than in the prior art can be used in the sensor, so that, even when a structure integral with a heater and the like is employed, miniaturization of the sensor can be realized.
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Citations
21 Claims
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1. A thin carbon dioxide sensor comprising a lithium ionic conducting glass thin film solid electrolyte with 0.1 to 20 μ
- m thickness consisting essentially of a glass containing 20 to 80 mol % of a Li2 O component and 80 to 20 mol % of a member selected from the group consisting of SiO2, P2 O5, B2 O3 and Al2 O3 and an electrode comprising a carbonate material for detecting carbon dioxide.
- View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12)
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13. A thin carbon dioxide sensor comprising a lithium ionic conducting glass thin film solid electrolyte 0.1 to 20 μ
- m thick and consisting essentially of a glass containing 20 to 80 mol % of an LiO2 component and 80 to 20 mol % of a SiO2 component, a detecting electrode comprising a first thin noble metal electrode film and a thin metal carbonate film and a reference electrode comprising an oxygen ionic conducting ceramic substrate and a second thin noble metal electrode film, wherein the lithium ionic conducting glass thin film solid electrolyte is disposed between the detecting electrode and the reference electrode.
- View Dependent Claims (14, 15, 16, 17, 18, 19, 20, 21)
Specification