Rotating beam deflector having an integral wave front correction element

• US 5,768,001 A
• Filed: 06/10/1996
• Issued: 06/16/1998
• Est. Priority Date: 06/10/1996
• Status: Expired due to Fees

• Current Assignee: Bayer Corporation (Bayer AG), The GSI Group Inc
• Original Assignee: Bayer Intellectual Property GmbH (Bayer AG), Westwind Air Bearings Ltd (Novanta Inc.)
• Inventors: Kelley, Henry A., Tempest, Michael C.
• Primary Examiner(s): Phan, James
• Application Number:
  US08/662,562
• Time in Patent Office: 736 Days
• Field of Search: 359/196-215, 359/220-226, 359/17, 359/18, 359/558, 359/900
• US Class Current: 359/196.1
• CPC Class Codes: G02B 26/10 Scanning systems
• CPC Class Codes: H04N 1/0607 Scanning a concave surface, e.g. with internal drum type scanners H04N1/0657 takes precedence
• CPC Class Codes: H04N 1/0635 using oscillating or rotating mirrors

Abstract

An inclined mirror is provided in a cylindrical housing which has an open end and a closed end. An optical planar glass plate or window is mounted at the open end of the cylindrical housing. A laser beam enters the housing through the window and is reflected off the inclined mirror. The reflected beam leaves the housing through a side aperture in the housing. The cylindrical housing is rotated to scan the beam through a range of angles. Rotation of this optical system induces astigmatism in the beam due to the deformation of the inclined mirror at high rotational speed. If the window is tilted so that the entering laser beam is no longer normal to the window surface, then the window will induce a degree of astigmatism in the laser beam. The angular position of the window can be adjusted relative to the inclined mirror, thus compensating for the dynamic astigmatism due to rotation. A wedge is added to the planar surface of the tilted window to compensate for the coma induced in the beam by the tilt of the planar window.

Claims

1. A beam deflecting apparatus having an axis of rotation and a mounting member rotatable about the axis of rotation, said beam deflecting apparatus comprising:

(a) a deflection device for deflecting a beam and causing a particular wavefront error in the beam during rotation of said deflection device at a particular angular velocity about the axis of rotation; and

(b) a wavefront correcting device for correcting said particular wavefront error in the beam, said wavefront correcting device and said deflection device being mounted on said mounting member in a fixed orientation relative to one another and to said mounting member, said wavefront correcting device and said deflection device being rotated with said mounting member at said particular angular velocity, said beam passing through said wavefront correcting device before being deflected by said deflection device.

2. The beam deflecting apparatus according to claim 1, wherein said particular wavefront error is a portion of a collective wavefront error in the beam, said wavefront correcting device also correcting at least a portion of said collective wavefront error other than said particular wavefront error, said portion of said collective wavefront error other than said particular wavefront error not being induced by said wavefront correcting device.

3. The beam deflecting apparatus according to claim 1, wherein said wavefront correcting device is a single wavefront correcting element, said beam passing through said wavefront correcting element before and after being deflected by said deflection device.

4. The beam deflecting apparatus according to claim 1, wherein said wavefront correcting device is attached to a reflecting surface of said deflection device.

5. The beam deflecting apparatus according to claim 1, wherein said wavefront correcting device includes a refractive element comprising two-non-parallel planar surfaces having a refractive medium therebetween.

6. The beam deflecting apparatus according to claim 1, wherein said beam is a non-collimated beam and said wavefront correcting device includes a refractive element having a rotationally symmetric lens being tilted at an angle that is not perpendicular with respect to a longitudinal axis of the non-collimated beam.

7. The beam deflecting apparatus according to claim 1, wherein a refractive element acts as said deflection device.

8. A beam deflecting apparatus having an axis of rotation and a mounting member rotatable about the axis of rotation, said beam deflecting apparatus comprising:

(a) a deflection device for deflecting a beam and causing a particular wavefront error in the beam during rotation of said deflection device at a particular angular velocity about the axis of rotation; and

(b) a wavefront correcting device including a reflective element for correcting said particular wavefront error in the beam, said wavefront correcting device and said deflection device being mounted on said mounting member in a fixed orientation relative to one another and to said mounting member, said wavefront correcting device and said deflection device being rotated with said mounting member at said particular angular velocity.

