Methods and apparatus for plasma treatment of workpieces

• US 5,766,404 A
• Filed: 12/05/1995
• Issued: 06/16/1998
• Est. Priority Date: 12/05/1994
• Status: Expired due to Fees

• Current Assignee: March Instruments, Inc. (Nordson Corporation)
• Original Assignee: March Instruments, Inc. (Nordson Corporation)
• Inventors: Smith, William F. III, Hoffman, David E., Rigali, Louis A.
• Primary Examiner(s): DANG, THI D
• Application Number:
  US08/567,797
• Time in Patent Office: 924 Days
• Field of Search: 156/345, 118/729, 118/730, 118/719, 118/723 E
• US Class Current: 156/345.54
• CPC Class Codes: H01L 21/67772 involving removal of lid, door, cover
• CPC Class Codes: H01L 21/67778 involving loading and unloading of wafers
• CPC Class Codes: H01L 21/67781 Batch transfer of wafers

Abstract

Methods and apparatus for plasma treatment of workpieces in which the apparatus includes a reaction chamber having a door through which a magazine loaded with workpieces and an empty magazine can be manually or robotically placed on a shelf in the reaction chamber, and associated apparatus for striking and maintaining a plasma in the reaction chamber, the shelf being provided with stops for maintaining both magazines in alignment so that the workpieces can be pushed out of the loaded magazine, across a gap between the magazines, and into the empty magazine while plasma exists in the gap, and pushing apparatus for pushing workpieces from the loaded magazine, across the gap, and into the empty magazine, and the method of plasma treatment carried out by this apparatus. In one version the pushing apparatus pushes all of the workpieces from magazine to magazine at once. In another version, a subplurality of the workpieces in the loaded magazine is pushed across the gap and into the empty magazine at one time.

Claims

1. Plasma treatment apparatus, comprising:

a reaction chamber;

a first workpiece magazine and a second workpiece magazine;

plasma producing means for striking and maintaining a plasma in said reaction chamber;

workpiece magazine supporting means located in said reaction chamber;

magazine position defining means associated with said magazine supporting means to aid in positioning said first and second magazines in said reaction chamber in a juxtaposed relation in which workpieces can be pushed out of said first magazine and into said second magazine across a gap between said magazines; and

pushing means for pushing workpieces from said first magazine, across said gap, and into said second magazine while said plasma is maintained in said reaction chamber.

2. Plasma treatment apparatus as claimed in claim 1 in which said pushing means includes means for pushing all of the workpieces in said first magazine simultaneously out of said first magazine, across said gap, and into said second magazine.

3. Plasma treatment apparatus as claimed in claim 1 in which said pushing means includes means for pushing only a subplurality at one time of the workpieces in said first magazine out of said first magazine, across said gap, and into said second magazine.

4. The method of treating a plurality of workpieces with plasma, comprising the steps of:

juxtaposing a first and a second workpiece magazine in a reaction chamber, said first magazine containing a plurality of workpieces;

striking and maintaining a plasma in said reaction chamber; and

pushing workpieces from said first magazine, across a gap between said magazines, and into said second magazine while said plasma exists in said gap.

5. The method of treating a plurality of workpieces with plasma as claimed in claim 4 in which all of said workpieces are simultaneously pushed from said first magazine, across said gap, and into said second magazine.

6. The method of treating a plurality of workpieces with plasma as claimed in claim 4 in which only a subplurality at a time of the workpieces in said first magazine are pushed out of said first magazine, across said gap, and into said second magazine.

7. Plasma treatment apparatus, comprising:

a reaction chamber;

workpiece magazine;

plasma producing means for producing a plasma in said reaction chamber;

workpiece magazine positioning means for alternatively positioning said workpiece magazine in a first position in which workpieces deposited therein remain at rest therein and a second position in which workpieces deposited therein drop therefrom; and

workpiece maintaining means for maintaining said workpieces at least partially within said workpiece magazine when said workpiece magazine is said second position;

said second position being located in said reaction chamber in close proximity to said plasma producing means.

8. Plasma treatment apparatus as claimed in claim 7 in which said workpiece maintaining means permits substantially all but not all of each of said workpiece to emerge from said workpiece magazine.