Vibration actuator and method of control

• US 5,760,527 A
• Filed: 05/13/1996
• Issued: 06/02/1998
• Est. Priority Date: 05/12/1995
• Status: Expired due to Term

• Current Assignee: Nikon Corporation
• Original Assignee: Nikon Corporation
• Inventors: Ashizawa, Takatoshi
• Primary Examiner(s): LaBalle, Clayton E.
• Application Number:
  US08/648,515
• Time in Patent Office: 750 Days
• Field of Search: 310/317, 310/323, 310/325, 310/333, 318/116, 318/118, 318/119
• US Class Current: 310/317
• CPC Class Codes: H02N 2/0045 using longitudinal or radial modes combined with torsion or shear modes
• CPC Class Codes: H02N 2/106 Langevin motors
• CPC Class Codes: H02N 2/14 Drive circuits; Control arrangements or methods

Abstract

An ultrasonic actuator which can be accurately controlled at low drive speeds and with reduction in speed irregularities at low speeds. The ultrasonic actuator includes elastic bodies joined to electromechanical conversion elements and a relative motion member in compressive contact with the elastic bodies. A control system outputs first and second drive signals to the electromechanical conversion elements to control the vibration actuator. The control system directly controls the voltage of the first drive signal to independently control the respective voltages of the first drive signal and a second drive signal.

Claims

1. A vibration actuator, comprising:

an elastic body;

vibration element joined to the elastic body;

drive system to output a drive signal to the vibration element; and

a relative motion member in contact with a driving surface of the elastic body and which is driven by the driving surface,

wherein the drive system excites the vibration element with a first drive signal and a second drive signal to respectively produce a first vibration mode and a second vibration mode, wherein displacement of the driving surface occurs in a direction about the same as the drive direction of the relative motion member in the first vibration mode, and displacement of the driving surface occurs in a direction intersecting the driving surface in the second vibration mode causing relative motion between the vibration element and the relative motion member, and the drive system controls a voltage of at least one of the first drive signal and the second drive signal to independently adjust the voltage of at least one of the first drive signal and the second drive signal.

2. The vibration actuator as recited in claim 1, wherein the respective voltages of the first drive signal and the second drive signal are controlled mutually independently.

3. The vibration actuator as recited in claim 1, wherein

the drive system generates the first vibration mode by the first drive signal, and generates the second vibration mode by the second drive signal, and

the voltage of the second drive signal is controlled so that the amplitude of vibration of the second vibration mode is within a predetermined range.

4. The vibration actuator as recited in claim 1, wherein

the drive system generates the first drive signal having a voltage which reduces the amplitude of vibration of the first vibration mode.

5. The vibration actuator as recited in claim 1, wherein

the drive system controls the frequency of at least one of the first drive signal and second drive signal.

6. The vibration actuator as recited in claim 1, wherein

the elastic body comprises two columnar elastic bodies and the vibration element comprises an electromechanical conversion element, and a portion of the electromechanical conversion element is interposed between the two columnar elastic bodies, and

the first vibration mode is a m-th order torsional vibration mode having a rotation axis in about the same position as the central axis of the elastic bodies, and

the second vibration mode is a n-th order longitudinal vibration mode generating a displacement in about the axial direction of the rotation axis, where m and n are optional integers.

7. The vibration actuator as recited in claim 1, wherein

the vibration arising in the elastic body is a first order longitudinal vibration and a first order torsional vibration, or a first order longitudinal vibration and a second order torsional vibration.

8. The vibration actuator as recited in claim 1, wherein

the drive system changes a voltage of the first drive signal to control a relative motion speed of the elastic body and the relative motion member.

9. The vibration actuator as recited in claim 8, wherein

the drive system makes the first drive signal large when the relative motion speed of the elastic body and the relative motion member is large.

10. The vibration actuator as recited in claim 8, wherein

the drive system makes the first drive signal small when the relative motion speed of the elastic body and the relative motion member is small.

11. The vibration actuator as recited in claim 5, wherein

the drive system varies a frequency of the first drive signal and the second drive signal, and varies a voltage of the second drive signal, thereby controlling a relative motion speed of the elastic body and the relative motion member.

12. The vibration actuator as recited in claim 11, wherein

the drive system sets the frequency of the first drive signal and the second drive signal low, and sets the voltage of the second drive signal large thereby making the relative motion speed of the elastic body and relative motion member large.

13. A vibration actuator as recited in claim 11, wherein

the drive system sets the frequency of the first drive signal and the second drive signal high, and sets the voltage of the second drive signal small, thereby making the relative motion speed of the elastic body and the relative motion member small.

14. A method of controlling a vibration actuator including an elastic body, a vibration element joined to the elastic body and a relative motion member which is driven by a driving surface of the elastic body, comprising the steps of:

generating a first drive signal to produce a first vibration mode causing displacement of the driving surface of the elastic body in about the same direction as the relative motion member is driven;

generating a second drive signal to produce a second vibration mode causing displacement of the driving surface of the elastic body in a direction which intersects the driving surface of the elastic body; and

independently adjusting a voltage of at least one of the first drive signal and the second drive signal to produce relative motion between the elastic body and relative motion member in accordance with the first and second vibration modes.

15. The method of controlling a vibration actuator as recited in claim 14, wherein

generating the first vibration mode comprises generating a first drive signal;

and

generating the second vibration mode comprises generating a second drive signal having a voltage which is controlled such that the amplitude of vibration of the second vibration mode is within a predetermined range.

16. The method of driving a vibration actuator as recited in claim 14, wherein

generating the first vibation mode comprises generating a first drive signal having a voltage which is controlled such that the amplitude of vibration of the first vibration mode is reduced.

17. The method of driving a vibration actuator as recited in claim 14, wherein

generating the first vibration mode comprises generating a first drive signal;

and

generating the second vibration mode comprises generating a second drive signal,

wherein the frequency of at least one of the first drive signal and the second drive signal is controlled.

18. The method of driving the vibration actuator as recited in claim 14, wherein

generating the first vibration mode comprises generating a first drive signal, and

controlling the relative motion comprises changing the voltage of the first drive signal to control the relative motion speed of the elastic body and relative motion member.

19. The method of driving vibration actuator as recited in claim 18, wherein

controlling the relative motion comprises making the voltage of the first drive signal large to make the relative motion speed of the elastic body and relative motion member large.

20. The method of driving vibration actuator as recited in claim 18, wherein

controlling the relative motion comprises making the voltage of the first drive signal small to make the relative motion speed of the elastic body and the relative motion member small.

21. The method of controlling vibration actuator as recited in claim 17, wherein

by changing the frequency of the first drive signal and second drive signal, and by changing the voltage of the second drive signal, the relative motion speed of the elastic bodies and relative motion member is controlled.

22. The method of driving the vibration actuator as recited in claim 17, wherein

when the relative motion speed of the elastic bodies and relative motion member is made large, the frequency of the first drive signal and second drive signal is made low, and the voltage of the second drive signal is made large.

23. The method of driving the vibration actuator as recited in claim 17, wherein

when the relative motion speed of the elastic bodies and relative motion member is made small, the frequency of the first drive signal and second drive signal is made high, and the voltage of the second drive signal is made small.