Holographic method for generating three dimensional conformal photo-lithographic masks

• US 5,764,390 A
• Filed: 03/27/1996
• Issued: 06/09/1998
• Est. Priority Date: 12/23/1994
• Status: Expired due to Term

• Current Assignee: Bell Semiconductor, LLC (Hilco Inc. (d/b/a Hilco Global))
• Original Assignee: Lucent Technologies, Inc. (Nokia Corporation)
• Inventors: Knoedl, George Jr.
• Primary Examiner(s): Dzierzynski, Paul M.
• Assistant Examiner(s): Schuberg, Darren E.
• Application Number:
  US08/622,795
• Time in Patent Office: 804 Days
• Field of Search: 359/1, 359/8, 359/9, 359/15, 359/33, 359/12, 355/2, 355/47, 355/79, 430/4, 430/5
• US Class Current: 359/33
• CPC Class Codes: G03F 1/50 Mask blanks not covered by G03F1/20 - G03F1/34; Preparation thereof
• CPC Class Codes: G03F 7/001 Phase modulating patterns, e.g. refractive index patterns
• CPC Class Codes: G03H 1/00 Holographic processes or apparatus using light, infrared or ultraviolet waves for obtaining holograms or for obtaining an image from them; Details peculiar thereto
• CPC Class Codes: G03H 1/16 using Fourier transform G03H1/10, G03H1/12, G03H1/14 take precedence; analogue computers G06G, e.g. G06G7/19
• CPC Class Codes: G03H 1/20 Copying holograms by holographic , i.e. optical means
• CPC Class Codes: G03H 1/22 Processes or apparatus for obtaining an optical image from holograms G03H1/26 - G03H1/34 take precedence
• CPC Class Codes: H05K 1/0284 Details of three-dimensional rigid printed circuit boards H05K1/119 takes precedence; shaping of the substrate H05K3/0014
• CPC Class Codes: H05K 2203/056 Using an artwork, i.e. a photomask for exposing photosensitive layers
• CPC Class Codes: H05K 3/0002 for manufacturing artworks for printed circuits

Abstract

A three-dimensional photo mask is formed from a substrate having a first side and a three-dimensional side. A hologram is provided on the first side of the substrate. The three-dimensional side of the substrate has a photosensitive resist material provided thereon. The hologram includes information that defines features to be imaged onto the photosensitive resist material. A method and a system are disclosed for producing the three-dimensional mask.

Claims

1. A system for producing a three-dimensional mask, the mask having a planar side and a three-dimensional side directly opposite the planar side for mating with a three-dimensional part to be treated, said system comprising:

means for defining feature areas on a surface of the three-dimensional part to be treated;

means for generating information for forming a hologram including information that represents features relating to the feature areas defined by the defining means, the information included in the hologram defining features to be imaged onto the three-dimensional side of the mask for mating with the three-dimensional part to be treated;

means for writing information generated by the generating means onto the planar side of the mask to form a hologram;

means for irradiating light through the hologram on the planar side of the mask to expose a portion of material on the three-dimensional side of the mask in a pattern according to the hologram to create exposed and unexposed portions of the material; and

means for removing one of the exposed or unexposed portions of the material provided on the three-dimensional side of the mask.

2. A system for producing a three-dimensional mask according to claim 1, further comprising means for irradiating light through the mask and onto the three-dimensional part to be treated.

3. A system for producing a three-dimensional mask according to claim 1, wherein the exposing means includes means for preventing reflection from the three-dimensional side of the mask.

4. A system for producing a three-dimensional mask according to claim 3, wherein the preventing means comprises an index matched liquid.

5. A system for producing a three-dimensional mask according to claim 4, wherein the index matched liquid includes a light absorptive material.

6. A system for producing a three-dimensional mask according to claim 4, wherein the preventing means further comprises a container having optically black walls for containing the index matched liquid.

7. The system of claim 1 wherein said means for writing information generated by the generating means onto the planar side of the mask to form a hologram comprises means for writing said information directly on said planar side to form said hologram.

8. The system of claim 1 wherein said means for writing information generated by the generating means onto the planar side of the mask to form a hologram comprises means for forming a layer of material containing said hologram directly on said planar side.

9. The system of claim 1 wherein said means for writing information generated by the generating means onto the first side of the mask to form a hologram comprises means for providing a mating planar plate bearing said hologram in direct proximity with said planar side.

10. A system for producing a three-dimensional mask, the mask having a planar side and a three-dimensional side directly opposite the planar side for mating with a three-dimensional part to be treated, said system comprising:

means for defining feature areas on a surface of the three-dimensional part to be treated;

means for generating information for forming a hologram including information that represents features relating to the feature areas defined by the defining means, the information included in the hologram defining features to be imaged onto the three-dimensional side of the mask for mating with the three-dimensional part to be treated; and

means for writing information generated by the generating means onto the planar side of the mask to form a hologram.

11. The system of claim 10 wherein said means for writing information generated by the generating means onto the planar side of the mask to form a hologram comprises means for writing said information directly on said planar side to form said hologram.

12. The system of claim 10 wherein said means for writing information generated by the generating means onto the planar side of the mask to form a hologram comprises means for forming a layer of material containing said hologram directly on said planar side.

13. The system of claim 10 wherein said means for writing information generated by the generating means onto the planar side of the mask to form a hologram comprises means for providing a mating planar plate bearing said hologram in direct proximity with said planar side.