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Methods and apparatus for plasma treatment of workpieces

  • US 5,766,404 A
  • Filed: 12/05/1995
  • Issued: 06/16/1998
  • Est. Priority Date: 12/05/1994
  • Status: Expired due to Fees
First Claim
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1. Plasma treatment apparatus, comprising:

  • a reaction chamber;

    a first workpiece magazine and a second workpiece magazine;

    plasma producing means for striking and maintaining a plasma in said reaction chamber;

    workpiece magazine supporting means located in said reaction chamber;

    magazine position defining means associated with said magazine supporting means to aid in positioning said first and second magazines in said reaction chamber in a juxtaposed relation in which workpieces can be pushed out of said first magazine and into said second magazine across a gap between said magazines; and

    pushing means for pushing workpieces from said first magazine, across said gap, and into said second magazine while said plasma is maintained in said reaction chamber.

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