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Method and apparatus for infrared pyrometer calibration in a thermal processing system

  • US 5,762,419 A
  • Filed: 03/28/1996
  • Issued: 06/09/1998
  • Est. Priority Date: 07/26/1995
  • Status: Expired due to Term
First Claim
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1. An apparatus for calibrating a temperature probe for a thermal processing chamber, comprising:

  • a) a light source optically coupled to a surface to emit light of a predetermined intensity through said surface during calibration;

    b) a filter positioned between said light source and said surface to cause the radiation spectrum emitted from said surface over a predetermined wavelength range to more closely approximate the radiation spectrum of a black body of a predetermined temperature over said predetermined wavelength range; and

    c) an alignment mechanism for aligning said surface with an input end of said temperature probe.

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