Structure for testing bare integrated circuit devices
First Claim
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1. A structure for testing bare integrated circuit devices, comprising:
- device support means for supporting an integrated circuit device to be tested;
a substrate having formed on one surface thereof a multilayer metal-polyimide dielectric interconnect structure; and
a multilayer printed circuit board probe means for supporting said substrate at an angle with respect to said device such that an edge of said one surface of said substrate is adjacent said device, said substrate being secured to an end of said printed circuit board probe means by a thermoplastic adhesive, said multilayer interconnect structure having a plurality of contact pads formed along said edge of said substrate and a like plurality of microbump contacts formed on respective ones of said plurality of contact pads.
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Abstract
A test probe structure for making connections to a bare integrated circuit device or a wafer to be tested comprises a multilayer printed circuit probe arm which carries at its tip an MCM-D type substrate having a row of microbumps on its underside to make the required connections. The probe arm is supported at a shallow angle to the surface of the device or wafer, and the MCM-D type substrate is formed with the necessary passive components to interface with the device under test. Four such probe arms may be provided, one on each side of the device under test.
94 Citations
8 Claims
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1. A structure for testing bare integrated circuit devices, comprising:
- device support means for supporting an integrated circuit device to be tested;
a substrate having formed on one surface thereof a multilayer metal-polyimide dielectric interconnect structure; and
a multilayer printed circuit board probe means for supporting said substrate at an angle with respect to said device such that an edge of said one surface of said substrate is adjacent said device, said substrate being secured to an end of said printed circuit board probe means by a thermoplastic adhesive, said multilayer interconnect structure having a plurality of contact pads formed along said edge of said substrate and a like plurality of microbump contacts formed on respective ones of said plurality of contact pads. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8)
- device support means for supporting an integrated circuit device to be tested;
Specification