Acoustic sensor for in-line continuous monitoring of gasses

• US 5,768,937 A
• Filed: 11/13/1996
• Issued: 06/23/1998
• Est. Priority Date: 11/13/1996
• Status: Expired due to Fees

• Current Assignee: INFICON GmbH (Inficon Holding AG)
• Original Assignee: Leybold Inficon Incorporated (Inficon Holding AG)
• Inventors: Wajid, Abdul, Hetzel, Melvin C., Hurd, Clarence
• Primary Examiner(s): Williams, Hezron E.
• Assistant Examiner(s): Wiggins, J. David
• Application Number:
  US08/748,599
• Time in Patent Office: 587 Days
• Field of Search: 73/24.06, 73/24.01, 73/23.2, 73/597, 73/579, 73/599, 73/602, 73/648, 73/646, 73/61.45, 73/24.05, 73/61.49
• US Class Current: 73/24.06
• CPC Class Codes: G01F 1/662 Constructional details
• CPC Class Codes: G01F 1/667 Arrangements of transducers for ultrasonic flowmeters; Circuits for operating ultrasonic flowmeters
• CPC Class Codes: G01N 2291/0222 Binary liquids
• CPC Class Codes: G01N 2291/02836 Flow rate, liquid level
• CPC Class Codes: G01N 2291/02881 Temperature
• CPC Class Codes: G01N 29/036 by measuring frequency or resonance of acoustic waves
• CPC Class Codes: G01N 29/22 Details , e.g. general constructional or apparatus details

Abstract

An acoustic cell includes multiple acoustic cavities fluidly coupled together. At least two of the acoustic cavities have unequal lengths and cross sections. End segments of the acoustic cell are uniformly cylindrically shaped or conically shaped. A driver transducer at one end of the acoustic cell and a receiver transducer at another end of the acoustic cell are acoustically isolated from the acoustic cell. A pair of preferably metallic isolation diaphragms transmit acoustic signals to and from the transducers without significantly altering the phase-frequency characteristics of the acoustic signals. The acoustic cell operates as an acoustic resonator operating at frequencies lower than any possible self-resonance frequencies of the isolation diaphragms or the driver and receiver transducers. When a binary gas is flowed through the cell, a processor detects a resonant frequency of the gas within the cell to determine a composition of the gas.

Claims

1. An acoustic cell for analyzing the gas concentration of a gas flowing gas mixture, said cell comprising:

a cell housing;

said cell housing including an interior having a plurality of adjacently coupled acoustic cavities which defines a resonator chamber;

gas flowing means, fluidly connected to said cell housing, for flowing a gas mixture through said resonator chamber;

acoustic driving means at a first end of said cell housing for sending an acoustic signal through said gas mixture flowing through said cell housing;

receiving means at a second end of said cell housing for receiving said acoustic signal;

processing means for processing said received acoustic signal;

means for detecting the resonant frequency of said flowing gas mixture; and

for determining the composition of said gas mixture, and

means for acoustically isolating at least one of said driving means and said receiving means from said cell.

2. An acoustic cell according to claim 1, wherein said flowing means includes:

a gas inlet tube connected to said housing by a gas inlet in said cell housing; and

a gas outlet tube connected to said cell housing by a gas outlet in said cell housing.

3. An acoustic cell according to claim 1, wherein a number of said plurality of acoustic cavities is three.

4. An acoustic cell according to claim 1, wherein at least two of said plurality of acoustic cavities are of different size.

5. An acoustic cell according to claim 1, wherein said driving means includes:

a driver transducer; and

a first diaphragm between said driver transducer and said first end of said cell housing.

6. An acoustic cell according to claim 5, wherein said driver transducer includes:

a driver cartridge housing;

a metal housing fitting inside said driver cartridge housing;

at least one acoustically isolating o-ring around said driver cartridge housing;

at least one acoustically isolating o-ring inside said driver cartridge housing;

a driving microphone inside said metal housing adjacent said first diaphragm;

an anti-driving microphone inside said metal housing back to back with said driving microphone; and

said driving microphone and said anti-driving microphone sharing a synchronous input.

7. An acoustic cell according to claim 6, wherein said receiving means includes:

a receiver transducer; and

a second diaphragm between said receiver transducer and said second end of said cell housing.

8. An acoustic cell according to claim 7, wherein said receiver transducer includes:

a receiver cartridge housing;

at least one acoustically isolating o-ring around said receiver cartridge housing; and

a receiver microphone inside said receiver cartridge housing adjacent said second diaphragm.

9. An acoustic cell according to claim 8, wherein:

said driving microphone and said anti-driving microphone are electrodynamic microphones; and

said receiver microphone is an electret microphone.

