Method and apparatus for optically measuring specimen
First Claim
1. A specimen measurement apparatus comprising:
- a flow path through which specimens individually pass;
irradiation means for irradiating first and second radiation beams on first and second positions along the flow path spaced apart from each other in a moving direction of the specimens;
a light detector for time-serially detecting light components emerging from specimens passing the first and second positions;
a first aperture arranged at a position conjugate with the first position to define a first optical path extending from the first position to said light detector;
a second aperture arranged at a position conjugate with the second position to define a second optical path extending from the second position to said light detector, which is different from the first optical path;
a first optical filtering member arranged in said first optical path for filtering the light component having the first optical characteristic; and
a second optical filtering member, arranged in said second optical path for filtering the light component having the second optical characteristic,wherein the light detector is arranged at a position conjugate with the first and second apertures.
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Accused Products
Abstract
A specimen measurement apparatus and method includes sequentially moving individual specimens, radiating first and second radiation beams on first and second positions spaced apart from each other in a moving direction of the specimens, time-serially detecting light components emerging from specimens passing the first and second positions using the same light detector, and an optical selector, arranged in an optical path between the radiation positions and a light detector, for, when a specimen passes the first position, selectively guiding a light component having a first optical characteristic emerging from the specimen to the light detector, and for, when the specimen passes the second position, selectively guiding a light component having a second optical characteristic emerging from the specimen to the light detector.
234 Citations
30 Claims
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1. A specimen measurement apparatus comprising:
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a flow path through which specimens individually pass; irradiation means for irradiating first and second radiation beams on first and second positions along the flow path spaced apart from each other in a moving direction of the specimens; a light detector for time-serially detecting light components emerging from specimens passing the first and second positions; a first aperture arranged at a position conjugate with the first position to define a first optical path extending from the first position to said light detector; a second aperture arranged at a position conjugate with the second position to define a second optical path extending from the second position to said light detector, which is different from the first optical path; a first optical filtering member arranged in said first optical path for filtering the light component having the first optical characteristic; and a second optical filtering member, arranged in said second optical path for filtering the light component having the second optical characteristic, wherein the light detector is arranged at a position conjugate with the first and second apertures. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17, 18)
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19. A specimen measurement method comprising:
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a step of time-serially irradiating first and second radiation beams onto individual specimens; a first detection step of selecting a light component having a first optical characteristic of light components emerging from a specimen when the first radiation beam is irradiated, and causing a light detector to detect the selected light component; a second detection step of selecting a light component having a second optical characteristic of light components emerging from the specimen when the second radiation beam is irradiated, and causing the same light detector to detect the selected light component; and a step of changing a detection sensitivity of said light detector in synchronization with the irradiation of the first and second radiation beams. - View Dependent Claims (20, 21, 22, 23)
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24. An apparatus for inspecting particles comprising:
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a flow path through which the particles individually pass; a light source for generating a light beam; a deflector for deflecting said light beam along a direction of said flow path; a controller for controlling the deflector to switch a deflection angle of said light beam, stepwise in synchronization with passing of the particle; and a detector for detecting light from the particle which is irradiated with said light beam. - View Dependent Claims (25, 26, 27, 28, 29, 30)
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Specification