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Boron-aluminum nitride coating and method of producing same

  • US 5,766,783 A
  • Filed: 11/30/1995
  • Issued: 06/16/1998
  • Est. Priority Date: 03/01/1995
  • Status: Expired due to Term
First Claim
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1. A boron-aluminum nitride coating comprising:

  • a substrate anda boron-aluminum nitride film having a composition of Bx Al1-x Ny (0.001≦

    x≦

    0.7, 0.85≦

    y≦

    1.05) forming a wurtzite type crystal structure of hexagonal symmetry and having a thickness between 10 nm and 50 μ

    m.

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