Reduced pressure and normal pressure treatment apparatus

• US 5,769,952 A
• Filed: 04/17/1997
• Issued: 06/23/1998
• Est. Priority Date: 06/07/1994
• Status: Expired due to Fees

• Current Assignee: Tokyo Electron Limited
• Original Assignee: Tokyo Electron Limited
• Inventors: Komino, Mitsuaki
• Primary Examiner(s): Breneman, R. Bruce
• Assistant Examiner(s): LUND, JEFFRIE ROBERT
• Application Number:
  US08/842,833
• Time in Patent Office: 432 Days
• Field of Search: 118/733, 118/728, 118/723 E, 118/719, 156/345, 251/62, 251/87, 251/193, 251/63.5, 251/326, 251/329, 251/301, 251/366, 137/315
• US Class Current: 118/733
• CPC Class Codes: C23C 16/4404 Coatings or surface treatment on the inside of the reaction chamber or on parts thereof
• CPC Class Codes: C23C 16/54 Apparatus specially adapted for continuous coating
• CPC Class Codes: F16K 51/02 specially adapted for high-vacuum installations
• CPC Class Codes: H01L 21/67126 Apparatus for sealing, encapsulating, glassing, decapsulating or the like processes H01L23/02, H01L23/28
• CPC Class Codes: H01L 21/67745 characterized by movements or sequence of movements of transfer devices
• CPC Class Codes: Y10T 137/599 Pressure regulating type valve

Abstract

A reduced pressure treatment unit comprising a plurality of treatment chambers conducting reduced pressure process treatment of a treatment object (wafer) and a normal pressure treatment unit conducting normal pressure process treatment of the treatment object, which are connected by a load lock chamber. The reduced pressure treatment unit comprises a plurality of reduced pressure process treatment chambers connected by means of a gate valve to a reduced pressure transport chamber equipped with a robot arm. The normal pressure treatment unit comprises a plurality of normal pressure process treatment chambers disposed in the vicinity of a robot arm. The load lock chamber is disposed at a position where the transport ranges of the two robot arms overlap. Also, the gate valve opening and closing the transport opening between the load lock and treatment chambers comprises a surface layer portion exposed to the atmosphere within the treatment chamber and a rear base portion whereby the surface layer portion is freely attached and removed with respect to the base portion by, e.g., screws, thus enabling independent replacement of the surface layer portion.

Claims

1. A treatment apparatus comprising a gas-tight treatment chamber and a gate valve opening and closing a treatment object transport opening formed in the treatment chamber, wherein:

a treatment object is treated by a treatment gas or plasma thereof;

the surface of the gate valve exposed to an atmosphere within the treatment chamber includes a multi-layer construction having a surface layer portion exposed to the atmosphere within the treatment chamber and a rear base portion; and

the surface layer portion is attached by four corner bolts provided one at each corner of the surface layer portion to the rear base portion, the surface layer portion is removed with respect to the rear base portion by loosening the corner bolts therefrom, and wherein the corner bolts are not exposed to the atmosphere within the treatment chamber when the gate valve is closed.

2. The treatment apparatus according to claim 1, wherein the surface layer portion has an O-ring arranged to isolate the four corner bolts from the treatment chamber atmosphere when the gate valve is closed.

3. A treatment apparatus comprising a gas-tight treatment chamber and a gate valve opening and closing a treatment object transport opening formed in the treatment chamber, wherein:

a treatment object is treated by a treatment gas or plasma thereof;

the gate valve includes a multi-layer construction having a surface layer portion and a rear base portion;

the surface layer portion has a surface and a sealing means on the surface;

when the gate valve is closed, the sealing means defines a region of the surface that is exposed to the atmosphere within the treatment chamber and a second region of the surface that is isolated from the atmosphere within the treatment chamber; and

the surface layer portion is attached to the rear base portion by fasteners that pass through the second region of the surface to the rear base portion, whereby the fasteners are isolated from the atmosphere within the treatment chamber.

4. The treatment apparatus according to claim 3, wherein the sealing means includes an O-ring.

5. The treatment apparatus according to claim 4, wherein the fasteners are bolts.