Amorphous diamond films

• US 5,763,087 A
• Filed: 09/11/1995
• Issued: 06/09/1998
• Est. Priority Date: 04/16/1993
• Status: Expired due to Term

• Current Assignee: Lawrence Livermore National Security LLC (Government of the United States of America)
• Original Assignee: Regents of the University of California (University of California)
• Inventors: Falabella, Steven
• Primary Examiner(s): TURNER, ARCHENE A
• Application Number:
  US08/526,396
• Time in Patent Office: 1,002 Days
• Field of Search: 428/408, 428/457, 428/446, 428/334, 428/336, 428/412, 428/694 TC, 428/698, 428/704, 51/307, 51/309, 423/445 R
• US Class Current: 428/408
• CPC Class Codes: C23C 14/0605 Carbon
• CPC Class Codes: C23C 14/541 Heating or cooling of the substrates
• CPC Class Codes: Y10T 428/265 1 mil or less
• CPC Class Codes: Y10T 428/30 Self-sustaining carbon mass or layer with impregnant or other layer
• CPC Class Codes: Y10T 428/31507 Of polycarbonate
• CPC Class Codes: Y10T 428/31678 Of metal

Abstract

Amorphous diamond films having a significant reduction in intrinsic stress are prepared by biasing a substrate to be coated and depositing carbon ions thereon under controlled temperature conditions.

Claims

1. An article of manufacture having a durable surface comprising an amorphous diamond coating having an intrinsic stress substantially below 6 GPa.

2. The article of manufacture of claim 1, comprising a tool or an instrument having a wear-resistant edge.

3. The article of manufacture of claim 1, comprising an amorphous diamond coating on at least one surface of magnetic media.

4. An amorphous diamond film characterized by a hardness above 25 GPa and an intrinsic stress below 6.0 GPa.

5. The amorphous diamond film of claim 4, wherein said film is composed of at least one layer of amorphous diamond deposited on a substrate.

6. The amorphous diamond film of claim 5, additionally including impurities in said film.

7. The amorphous diamond film of claim 6, wherein said impurities in said film are selected from the group consisting of nitrogen, silicon, boron, aluminum, germanium, and phosphorus.

8. The amorphous diamond film of claim 5, wherein said substrate is composed of material selected from the group consisting of material capable of forming a carbide compound, tungsten carbide, tool steel, stainless steel, and selected plastic.

9. The amorphous diamond film of claim 8, wherein said material capable of forming a carbide compound is selected from the group consisting of silicon, aluminum, tantalum, titanium, molybdenum, and chromium.

10. The amorphous diamond film of claim 8, wherein said selected plastic is composed of a polycarbonate.

11. The amorphous diamond film of claim 5, additionally including an intermediate layer between said layer of amorphous diamond and said substrate.

12. The amorphous diamond film of claim 11, wherein said intermediate layer is composed of a carbide-forming metal.

13. The amorphous diamond film of claim 12, wherein said intermediate layer is composed of material selected from the group of chromium, niobium, and titanium.

14. The amorphous diamond film of claim 4, wherein said intrinsic stress is 1-2 GPa.

15. The amorphous diamond film of claim 4, wherein said film has a thickness of 0.2 to greater than 8.0 micrometers.

16. The amorphous diamond film of claim 4, wherein said film of amorphous diamond has a density of 2.7±

0.3 g/cc.

17. The amorphous diamond film of claim 4, wherein said film has a flat transmission spectrum of from 0.8 μ

m to over 50 μ

m due to lack of hydrogen therein.

18. The amorphous diamond film of claim 4, wherein said film is free-standing and has a thickness of about 2.4 μ

m and a refractive index between about 2.47 and 2.57.

19. The amorphous diamond film of claim 4, wherein said film has a refractive index of about 2.47 to 2.57.