Method of making ferrolectric thin film composites
First Claim
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1. A method of making a thin film of a ferroelectric composite material having a composition comprising:
- barium strontium titanate, said barium strontium titanate represented as Ba1-x Srx TiO3, wherein x is greater than 0.0 but less than or equal to 0.75, and an additive selected from the group consisting of mangesia, alumina, silica, a low dielectric oxide, zirconia, and combinations thereof;
wherein said barium strontium titanate and said additive are present in effective amounts to provide a composite having a low dielectric constant, low loss tangibles, and high tunability.the method comprising the steps of;
a) providing at least one ceramic disc of said composition as an abalation target;
b) providing a substrate at a temperature of between 400-700 degrees centigrade, and at a distance between the substrate and target of 25-50 mm;
c) depositing a thin file of said composition on said substrate using a krypton exciminer pulsed laser utilizing a laser wavelength of 193-248 nm, a laser pulse energy of 226-350 m/J pulse, a pulse width of 10-20 ns and a pulse repetition rate of 5-25 Hz.
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Abstract
A method of making ferroelectric thin film composites includes the step ofroviding a barium strontium titanate material with an additive magnesia-based and forming a thin film ferroelectric composite using pulsed laser deposition. The method forms a thin film composite having enhanced electronic properties.
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Citations
10 Claims
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1. A method of making a thin film of a ferroelectric composite material having a composition comprising:
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barium strontium titanate, said barium strontium titanate represented as Ba1-x Srx TiO3, wherein x is greater than 0.0 but less than or equal to 0.75, and an additive selected from the group consisting of mangesia, alumina, silica, a low dielectric oxide, zirconia, and combinations thereof;
wherein said barium strontium titanate and said additive are present in effective amounts to provide a composite having a low dielectric constant, low loss tangibles, and high tunability.the method comprising the steps of; a) providing at least one ceramic disc of said composition as an abalation target; b) providing a substrate at a temperature of between 400-700 degrees centigrade, and at a distance between the substrate and target of 25-50 mm; c) depositing a thin file of said composition on said substrate using a krypton exciminer pulsed laser utilizing a laser wavelength of 193-248 nm, a laser pulse energy of 226-350 m/J pulse, a pulse width of 10-20 ns and a pulse repetition rate of 5-25 Hz. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10)
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