Flow sensor
First Claim
Patent Images
1. A flow sensor, comprising:
- a measuring element having a diaphragm and a resistive film, the resistive film positioned on the diaphragm;
at least one heater formed from the resistive film and having a first side and a second side;
first temperature sensors provided on the first and second sides of the at least one heater;
second temperature sensors provided on the first and second sides of the at least one heater; and
an interconnect resistor interconnecting the second temperature sensors,wherein the second temperature sensors and the interconnect resistor are positioned on the diaphragm and are formed from the resistive film.
1 Assignment
0 Petitions
Accused Products
Abstract
A flow sensor has a diaphragm and a resistive film positioned on the diaphragm. A heater is formed from the resistive film and temperature sensors are arranged on both sides of the heater. On both sides of the heater are additional temperature sensors, which are interconnected by an interconnect resistor and formed from the resistive film.
-
Citations
10 Claims
-
1. A flow sensor, comprising:
-
a measuring element having a diaphragm and a resistive film, the resistive film positioned on the diaphragm; at least one heater formed from the resistive film and having a first side and a second side; first temperature sensors provided on the first and second sides of the at least one heater; second temperature sensors provided on the first and second sides of the at least one heater; and an interconnect resistor interconnecting the second temperature sensors, wherein the second temperature sensors and the interconnect resistor are positioned on the diaphragm and are formed from the resistive film. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10)
-
Specification