Plasma generation and plasma processing of materials

• US 5,767,627 A
• Filed: 01/09/1997
• Issued: 06/16/1998
• Est. Priority Date: 01/09/1997
• Status: Expired due to Fees

• Current Assignee: Tru-Si Technologies, Inc.
• Original Assignee: Truss Technology L L C
• Inventors: Siniaguine, Oleg
• Primary Examiner(s): Lee, Benny
• Assistant Examiner(s): Philogene, Haissa
• Application Number:
  US08/781,568
• Time in Patent Office: 523 Days
• Field of Search: 315/111.41, 315/111.21, 315/111.51, 219/121.11, 219/121.41, 219/121.44, 219/121.52, 219/122, 219/123, 219/121.36, 204/280, 204/298.2, 204/298.22, 376/121, 376/141, 376/144, 156/345, 313/231.01, 313/231.31
• US Class Current: 315/111.41
• CPC Class Codes: H05H 1/44 using more than one torch

Abstract

A plasma generation system includes one or more pairs of electrode units. Each electrode unit emits a plasma carrying gas along a respective axis. Each pair of electrode units is connected to an electric power supply that creates an electric discharge through the gas jets emitted by the two units. The axes of the two units define a "basic" plane. Each unit is associated with a magnetic circuit having two poles on the opposite sides of the basic plane. Each of these circuits is used to move the plasma gas jet emitted by the respective unit towards or away from the plasma jet emitted by the other unit of the pair of units. Therefore, these circuits control the angle at which the plasma jets meet. In addition, for each pair of the electrode units, a three-pole magnetic circuit is provided to move the plasma jets perpendicularly to the basic plane. The three poles of the magnetic circuit extend substantially along the basic plane. The three poles include a "first" pole, a "second" pole, and "middle" pole between the first and second poles. One of the plasma jets is controlled by the magnetic field passing through the first and middle poles, and the other plasma jet is controlled by the magnetic field passing through the second and middle poles.

Claims

1. A plasma generator comprising:

a first electrode unit for generating a first plasma flow;

a second electrode unit for generating a second plasma flow meeting the first plasma flow;

a first magnetic field generator for generating a first magnetic field for moving the first plasma flow in a first direction towards or away from the second plasma flow; and

a second magnetic field generator for moving the first and second plasma flows in a direction transverse to the first direction, wherein a magnetic field generated by the second generator to move the first plasma flow is controllable independently of the first magnetic field.

2. The plasma generator of claim 1 further comprising a magnetic field generator for moving the second plasma flow towards or away from the first plasma flow.

3. The plasma generator of claim 1 wherein the second magnetic field generator comprises a magnetic circuit having a first pole, a second pole and a third pole, wherein the second magnetic field generator is for generating a magnetic field passing through the first and third poles and intersecting the first plasma flow, and wherein the second magnetic field generator is for generating a magnetic field passing through the second and third poles and intersecting the second plasma flow.

4. The plasma generator of claim 3 wherein the second magnetic field generator comprises a magnetic circuit having first, second and third extensions contiguous with each other, wherein the first pole is an end of the first extension, the second pole is an end of the second extension, and the third pole is an end of the third extension.

5. The plasma generator of claim 4 further comprising a conductive coil wound around the third extension.

6. The plasma generator of claim 4 further comprising a conductive coil wound around the first extension.

7. The plasma generator of claim 4 further comprising a conductive coil wound around the first extension and a conductive coil wound around the second extension.

8. The plasma generator of claim 1 further comprising an injection tube located between the first and second electrode units for injecting a substance into plasma.

9. The plasma generator of claim 8 wherein the injection tube has a plurality of holes through which the substance is to be injected from the tube into the plasma, wherein the holes extend along a plane perpendicular to a plane containing axes along which the electrode units are to emit the plasma.

10. A plasma generator comprising:

a first electrode unit for emitting a first plasma flow along a first axis;

a second electrode unit for emitting a second plasma flow along a second axis at an angle to the first axis;

a first magnetic circuit having two poles on opposite sides of a region containing the first and second axes; and

a second magnetic circuit having first, second, and third poles positioned along said region, for generating a first magnetic field passing through the first and third poles and for generating a second magnetic field passing through the second and third poles, such that the first magnetic field intersects the first axis and the second magnetic field intersects the second axis.

11. The plasma generator of claim 10 wherein said region comprises a plane containing the first, second and third poles.

12. The plasma generator of claim 10 wherein the first magnetic circuit is for generating a magnetic field intersecting the first axis, and

wherein the plasma generator further comprises a magnetic circuit having two poles on opposite sides of said region for generating a magnetic field intersecting the second axis.

13. A method for generating plasma, the method comprising:

emitting first and second gas flows at an angle to each other;

creating an electric discharge through the first and second gas flows;

generating a magnetic field B1 intersecting the first gas flow, to control the angle at which the first and second gas flows meet;

generating a first magnetic field intersecting the first gas flow and a second magnetic field intersecting the second gas flow, wherein the first magnetic field is transverse to the field B1, and wherein the first and second magnetic fields are controlled independently from the field B1.

14. The method of claim 13 further comprising generating a magnetic field B2 intersecting the second gas flow, wherein the second magnetic field is transverse to the field B2.

15. The method of claim 14 wherein the first and second magnetic fields are controlled independently from the field B2.

16. The method of claim 13 further comprising, generating a third magnetic field passing through the first and third poles to cause the first and second gas flows to meet.

17. The method of claim 13 further comprising varying the first and second magnetic fields to cause the first and second gas flows to oscillate.

18. The method of claim 17 wherein the first and second gas flows meet and form a combined flow which oscillates with the first and second gas flows.

19. The method of claim 17 wherein the first and second magnetic fields are equal in magnitude.

20. The method of claim 17 wherein a predetermined offset exists between magnitudes of the first and second magnetic fields.