Operation control device and method for a plurality of electric power consuming systems

• US 5,770,895 A
• Filed: 06/07/1996
• Issued: 06/23/1998
• Est. Priority Date: 06/08/1995
• Status: Expired due to Term

• Current Assignee: Tokyo Electron Limited
• Original Assignee: Tokyo Electron Limited
• Inventors: Kumasaka, Iwao
• Primary Examiner(s): Wysocki, Jonathan
• Assistant Examiner(s): Ganjian, Peter
• Application Number:
  US08/660,475
• Time in Patent Office: 746 Days
• Field of Search: 307/11, 307/31, 307/32, 307/33, 307/34, 307/38, 307/39, 307/112, 307/116, 307/125, 307/126, 307/130, 307/131, 307/139, 307/140, 323/209, 323/205, 323/208, 364/483, 364/492, 364/493, 340/825.06, 340/825.09
• US Class Current: 307/32
• CPC Class Codes: H02J 2310/60 Limiting power consumption in the network or in one section of the network, e.g. load shedding or peak shaving
• CPC Class Codes: H02J 3/14 by switching loads on to, or off from, network, e.g. progressively balanced loading
• CPC Class Codes: Y02B 70/3225 Demand response systems, e.g. load shedding, peak shaving
• CPC Class Codes: Y04S 20/222 Demand response systems, e.g. load shedding, peak shaving

Abstract

An operation control device for use in an electric power supply system for supplying electric power from one electric power source to a plurality of electric power consuming systems, which can determine based on an outside signal whether or not the electric power consuming systems can proceed to operations includes an output electric power detecting unit for detecting electric power outputted by the electric power source; and a comparison control unit for comparing a detected value of the output electric power detecting unit with a preset reference value to output a comparison signal indicative of a result of the comparison as the outside signal to be supplied to the plural electric power consuming systems. The comparison signal indicating an inoperable state when the detected value exceeds the reference value, whereby the electric power consuming systems are permitted to proceed to steps of their operations or stand by. As a result, a plurality of electric power systems can be efficiently administered in consideration of a total electric power consumption amount.

Claims

1. An operation control device of a heat treatment apparatus for use in an electric power supply system for supplying electric power from one electric power source to a plurality of electric power consuming systems, which can determine based on an outside signal whether or not the electric power consuming systems can proceed operating, said operation control device comprising:

an output electric power detecting unit for detecting electric power outputted by the electric power source;

a comparison control unit for comparing a detected value of the output electric power detecting unit with a present reference value to output a comparison signal indicative of a result of the comparison as the outside signal to be supplied to the plural electric power consuming systems, whereby the comparison signal indicating an inoperable stand-by state when the detected value exceeds the reference value; and

a determination means connected to each one of the plurality of electric sower consuming systems for determining based on the comparison signal as the outside signal whether there is sufficient electrical capacity to proceed to a next step, wherein the next step is a step requiring a largest electric power consumption amount as each one of the plurality of electric power consuming systems having a set of steps where each step uses a different electric sower consumption amount, whereby if there is insufficient electrical capacity the next step is not executed until sufficient electrical capacity exists.

2. The operation control device for a plurality of electric power consuming systems according to claim 1, wherein the comparison control unit outputs comparison signals corresponding to a plurality of the reference value having set values which are different from each other;

the plural comparison signals are referred to as the outside signals immediately before the electric power consuming systems proceed to those of the respective steps in operation.

3. An operation control method of heat treatment for an electric power supply system for supplying electric power from one electric power source to a plurality of electric power consuming systems which can determine based on an outside signal whether or not the electric power consuming systems can proceed operating, the method comprising the steps of:

detecting output electric power from the electric power source;

comparing a detected value of the output electric power with a preset reference value to output a comparison signal as a result of the comparison;

supplying the comparison signal as the outside signal to the respective electric power consuming systems, whereby the comparison signal indicating an inoperable stand-by state when the detected value exceeds the reference values and

determining based on the comparison signal whether there is sufficient electrical capacity to proceed to a next step, wherein the next step is a step requiring a largest electric power consuming systems having a set of steps where each step uses a different electric power consumption amount, whereby if there is insufficient electrical capacity the next step is not executed until sufficient electrical capacity exists.

4. The operation control method for a plurality of electric power consuming systems according to claim 3, wherein comparison signals corresponding to a plurality of the reference values;

the plural comparison signals are referred to as the outside signals immediately before the electric power consuming systems proceed to those of the respective steps in operation.

5. The operation control method for a plurality of electric power consuming systems according to claim 4, wherein one of the plural comparison signals is referred to as the outside signal to determine whether or not the electric power consuming systems starts operations.