Gap measurement device
First Claim
1. A device for capacitively measuring the distance between a turbine blade in a turbine and another part of the turbine which comprisesan electrode that will couple capacitively with the turbine blade, said electrode having a part which faces the turbine blade,a deposited electrically conductive layer on said part which faces the turbine blade,a shield that surrounds the electrode except where the electrically conductive layer is located,a deposited ceramic coating of insulation between said electrode and said shield such that said shield is electrically isolated from the electrode by means of said insulation, anda deposited ceramic layer of insulation that surrounds the shield.
5 Assignments
0 Petitions
Accused Products
Abstract
This invention provides a device for capacitively measuring the distance to an object, which comprises an electrode that will couple capacitively with the object, a shield that surrounds the electrode and is electrically isolated from the electrode by means of insulation, and a layer of insulation that surrounds the shield, wherein the insulation between the electrode and the shield, and the insulation that surrounds the shield, are formed by deposition.
This invention further provides a method for measuring the distance to a solid object, which comprises forming an electrode that will capacitively couple with the object, depositing a layer of insulation over at least part of the electrode so that the insulation surrounds the electrode, depositing a layer of metal over the insulation to form a shield, and depositing a second layer of insulation over the shield.
-
Citations
15 Claims
-
1. A device for capacitively measuring the distance between a turbine blade in a turbine and another part of the turbine which comprises
an electrode that will couple capacitively with the turbine blade, said electrode having a part which faces the turbine blade, a deposited electrically conductive layer on said part which faces the turbine blade, a shield that surrounds the electrode except where the electrically conductive layer is located, a deposited ceramic coating of insulation between said electrode and said shield such that said shield is electrically isolated from the electrode by means of said insulation, and a deposited ceramic layer of insulation that surrounds the shield.
Specification