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Reduced pressure and normal pressure treatment apparatus

  • US 5,769,952 A
  • Filed: 04/17/1997
  • Issued: 06/23/1998
  • Est. Priority Date: 06/07/1994
  • Status: Expired due to Fees
First Claim
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1. A treatment apparatus comprising a gas-tight treatment chamber and a gate valve opening and closing a treatment object transport opening formed in the treatment chamber, wherein:

  • a treatment object is treated by a treatment gas or plasma thereof;

    the surface of the gate valve exposed to an atmosphere within the treatment chamber includes a multi-layer construction having a surface layer portion exposed to the atmosphere within the treatment chamber and a rear base portion; and

    the surface layer portion is attached by four corner bolts provided one at each corner of the surface layer portion to the rear base portion, the surface layer portion is removed with respect to the rear base portion by loosening the corner bolts therefrom, and wherein the corner bolts are not exposed to the atmosphere within the treatment chamber when the gate valve is closed.

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