Hole generation and lead forming for integrated circuit lead frames using laser machining

• US 5,767,480 A
• Filed: 07/28/1995
• Issued: 06/16/1998
• Est. Priority Date: 07/28/1995
• Status: Expired due to Term

• Current Assignee: Steiner GmbH & Co. KG, National Semiconductor Corporation (Texas Instruments, Inc.)
• Original Assignee: National Semiconductor Corporation (Texas Instruments, Inc.)
• Inventors: Perelman, Vladimir, Anglin, Noah L., Bacile, Nick
• Primary Examiner(s): Evans, Geoffrey S.
• Application Number:
  US08/508,513
• Time in Patent Office: 1,054 Days
• Field of Search: 219/121.7, 219/121.71, 219/121.67, 219/121.68, 219/121.72, 29/827
• US Class Current: 219/121.69
• CPC Class Codes: B23K 2101/42 Printed circuits
• CPC Class Codes: B23K 2103/05 Stainless steel
• CPC Class Codes: B23K 2103/12 Copper or alloys thereof
• CPC Class Codes: B23K 2103/172 wherein at least one of the layers is non-metallic
• CPC Class Codes: B23K 2103/42 Plastics B23K2103/16 takes precedence
• CPC Class Codes: B23K 2103/50 Inorganic material, e.g. metals, not provided for in B23K2103/02 – B23K2103/26
• CPC Class Codes: B23K 26/361 for deburring or mechanical trimming B23K26/351 takes precedence
• CPC Class Codes: B23K 26/382 by boring
• CPC Class Codes: B23K 26/40 taking account of the properties of the material involved
• CPC Class Codes: H01L 21/4821 Flat leads, e.g. lead frames with or without insulating supports
• CPC Class Codes: H01L 23/49541 Geometry of the lead-frame
• CPC Class Codes: H01L 2924/00 Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
• CPC Class Codes: H01L 2924/0002 Not covered by any one of groups H01L24/00, H01L24/00 and H01L2224/00
• CPC Class Codes: Y10T 29/49121 Beam lead frame or beam lead device

Abstract

Lead frames for integrated circuit packaging are partly fabricated using laser machining to form the very small diameter (0.005 to 0.010 diameter) holes in the lead frames which are later used for epoxy adhesive penetration. A high power Nd:YAG laser provides a laser beam which is moved and focused by a control unit onto the surface of a continuous stock strip in order is to drill the epoxy holes at the desired locations. A similar apparatus, but using a copper vapor laser, can trim very fine pitch (0.005 inch) leads for the lead frames. The remaining parts of the lead frames, which involve larger sized elements, are formed conventionally by using stamping or etching. By controlling the laser operating parameters in terms of laser power, pulse duration and pulse frequency and by control of the location of the laser beam by deflecting galvanometers, very precise cutting and drilling can be accomplished, with accuracy down to 0.00005 inch or less. Tooling costs are thereby reduced and in addition new types of lead frames with very closely spaced lead tips can be fabricated that cannot be fabricated using conventional processes.

Claims

1. A method of fabricating a portion of a lead frame for an integrated circuit, comprising the steps of:

feeding a length of flat copper alloy stock; and

applying a narrow diameter beam from a copper vapor laser to a surface of the fed stock, thereby removing a portion through-and-through the stock.

2. The method of claim 1, wherein the step of feeding comprises pulling the stock.

3. The method of claim 1, further comprising the step of providing a stream of gas past the surface of the stock, thereby removing vaporized metal.

4. The method of claim 1, wherein the stock is fed from a roll of the stock.

5. The method of claim 1, further comprising the step of removing portions of the stock by pressing the stock in a punch and die combination.

6. The method of claim 1, wherein the removed portion defines a remaining portion that is a lead of the lead frame.

7. The method of claim 6, wherein the lead has a pitch of less than 0.007" to an adjacent lead.

8. An apparatus for removing through-and-through portions of flat copper alloy stock, comprising:

a feeder for feeding a length of the copper alloy stock;

a fixture for holding the fed length of stock in a predetermined position;

a copper vapor laser held in a fixed position relative to the fixture; and

a laser beam positioner held in a fixed portion relative to the laser and adapted for focusing a laser beam from the laser on selected locations on a surface of the copper alloy stock in the fixture.

9. The apparatus of claim 8, wherein the feeder includes a supply roller and a take up roller.

10. The apparatus of claim 9, further comprising means for pulling the stock from the supply roller through the fixture.

11. The apparatus of claim 8, wherein the laser beam positioned includes a reflective surface rotated by a galvanometer drive.

12. The apparatus of claim 8, further comprising a source of gas located adjacent the fixture, thereby to blow vaporized metal away from the stock.

13. The apparatus of claim 8, wherein the fixture defines a stock channel having a width and height each greater than that of the stock by a respective predetermined tolerance.