Multiple spacer formation/removal technique for forming a graded junction

• US 5,766,969 A
• Filed: 12/06/1996
• Issued: 06/16/1998
• Est. Priority Date: 12/06/1996
• Status: Expired due to Term

• Current Assignee: GlobalFoundries, Inc.
• Original Assignee: Advanced Micro Devices, Inc.
• Inventors: Wristers, Derick J., Gardner, Mark I., Fulford, H. Jim Jr.
• Primary Examiner(s): CHAUDHARI, CHANDRA P
• Application Number:
  US08/761,398
• Time in Patent Office: 557 Days
• Field of Search: 437/30, 437/41, 437/44, 437/149, 437/934
• US Class Current: 438/305
• CPC Class Codes: H01L 29/66492 with a pocket or a lightly doped drain selectively formed at the side of the gate
• CPC Class Codes: H01L 29/6659 with both lightly doped source and drain extensions and source and drain self-aligned to the sides of the gate, e.g. lightly doped drain [LDD] MOSFET, double diffused drain [DDD] MOSFET
• CPC Class Codes: H01L 29/7833 with lightly doped drain or source extension, e.g. LDD MOSFET's; DDD MOSFET's for thin film transistors H01L29/78618
• CPC Class Codes: Y10S 257/90 MOSFET type gate sidewall insulating spacer

Abstract

A transistor and a transistor fabrication method are presented where a sequence of spacers are formed and partially removed upon sidewall surfaces of the gate conductor to produce a graded junction having a relatively smooth doping profile. The spacers include removable and non-removable structures formed on the sidewall surfaces. The adjacent structures have dissimilar etch characteristics compared to each other and compared to the gate conductor. A first dopant (MDD dopant) and a second dopant (source/drain dopant) are implanted into the semiconductor substrate after the respective formation of the removable structure and the non-removable structure. A third dopant (LDD dopant) is implanted into the semiconductor substrate after the removable layer is removed from between the gate conductor and the non-removable structure (spacer). As a result a graded junction is created having higher concentration regions formed outside of lightly concentration regions, relative to the channel area. Such a doping profile provides superior protection against the hot-carrier effect compared to the traditional LDD structure. The smoother the doping profile, the more gradual the voltage drop across the channel/drain junction. A more gradual voltage drop gives rise to a smaller electric field and reduces the hot-carrier effect. Furthermore, the MDD and source/drain implants are performed first, prior to the LDD implant. This allows high-temperature thermal anneals to be performed first, followed by lower temperature anneals second.

Claims

1. A method for forming a transistor, comprising:

growing a gate dielectric upon a semiconductor substrate;

patterning a gate conductor between opposed sidewall surfaces across a portion of said dielectric;

forming a removable layer upon the sidewall surfaces of said gate conductor, wherein a portion of said removable layer formed upon the sidewall surfaces of said gate conductor comprises interior and exterior sidewall surfaces;

introducing a first concentration of dopants at a first energy into said semiconductor substrate at a first depth to form medium-doped-drain regions, wherein said medium-doped-drain regions have edges which are approximately aligned with the exterior sidewall surfaces of said removable layer;

forming spacers upon the exterior sidewalls of said removable layer, wherein said spacers comprise interior and exterior sidewall surfaces,

implanting a second concentration of dopants at a second energy into said semiconductor substrate at a second depth to form source/drain regions, wherein said source/drain regions have edges aligned with the exterior sidewall surfaces of said spacers;

performing a thermal anneal at a first temperature to activate said first and second concentration of dopants;

removing said removable layer at least partially from the sidewall surfaces of said gate conductor;

introducing a third concentration of dopants at a third energy and at a third depth into said semiconductor substrate to form lightly-doped-drain regions, wherein said lightly-doped-drain regions have interior edges aligned with the sidewall surfaces of said gate conductor and exterior edges aligned with the interior sidewall surfaces of said spacers; and

performing a thermal anneal at a second temperature less than said first temperature to activate said third concentration of dopants.

2. The method as recited in claim 1, wherein said removable layer comprises a material with dissimilar etch characteristics than said gate conductor.

3. The method as recited in claim 2, wherein said removable layer comprises thermally grown polysilicon oxide.

4. The method as recited in claim 2, wherein said removable layer comprises oxide deposited by chemical-vapor deposition.

5. The method as recited in claim 2, wherein said removable layer comprises metal.

6. The method as recited in claim 1, wherein said first concentration is greater than said third concentration and less than said second concentration.

7. The method as recited in claim 1, wherein said first energy is greater than said third energy and less than said second energy.

8. The method as recited in claim 1, wherein said first depth is greater than said third depth and less than said second depth.

9. The method as recited in claim 1, wherein said forming spacers comprises:

depositing a conformal layer of spacer material upon said gate dielectric and upon said removable layer; and

anisotropically removing said spacer material except upon exterior sidewall surfaces of said removable layer.

10. The method as recited in claim 9, wherein said spacer material comprises a material with dissimilar etch characteristics than said removable layer.

11. The method as recited in claim 10, wherein said spacer material comprises nitride.

12. The method as recited in claim 10, wherein said spacer material comprises oxide deposited by chemical-vapor deposition.

13. The method as recited in claim 10, wherein said spacer material comprises polysilicon.

14. The method as recited in claim 1, wherein said thermal anneals are performed in an RTA chamber.

15. The method as recited in claim 1, wherein said removing said removable layer comprises using a wet etch which is selective towards said removable layer and selective against said gate conductor and said spacers.

16. The method as recited in claim 15, wherein a portion of said removable layer remains upon the gate dielectric.