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Microelectronic encapsulation methods and equipment

  • US 5,766,987 A
  • Filed: 09/22/1995
  • Issued: 06/16/1998
  • Est. Priority Date: 09/22/1995
  • Status: Expired due to Term
First Claim
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1. A method of encapsulating a plurality of microelectronic subassemblies comprising the steps of:

  • providing a plurality of subassemblies each incorporating a dielectric layer overlying a surface of a microelectronic element, terminals on a top surface of the dielectric layer and leads connecting the terminals to contacts on the microelectronic element, said subassemblies being disposed side-by-side so that said microelectronic elements are side-by-side and so that said dielectric layers are disposed side-by-side, said dielectric layers defining openings;

    filling a liquid composition between said dielectric layers and microelectronic elements while substantially preventing flow of said liquid onto said top surfaces of said dielectric layers through said openings;

    applying a top covering layer extending over said top surfaces of said dielectric layers and occluding said openings so that said top covering layer prevents flow of said liquid onto said top surfaces during said filling step.

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