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Spin-coating device

  • US 5,766,354 A
  • Filed: 12/12/1996
  • Issued: 06/16/1998
  • Est. Priority Date: 12/22/1995
  • Status: Expired due to Fees
First Claim
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1. A spin-coating device comprising:

  • a turntable for concentrically supporting a substrate;

    a spindle motor having a rotating shaft connected to the turntable at a center thereof for rotating the turntable about a central axis thereof;

    a nozzle disposed above the turntable for feeding and dripping a fluid coating material onto the substrate at a portion adjacent to said central axis of the rotating substrate; and

    an operation means onto which the spindle motor is securely attached, the operation means being configured to maintain an inclination of the central axis of rotation of the turntable carrying the substrate at a slant angle with respect to a gravitational direction while the fluid coating material is dripped onto the rotating substrate.

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