Phase matched reset for digital micro-mirror device

• US 5,768,007 A
• Filed: 09/11/1996
• Issued: 06/16/1998
• Est. Priority Date: 09/11/1995
• Status: Expired due to Fees

• Current Assignee: Texas Instruments, Inc.
• Original Assignee: Texas Instruments, Inc.
• Inventors: Knipe, Richard, Mezenner, Rabah, Webb, Douglas A.
• Primary Examiner(s): Ben, Loha
• Application Number:
  US08/712,042
• Time in Patent Office: 643 Days
• Field of Search: 359/224, 359/214, 359/230, 359/291, 359/290, 359/846, 427/534, 427/162
• US Class Current: 359/290
• CPC Class Codes: G02B 26/0833 the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD G02B26/0825 takes precedence; micromechanical devices in general B81B
• CPC Class Codes: G02B 26/0841 the reflecting element being moved or deformed by electrostatic means
• CPC Class Codes: G09G 2310/0251 Precharge or discharge of pixel before applying new pixel voltage
• CPC Class Codes: G09G 2310/061 for resetting or blanking
• CPC Class Codes: G09G 3/346 based on modulation of the reflection angle, e.g. micromirrors micromirrors devices per se G02B26/0833
• CPC Class Codes: H04N 2005/7466 Control circuits therefor
• CPC Class Codes: H04N 5/7458 the modulator being an array of deformable mirrors, e.g. digital micromirror device [DMD]

Abstract

A method of resetting the mirrors (11, 21) of the mirror elements of a digital micro-mechanical device (DMD) (10, 20). A bias voltage is applied to the mirror elements and the surface upon which they land, but is removed after the address voltage has been switched. (FIG. 4). Immediately before the bias is removed, a reset voltage is added to the bias voltage. The reset voltage signal is comprised of a number of pulses at a frequency that matches the resonant frequency of the mirrors. The magnitude of the reset voltage results in a total applied voltage that permits vibrational energy to build but that is insufficient to cause the mirrors to become unstuck until the end of the reset signal. In other words, the magnitude of the reset voltage is small relative to that of the bias voltage.

Claims

1. A method of resetting a movable element of a micro-mechanical device, said movable element being attracted toward a landing surface by means of an address voltage, and said movable element having a known resonant frequency, comprising the steps of:

applying a bias voltage to said movable element and said landing surface;

switching said address voltage;

adding a reset voltage to said bias voltage, said reset voltage having pulses with a magnitude that is small relative to that of said bias voltage and with a frequency that is substantially the same as the resonant frequency of said movable element; and

removing said bias voltage until said moveable element is reset.

2. The method of claim 1, wherein said adding step further includes pulsing said reset voltage with a final impulse whose magnitude is greater than that of said pulses.

3. The method of claim 2, wherein said final impulse has a polarity that is the same as that of said bias voltage.

4. The method of claim 1, wherein said pulses have a polarity that is the same as that of said bias voltage.

5. The method of claim 1, wherein said pulses have a polarity that is such that the average voltage during said reset voltage is substantially the same as said bias voltage.

6. The method of claim 1, wherein said pulses have a polarity that is such that the magnitude of the average voltage during said reset voltage is less than that of said bias voltage.

7. The method of claim 1, wherein said micro-mechanical device is a digital micro-mirror device.

8. The method of claim 7, wherein said reset voltage has two said pulses.

9. The method of claim 7, wherein said reset voltage has three said pulses.

10. A method of resetting a mirror element of a digital micro-mirror device (DMD), said mirror element being tilted toward a landing surface by means of an address voltage under said mirror element and said mirror element having a known resonant frequency, comprising the steps of:

applying a bias voltage to said mirror element and said landing surface;

switching said address voltage;

adding a reset voltage to said bias voltage, said reset voltage having pulses with a magnitude that is small relative to said bias voltage and with a frequency that is substantially the same as the resonant frequency of said mirror element; and

removing said bias voltage until said moveable element is reset.

11. The method of claim 10, wherein said DMD is a hidden-hinge type DMD having a yoke under said mirror element that contacts said landing surface, and wherein said bias voltage is applied to said yoke.

12. The method of claim 10, wherein said adding step further includes pulsing said reset voltage with a final impulse whose magnitude is greater than that of said pulses.

13. The method of claim 12, wherein said final impulse has a polarity that is the same as that of said bias voltage.

14. The method of claim 10, wherein said pulses have a polarity that is the same as that of said bias voltage.

15. The method of claim 10, wherein said pulses have a polarity that is such that the average voltage during said reset voltage is substantially the same as said bias voltage.

16. The method of claim 10, wherein said pulses have a polarity that is such that the average voltage during said reset voltage is less than said bias voltage.

17. The method of claim 10, wherein said pulses have a number and magnitude such that there is insufficient force to reset said moveable element at the beginning of said reset voltage.

18. The method of claim 10, wherein said bias voltage is removed immediately after the final pulses of said pulses.