Magnetic neutral line discharged plasma type surface cleaning apparatus

• US 5,762,750 A
• Filed: 05/06/1997
• Issued: 06/09/1998
• Est. Priority Date: 05/15/1996
• Status: Expired due to Term

• Current Assignee: Nihon Shinku Gijutsu Kabushiki Kaisha (Ulvac Incorporated)
• Original Assignee: Nihon Shinku Gijutsu Kabushiki Kaisha (Ulvac Incorporated)
• Inventors: Itoh, Masahiro, Chen, Wei, Sunada, Takeshi, Fujimoto, Hideki, Uchida, Taijiro
• Primary Examiner(s): DANG, THI D
• Application Number:
  US08/851,614
• Time in Patent Office: 399 Days
• Field of Search: 156/345, 118/723 E, 118/723 I, 204/298.37, 438/905, 134/1.1
• US Class Current: 156/345.28
• CPC Class Codes: H01J 37/32082 Radio frequency generated discharge H01J37/32357, H01J37/32366, H01J37/32394 and H01J37/32403 take precedence
• CPC Class Codes: H01J 37/32623 Mechanical discharge control means
• CPC Class Codes: H01J 37/3266 Magnetic control means
• CPC Class Codes: Y10S 438/905 Cleaning of reaction chamber

Abstract

A surface cleaning apparatus using magnetic neutral line discharged plasma for the purpose of inner-wall surface cleaning of a vacuum vessel assembled in a semiconductor manufacturing machine, which comprises electromagnetic coils for producing a closed magnetic neutral line that is formed by circularly connecting points of zero-intensity magnetic field, rf electric field generator for continuously generating plasma by applying a rf electric field along the magnetic neutral line and a controller for controlling the size and position of the closed magnetic neutral line and the kind, temperature and density of the plasma being generated.

Claims

1. A magnetic neutral line discharged plasma type surface cleaning apparatus comprising means for producing a closed magnetic neutral line which is formed by connecting points of zero-intensity magnetic field, means for continuously generating plasma by applying a rf electric field along the magnetic neutral line and control means for controlling the size and position of the closed magnetic neutral line and the kind, temperature and density of the plasma being generated.

2. A magnetic neutral line discharged plasma type surface cleaning apparatus according to claim 1, wherein said control means comprises an excitation control unit for controlling the excitation of the means for producing a closed magnetic neutral line in such a way that at least a pair of lines of magnetic force crossing the magnetic neutral line are connected with each other off the magnetic neutral line while all remaining pairs of lines of magnetic force crossing the magnetic neutral line are leaving from the magnetic neutral line toward up and down in a plane perpendicular to the magnetic neutral line.

3. A magnetic neutral line discharged plasma type surface cleaning apparatus according to claim 2, wherein said control means additionally controls the excitation of the means for producing a closed magnetic neutral line in such a way that at least a pair of lines of magnetic force crossing the magnetic neutral line are connected with each other off the magnetic neutral line, while all remaining pairs of lines of magnetic force crossing the magnetic neutral line are leaving from the magnetic neutral line toward up and down in a plane perpendicular to the magnetic neutral line, and the connected lines of magnetic force either penetrate or contact the inner wall of the vacuum chamber when the size of the magnetic neutral line is modified.

4. A magnetic neutral line discharged plasma type surface cleaning apparatus according to claim 1, wherein said control means comprises a high frequency power control unit for controlling the high frequency power to be applied into said means for continuously generating plasma to control the characteristics of plasma being generated.