Acceleration sensor
First Claim
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1. An acceleration sensor comprising:
- an open frame;
a mass portion which is displaced in response to an acceleration, with a periphery thereof supported on said frame by means of support beams having a resilient restoring force;
a first planar coil disposed on a surface normal to the displacement direction of said mass portion; and
a second planar coil disposed facing said first planar coil with a space therebetween; and
having a sensor section with a transformer made up of said first planar coil and said second planar coil;
the construction being such that under conditions wherein an alternating current signal is applied to said first planar coil, an electrical signal proportional to a change in said space between said first planar coil and said second planar coil corresponding to acceleration is taken out from said second planar coil.
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Abstract
The present invention relates to an acceleration sensor which uses magnetic coupling to detect acceleration. A mass portion 3 is movably supported on a frame 2 by means of support beams 4. A first planar coil 5 is disposed on the mass portion 3, and a second planar coil 8 is provided facing the first planar coil 5 with a space therebetween. A transformer is made up with the first planar coil 5 as the primary winding and the second planar coil 8 as the secondary winding. Acceleration is obtained using magnetic coupling to detect the change in the distance between the coils, that is to say, the displacement of the mass portion.
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Citations
10 Claims
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1. An acceleration sensor comprising:
- an open frame;
a mass portion which is displaced in response to an acceleration, with a periphery thereof supported on said frame by means of support beams having a resilient restoring force;
a first planar coil disposed on a surface normal to the displacement direction of said mass portion; and
a second planar coil disposed facing said first planar coil with a space therebetween; and
having a sensor section with a transformer made up of said first planar coil and said second planar coil;
the construction being such that under conditions wherein an alternating current signal is applied to said first planar coil, an electrical signal proportional to a change in said space between said first planar coil and said second planar coil corresponding to acceleration is taken out from said second planar coil. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10)
- an open frame;
Specification