Please download the dossier by clicking on the dossier button x
×

Tunneling-based rate gyros with simple drive and sense axis coupling

  • US 5,756,895 A
  • Filed: 09/01/1995
  • Issued: 05/26/1998
  • Est. Priority Date: 09/01/1995
  • Status: Expired due to Term
First Claim
Patent Images

1. A tunneling rotation sensor, comprising:

  • a substrate;

    a cantilever having an end extending from said substrate and a cantilever arm positioned away from said substrate;

    said cantilever arm comprising a first section and a second section;

    a tunneling electrode on said substrate;

    a tunneling gap through which current can flow, said tunneling gap formed between said tunneling electrode and said first section;

    said cantilever arm further comprising flexible material and being constructed such that;

    a) said first section is capable of deflection toward and away from said substrate;

    b) said second section is capable of deflection toward and away from said substrate; and

    c) said first section is more restricted than said second section from making movements other than said deflection toward and away from said substrate.

View all claims
  • 2 Assignments
Timeline View
Assignment View
    ×
    ×