Boron-aluminum nitride coating and method of producing same
First Claim
Patent Images
1. A boron-aluminum nitride coating comprising:
- a substrate anda boron-aluminum nitride film having a composition of Bx Al1-x Ny (0.001≦
x≦
0.7, 0.85≦
y≦
1.05) forming a wurtzite type crystal structure of hexagonal symmetry and having a thickness between 10 nm and 50 μ
m.
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Abstract
Boron-aluminum nitride Bx Al1-x Ny (0.001≦x≦0.70, 0.85≦y≦1.05) films having wurtzite type structure are proposed. The material has higher hardness, higher sound velocity and wider band gap than hexagonal aluminum nitride (AlN).
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Citations
33 Claims
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1. A boron-aluminum nitride coating comprising:
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a substrate and a boron-aluminum nitride film having a composition of Bx Al1-x Ny (0.001≦
x≦
0.7, 0.85≦
y≦
1.05) forming a wurtzite type crystal structure of hexagonal symmetry and having a thickness between 10 nm and 50 μ
m. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9)
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10. A boron-aluminum nitride coating comprising:
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a single crystal substrate; a single crystal intermediate layer and a boron-aluminum nitride single crystal top layer. - View Dependent Claims (11, 12, 13, 14, 15, 16)
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17. A boron-aluminum nitride coating comprising:
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a single crystal substrate; a boron-aluminum nitride single crystal intermediate layer with sublayers of gradient B/Al compositions changing stepwise or continually and a boron-aluminum nitride top layer. - View Dependent Claims (18, 19, 20, 21, 22)
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23. A boron-aluminum nitride coating comprising:
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a single crystal substrate; an aluminum nitride (AlN) single crystal first intermediate layer; a boron-aluminum nitride single crystal second intermediate layer with sublayers of gradient B/Al compositions changing stepwise or continually and a boron-aluminum nitride single crystal top layer. - View Dependent Claims (24, 25, 26, 27, 28)
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29. A boron-aluminum nitride film having a composition of Bx Al1-x Ny (0.001≦
- x≦
0.55, 0.85≦
y≦
1.05), forming a wurtzite type crystal structure or hexagonal symmetry and having a thickness between 1 nm and 50 μ
m.
- x≦
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30. A boron-aluminum nitride coated member comprising:
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a hard substrate member; hard films deposited on the substrate member, having a composition of Bx Al1-x Ny (0.0001≦
x≦
0.55, 0.85≦
y≦
1.05), forming a wurtzite type crystal structure of hexagonal symmetry, each film having a thickness between 1 nm and 50 μ
m, a sum of the thickness of all films ranging from 0.5 μ
m to 50 μ
m. - View Dependent Claims (31, 32, 33)
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Specification