10. An acoustic cell according to claim 1, wherein:

said driving means includes an electrostatic microphone; and

said receiver means includes a capacitance microphone.

11. An acoustic cell according to claim 1, wherein:

said driving means includes a driver cartridge housing;

at least one acoustically isolating o-ring around said driver cartridge housing;

a first diaphragm between said driver cartridge housing and said first end of said cell housing;

a metal housing fitting inside said driver cartridge housing;

a driving microphone inside said metal housing adjacent said first diaphragm;

an anti-driving microphone inside said metal housing in a back to back relationship with said driving microphone;

said driving microphone and said anti-driving microphone sharing a synchronous input; and

said receiver means includes

a receiver cartridge housing;

a second diaphragm between said receiver cartridge housing and said second end of said housing;

at least one acoustically isolating o-ring around said receiver cartridge housing; and

a receiver microphone inside said receiver cartridge housing adjacent said second diaphragm.

12. An acoustic cell according to claim 11, wherein an operating frequency of said acoustic cell is lower than both a self-resonance frequency of said first diaphragm and a self-resonance frequency of said second diaphragm.

13. An acoustic cell according to claim 11, wherein an operating frequency of said acoustic cell is lower than both a self-resonance frequency of said driver cartridge housing and a self-resonance frequency of said receiver cartridge housing.

14. An acoustic cell according to claim 11, further comprising:

heating means, attached to said cell housing, for heating said acoustic cell; and

sensing means, attached to said cell housing, for sensing a temperature of said acoustic cell.

15. An acoustic cell according to claim 1, further comprising:

heating means, attached to said cell housing, for heating said acoustic cell; and

sensing means, attached to said cell housing, for sensing a temperature of said acoustic cell.

16. An acoustic sensor for analyzing the gas composition of a flowing gas mixture, said sensor comprising:

a housing;

said housing including an interior having a plurality of acoustic cavities defining a resonator chamber;

flowing means, fluidly connected to said housing, for flowing a gas mixture through said housing;

driver transducing means at a first end of said housing for receiving a driving electrical signal, converting said driving electrical signal to a driving acoustic signal, and sending said driving acoustic signal through said resonator chamber;

receiver transducing means at a second end of said housing for receiving a received acoustic signal, converting said received acoustic signal to a received electrical signal, and outputting said received electrical signal;

means for acoustically isolating at least one of said driver transducing means and said receiver transducing means from the remainder of the sensor;

processing means for sending said driving electrical signal to said driver transducing means and for receiving said received electrical signal outputted by said receiver transducing means;

means for varying a frequency of said driving acoustic signal; and

means for detecting a resonance frequency associated with said gas mixture;

wherein said processing means includes means for determining a composition of said gas mixture.

17. An acoustic sensor according to claim 16, wherein said means for detecting a resonance frequency associated with said gas includes measuring a phase lag of said received electrical signal with respect to said driving electrical signal.

18. An acoustic sensor according to claim 16, wherein said means for detecting a resonance frequency associated with said gas includes measuring an amplitude of said received electrical signal with respect to said driving electrical signal.

19. An acoustic sensor according to claim 16, including means for monitoring and controlling the temperature within said resonant chamber.

20. An acoustic sensor according to claim 16, including three adjacent acoustic cavities disposed between said driver transducing means and said receiver transducer means defining an acoustic resonance chamber, in which first and second acoustic cavities of substantially the same size sandwich a third smaller acoustic cavity, said acoustic resonance chamber having a total volume which is less smaller than 20 cc.

21. An acoustic sensor according to claim 20, wherein the sensor has an operating frequency which is less than approximately 5 kilohertz.

22. A method for determining the composition of a gas mixture, said method comprising the steps of:

providing an acoustic cell having a plurality of acoustic cavities;

flowing a gas mixture through said acoustic cell;

receiving a driving electrical signal from a digital signal controller;

converting said driving electrical signal to a driving acoustic signal;

sending said driving acoustic signal through said gas mixture flowing through said acoustic cell from driving means provided in said acoustic cell;

receiving, using receiving means disposed in an opposite end of said cell, a received acoustic signal after the step of sending said driving signal through said gas mixture;

acoustically isolating at least one of the sending means and receiving means from the remainder of said cell prior to sending said acoustic signal;

converting said received acoustic signal to a received electrical signal;

outputting said received electrical signal to said digital signal controller;

processing, within said digital signal controller, said received electrical signal to detect a resonance frequency associated with said gas mixture; and

determining, based on said resonance frequency, the composition of said gas mixture.