Method for determining the cleanliness of a surface

• US 5,756,885 A
• Filed: 04/04/1996
• Issued: 05/26/1998
• Est. Priority Date: 04/04/1996
• Status: Expired due to Fees

• Current Assignee: Freescale Semiconductor, Inc. (NXP Semiconductors NV)
• Original Assignee: Motorola, Inc. (Motorola Solutions, Inc.)
• Inventors: Poku, Isaac T., Cherkur, Rama
• Primary Examiner(s): RAEVIS, ROBERT R
• Application Number:
  US08/628,048
• Time in Patent Office: 782 Days
• Field of Search: 73/104, 356/372, 356/379, 356/384, 356/388, 356/394, 356/397, 348/87, 348/92, 348/128
• US Class Current: 73/104
• CPC Class Codes: G01N 13/02 Investigating surface tension of liquids
• CPC Class Codes: G01N 2013/0241 bubble, pendant drop, sessile drop methods

Abstract

A method for determining the cleanliness of a surface of a substrate involves using a visual pattern (17, 29). The visual pattern is either provided in the optical portion of a visual system or is formed on the surface of the substrate to be analyzed. A liquid droplet (26, 27) is dispensed onto the substrate surface, and the extent of the spread area of the droplet is compared to the visual pattern. If the area of the droplet is greater than or equal to a tolerance as signified by the pattern markings, then the surface of the substrate is determined to be sufficiently clean. In relying upon a simple visual comparison of the area of the surface covered by the droplet with an empirically determined visual pattern, a method for analyzing surface cleanliness is consistent between operators and surfaces, is easy to set up and operate, and improves manufacturing throughput.

Claims

1. A method for measuring cleanliness of a surface comprising the steps of:

providing a substrate having the surface, the substrate having a visual pattern formed therein;

dispensing a known volume of fluid on the surface of the substrate, on the visual pattern;

comparing an area of the known volume of fluid dispensed on the surface with the area of the visual pattern to determine if the surface is sufficiently clean.

2. The method of claim 1 further comprising the step of cleaning the surface of the substrate prior to dispensing the known volume of fluid.

3. The method of claim 1 wherein the visual pattern comprises at least one ring, and wherein the step of comparing comprises comparing the area of the known volume of fluid to an area within the at least one ring.

4. The method of claim 1 wherein the visual pattern comprises a plurality of rings, and wherein the step of comparing comprises comparing the area of the known volume of fluid to an area of one ring of the plurality of rings.

5. The method of claim 4 wherein each ring of the plurality of rings signifies an acceptable level of cleanliness for different fluids.