9. A beam deflecting apparatus having an axis of rotation and a mounting member rotatable about the axis of rotation, said beam deflecting apparatus comprising:

(a) a deflection device for deflecting a beam and causing a particular wavefront error in the beam during rotation of said deflection device at a particular angular velocity about the axis of rotation; and

(b) a wavefront correcting device including a diffraction element for correcting said particular wavefront error in the beam, said wavefront correcting device and said deflection device being mounted on said mounting member in a fixed orientation relative to one another and to said mounting member, said wavefront correcting device and said deflection device being rotated with said mounting member at said particular angular velocity.

10. A beam deflecting apparatus having an axis of rotation and a mounting member rotatable about the axis of rotation, said beam deflecting apparatus comprising:

(a) a deflection device for deflecting a beam and causing a particular wavefront error in the beam during rotation of said deflection device at a particular angular velocity about the axis of rotation; and

(b) a wavefront correcting device for correcting said particular wavefront error in the beam, said wavefront correcting device and said deflection device being mounted on said mounting member in a fixed orientation relative to one another and to said mounting member, said wavefront correcting device and said deflection device being rotated with said mounting member at said particular angular velocity, said wavefront correcting device including a refractive element comprising two planar parallel surfaces having a refractive medium therebetween and said beam is a non-collimated beam, said refractive element being tilted at an angle that is not perpendicular with respect to a longitudinal axis of the non-collimated beam.

11. A beam deflecting apparatus having an axis of rotation and a mounting member rotatable about the axis of rotation, said beam deflecting apparatus comprising:

(a) a deflection device for deflecting a beam and causing a particular wavefront error in the beam during rotation of said deflection device at a particular angular velocity about the axis of rotation; and

(b) a wavefront correcting device for correcting said particular wavefront error in the beam, said wavefront correcting device and said deflection device being mounted on said mounting member in a fixed orientation relative to one another and to said mounting member, said wavefront correcting device and said deflection device being rotated with said mounting member at said particular angular velocity;

(c) wherein the mounting member substantially encloses said deflection device and said wavefront correcting device, said mounting member further comprising an entrance aperture and an exit aperture through which the beam enters and exits the housing respectively, both said entrance aperture and said exit aperture being sealed by said wavefront correcting device.

12. A beam deflecting apparatus having an axis of rotation and a mounting member rotatable about the axis of rotation, said beam deflecting apparatus comprising:

(a) a deflection device including a diffraction element for deflecting a beam and causing a particular wavefront error in the beam during rotation of said deflection device at a particular angular velocity about the axis of rotation; and

(b) a wavefront correcting device for correcting said particular wavefront error in the beam, said wavefront correcting device and said deflection device being mounted on said mounting member in a fixed orientation relative to one another and to said mounting member, said wavefront correcting device and said deflection device being rotated with said mounting member at said particular angular velocity.

13. A beam deflecting apparatus having an axis of rotation and a mounting member rotatable about the axis of rotation, said beam deflecting apparatus comprising:

(a) a deflection device for deflecting a beam and causing a particular wavefront error in the beam during rotation of said deflection device at a particular angular velocity about the axis of rotation, said deflection device including a mirror having a non-planar shape when not rotating; and

(b) a wavefront correcting device for correcting said particular wavefront error in the beam, said wavefront correcting device and said deflection device being mounted on said mounting member in a fixed orientation relative to one another and to said mounting member, said wavefront correcting device and said deflection device being rotated with said mounting member at said particular angular velocity.

14. A method for correcting wavefront errors in a beam caused by at least one optical element in a beam scanning apparatus, said apparatus including a deflection device and a wavefront correcting device, comprising the steps of:

(a) rotating the wavefront correcting device and the deflection device in unison about an axis of rotation;

(b) directing the beam onto the deflection device thereby deflecting the beam and causing a wavefront error in the beam; and

(c) correcting the wavefront error in the beam by passing the beam through the wavefront correcting device before the beam has been deflected by the deflection device.

15. The method according to claim 14, wherein the step of correcting the wavefront error in the beam is performed by a single wavefront correcting element before and after the beam is deflected by said deflection device.