Sensor and method for manufacturing a sensor
First Claim
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1. A sensor comprising:
- a substrate;
a silicon layer;
a movable element patterned out of the silicon layer, the movable element being joined to the substrate;
a conducting layer arranged between the substrate and the silicon layer, wherein a plurality of conductive paths patterned out of the conducting layer, electrically contact the movable element; and
an insulating layer for insulating the plurality of conductive paths from sections of the silicon layer.
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Abstract
In a sensor and a method for manufacturing a sensor, a movable element is patterned out of a silicon layer and is secured to a substrate. The conducting layer is subdivided into various regions, which are electrically insulated from one another. The electrical connection between the various regions of the silicon layer is established by a conducting layer, which is arranged between a first and a second insulating layer.
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Citations
8 Claims
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1. A sensor comprising:
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a substrate; a silicon layer; a movable element patterned out of the silicon layer, the movable element being joined to the substrate; a conducting layer arranged between the substrate and the silicon layer, wherein a plurality of conductive paths patterned out of the conducting layer, electrically contact the movable element; and an insulating layer for insulating the plurality of conductive paths from sections of the silicon layer. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8)
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Specification