Holographic method for generating three dimensional conformal photo-lithographic masks
First Claim
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1. A system for producing a three-dimensional mask, the mask having a planar side and a three-dimensional side directly opposite the planar side for mating with a three-dimensional part to be treated, said system comprising:
- means for defining feature areas on a surface of the three-dimensional part to be treated;
means for generating information for forming a hologram including information that represents features relating to the feature areas defined by the defining means, the information included in the hologram defining features to be imaged onto the three-dimensional side of the mask for mating with the three-dimensional part to be treated;
means for writing information generated by the generating means onto the planar side of the mask to form a hologram;
means for irradiating light through the hologram on the planar side of the mask to expose a portion of material on the three-dimensional side of the mask in a pattern according to the hologram to create exposed and unexposed portions of the material; and
means for removing one of the exposed or unexposed portions of the material provided on the three-dimensional side of the mask.
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Abstract
A three-dimensional photo mask is formed from a substrate having a first side and a three-dimensional side. A hologram is provided on the first side of the substrate. The three-dimensional side of the substrate has a photosensitive resist material provided thereon. The hologram includes information that defines features to be imaged onto the photosensitive resist material. A method and a system are disclosed for producing the three-dimensional mask.
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Citations
13 Claims
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1. A system for producing a three-dimensional mask, the mask having a planar side and a three-dimensional side directly opposite the planar side for mating with a three-dimensional part to be treated, said system comprising:
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means for defining feature areas on a surface of the three-dimensional part to be treated; means for generating information for forming a hologram including information that represents features relating to the feature areas defined by the defining means, the information included in the hologram defining features to be imaged onto the three-dimensional side of the mask for mating with the three-dimensional part to be treated; means for writing information generated by the generating means onto the planar side of the mask to form a hologram; means for irradiating light through the hologram on the planar side of the mask to expose a portion of material on the three-dimensional side of the mask in a pattern according to the hologram to create exposed and unexposed portions of the material; and means for removing one of the exposed or unexposed portions of the material provided on the three-dimensional side of the mask. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9)
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10. A system for producing a three-dimensional mask, the mask having a planar side and a three-dimensional side directly opposite the planar side for mating with a three-dimensional part to be treated, said system comprising:
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means for defining feature areas on a surface of the three-dimensional part to be treated; means for generating information for forming a hologram including information that represents features relating to the feature areas defined by the defining means, the information included in the hologram defining features to be imaged onto the three-dimensional side of the mask for mating with the three-dimensional part to be treated; and means for writing information generated by the generating means onto the planar side of the mask to form a hologram. - View Dependent Claims (11, 12, 13)
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Specification