Light valve target comprising electrostatically-repelled micro-mirrors

• US 5,768,009 A
• Filed: 04/18/1997
• Issued: 06/16/1998
• Est. Priority Date: 04/18/1997
• Status: Expired due to Term

• Current Assignee: Intel Corporation
• Original Assignee: E-Beam
• Inventors: Little, Michael J.
• Primary Examiner(s): Ben, Loha
• Application Number:
  US08/844,248
• Time in Patent Office: 424 Days
• Field of Search: 359/290, 359/291, 359/293, 359/295, 359/223, 359/230, 359/846, 348/770, 348/771
• US Class Current: 359/293
• CPC Class Codes: G02B 26/0841 the reflecting element being moved or deformed by electrostatic means
• CPC Class Codes: H04N 5/7425 the modulator being a dielectric deformable layer controlled by an electron beam, e.g. eidophor projector
• CPC Class Codes: H04N 5/7458 the modulator being an array of deformable mirrors, e.g. digital micromirror device [DMD]
• CPC Class Codes: H04N 9/3141 Constructional details thereof details not peculiar to the presence of an electronic spatial light modulator G03B21/14

Abstract

A high intensity image projection system includes a micro-mirror light valve target with micro-mirror elements repulsively pivotally-actuable. Each micro-mirror of the target array comprises a fixed base electrode joined to an overlying micro-mirror element by means of a hinge with each element formed of conductive material. As such, in operation, charge deposited upon either the base electrode or the micro-mirror element is free to migrate, in response to repulsive forces between deposited charges, to the element spaced therefrom. The resulting presence of like charge distributions upon the base electrode and micro-mirror element of a micro-mirror produces a repulsive electrostatic force for pivotally deflecting the micro-mirror element by an amount proportional to the charge deposited thereon. Capacitive charge storage elements and resistive paths are provided for storing and draining the deposited charge between applications of video frame information. In one embodiment, an array of micro-mirror light valves is formed directly upon the face plate of a vidicon tube. In another, a foil is formed that is mounted within the tube by a surrounding clip. In a third embodiment, charge is delivered through a matrix of transistors.

Claims

1. A projection system comprising, in combination:

a) means for generating a beam of light and directing said beam at a target;

b) said target comprising a plurality of electrostatically-actuable micro-mirrors and being arranged to receive said beam;

c) means for distributing electrical charge in a predetermined pattern over said target so that predetermined amounts of charge are deposited upon selected micro-mirrors;

d) each of said micro-mirrors including a hinge for joining a micro-mirror element to a base electrode;

e) said micro-mirror element, said base electrode and said hinge each comprising electrically-conductive material whereby said micro-mirror element will be electrostatically repelled from said electrode to pivot about said hinge in response to the input of a quantity of electrical charge from said means for distributing; and

f) means for receiving light reflected from said target and generating a visible image therefrom.

2. A projection system as defined in claim 1 wherein said means for distributing electrical charge comprises a vidicon tube.

3. A projection system as defined in claim 2 further characterized in that said target is formed upon a face plate of said vidicon tube.

4. A projection system as defined in claim 3 wherein:

a) said base electrode is located at an interior surface of said face plate; and

b) said hinge projects from said base electrode toward the interior of said vidicon tube.

5. A projection system as defined in claim 4 further including:

a) a transparent conductive layer fixed to the interior surface of said face plate;

b) a layer of dielectric material located between each of said base electrodes and said transparent conductive layer; and

c) at least one resistive bridge element in electrical connection with and joining said base electrode to said transparent conductive layer.

6. A projection system as defined in claim 2 further comprising:

a) a grid comprising a plurality of intersecting lines of conductive material forming a plurality of grid cells;

b) each of said base electrodes being associated with a cell of said grid;

c) a layer of dielectric material interposed between each base electrode and the conductive, lines of said associated grid cell;

d) a micro-mirror element supported in spaced-apart relationship with respect to each base electrode by a hinge that projects toward a face plate of said tube;

e) a plurality of bridge elements of resistive composition;

f) each of said base electrodes being conductively joined to the associated grid cell by at least one of said bridge elements; and

g) means for mounting said target to the interior of said tube.

7. A projection system as defined in claim 1 wherein:

a) said means for distributing electrical charge comprises a substrate comprising an array of drive transistors; and

b) said plurality of micro-mirrors is arranged into a corresponding array whereby each is associated with a drive transistor.

8. A projection system as defined in claim 7 further including:

a) each of said base electrodes being in electrical contact with said substrate; and

b) an insulative layer being interposed between a portion of said base electrode and said substrate.

9. An electro-optical modulator for reflective image projection comprising, in combination:

a) a plurality of electrostatically-actuable micro-mirrors;

b) each of said micro-mirrors including an edge hinge for joining a micro-mirror element to a base electrode; and

c) said micro-mirror element, said base electrode and said hinge each comprising electrically-conductive material whereby said micro-mirror element will be electrostatically repelled from said electrode to pivot about said hinge in response to a receipt of a quantity of charge.

10. An electro-optical modulator as defined in claim 9 wherein said plurality of micro-mirrors is fixed to a first surface of a transparent substrate.

11. An electro-optical modulator as defined in claim 10 further including:

a) a transparent conductive layer fixed to said first surface of said substrate;

b) said layer being held at a predetermined potential; and

c) means for electrically connecting said micro-mirrors to said layer.

12. An electro-optical modulator as defined in claim 11 further including:

a) a layer of dielectric material interposed between the base electrode of each of said micro-mirrors and said transparent conductive layer; and

b) at least one resistive bridge element in electrical connection with each of said base electrodes and said transparent conductive layer.

13. An electro-optical modulator as defined in claim 9 further including:

a) a conductive grid;

b) said grid being held at a predetermined potential and comprising a plurality of intersecting lines of conductive material forming a plurality of grid cells;

c) each of said base electrodes being associated with a cell of said grid;

d) a micro-mirror element supported in spaced-apart relationship with respect to each base electrode by a hinge;

e) a plurality of bridge elements of resistive composition; and

f) each of said base electrodes being conductively joined to the lines of the associated grid cell by at least one of said bridge elements.

14. An electro-optical modulator as defined in claim 13 further including a layer of dielectric material interposed between each of said base electrodes and the conductive lines of said associated grid cell.

15. An electrostatically-actuable micro-mirror light valve comprising, in combination:

a) a base electrode;

b) a reflective micro-mirror element;

c) a hinge for connecting said base electrode and said micro-mirror element whereby said electrode and said element are maintained in pivotal spaced-apart relation with respect to one another; and

d) said micro-mirror element, said base electrode and said hinge each comprise electrically-conductive material whereby electrical charge received by said micro-mirror distributes over said element, said hinge and said base electrode.

16. An electrostatically-actuable micro-mirror light valve as defined in claim 15 further including:

e) a conductive surface;

f) a layer of dielectric material interposed between said base electrode and said surface; and

g) at least one resistive bridge element for providing electrical connection between said base electrode and said conductive surface.