Linear motor

• US 5,770,899 A
• Filed: 09/22/1997
• Issued: 06/23/1998
• Est. Priority Date: 12/14/1994
• Status: Expired due to Term

• Current Assignee: Nikon Corporation
• Original Assignee: Nikon Corporation
• Inventors: Hayashi, Yutaka
• Primary Examiner(s): LaBalle, Clayton E.
• Application Number:
  US08/934,815
• Time in Patent Office: 274 Days
• Field of Search: 310/12, 310/13, 310/14, 310/54
• US Class Current: 310/12.06
• CPC Class Codes: G03F 7/70716 Stages
• CPC Class Codes: G03F 7/70866 of mask or workpiece
• CPC Class Codes: H02K 11/00 Structural association of dynamo-electric machines with electric components or with devices for shielding, monitoring or protection casings, enclosures or supports H02K5/00
• CPC Class Codes: H02K 41/031 of the permanent magnet type
• CPC Class Codes: H02K 9/00 Arrangements for cooling or ventilating channels or ducts in parts of the magnetic circuit H02K1/20, H02K1/32; channels or ducts in or between conductors H02K3/22, H02K3/24
• CPC Class Codes: H02K 9/197 in which the rotor or stator space is fluid-tight, e.g. to provide for different cooling media for rotor and stator

Abstract

A linear motor has two relatively members moveable a coil mounted to one of the two members, a magnet mounted to the other of the two members, a circulating pump for circulating a cooling medium via a circulating pipe in an outer tube surrounding the coil, a pressure detecting device for detecting the pressure of the cooling medium, and a control system for controlling the operation of the circulating pump based on the detected pressure value from the pressure detecting device.

Claims

1. A linear motor comprising:

two relatively movable members;

a coil mounted to one of said two members;

a magnet mounted to the other of said two members;

a tube surrounding said coil;

a supply system that supplies fluid into said tube;

a pressure detecting device that detects pressure of said fluid; and

a control system that controls said supply system based on an output of said pressure detecting device to regulate the pressure of said fluid in said tube so as to inhibit deformation of said tube by said fluid.

2. A linear motor according to claim 1, further comprising:

a cooling system that cools said fluid.

3. A linear motor according to claim 1, wherein one of said two members is fixed and said coil is mounted to said fixed member.

4. A linear motor according to claim 1, further comprising:

a temperature sensor that measures temperature of said fluid so that the temperature of said fluid can be adjusted.

5. A linear motor according to claim 1, wherein said supply system includes a pump and said control system controls said pump based on the output of said pressure detecting device.

6. A linear motor according to claim 5, wherein said control system reduces an output of said pump when the output of said pressure detecting device exceeds a threshold value determined based on atmospheric pressure and a thickness of said tube.

7. A linear motor according to claim 5, wherein said control system stops an output of said pump when the output of said pressure detecting device exceeds a threshold value determined based on atmospheric pressure and a thickness of said tube.

8. An exposure apparatus comprising:

a stage having two relatively movable members, said stage for carrying a mask or a photosensitive substrate thereon;

a coil mounted to one of said two members;

a magnet mounted to the other of said two members;

a tube surrounding said coil;

a supply system that supplies fluid into said tube;

a pressure detecting device that detects pressure of said fluid; and

a control system that controls said supply system based on an output of said pressure detecting device to regulate the pressure of said fluid in said tube so as to inhibit deformation of said tube by said fluid.

9. A method of cooling a linear motor comprising the steps of:

supplying fluid into a tube surrounding a coil of said linear motor;

measuring pressure of said fluid; and

regulating the pressure of said fluid in said tube based on the measured pressure of said fluid so as to inhibit deformation of said tube by said fluid.

10. A method according to claim 9, wherein said step of regulating the pressure of said fluid includes adjusting the pressure of said fluid when the measured pressure of said fluid exceeds a threshold value determined based on atmospheric pressure and a thickness of said tube.

11. A method according to claim 9, wherein said step of regulating the pressure of said fluid includes a step of drawing said fluid into said tube based on the measured pressure of said fluid.

12. A linear motor comprising:

two relatively movable members;

a coil mounted to one of said two members;

a magnet mounted to the other of said two members;

a tube surrounding said coil;

a supply system that supplies fluid into said tube;

a detecting device that detects a parameter indicative of pressure of said fluid; and

a control system that controls said supply system based on an output of said detecting device so as to inhibit deformation of said tube by pressure of said fluid.

13. A linear motor according to claim 12, wherein said supply system includes a pump and said control system controls said pump based on the output of said detecting device.

14. A linear motor according to claim 13, wherein said control system reduces an output of said pump when the output of said detecting device changes at more than a predetermined rate.

15. A linear motor according to claim 13, wherein said control system stops an output of said pump when the output of said detecting device changes at more than a predetermined rate.

16. A method of cooling a linear motor comprising the steps of:

supplying fluid into a tube surrounding a coil of said linear motor;

detecting a parameter indicative of pressure of said fluid; and

regulating the supply of fluid to said tube based on the detected parameter so as to inhibit deformation of said tube by pressure of said fluid.

17. A method according to claim 16, wherein said step of regulating the supply of fluid includes adjusting the supply of fluid when the detected parameter changes at more than a predetermined rate.

18. A linear motor comprising:

two relatively movable members;

a coil mounted to one of said two members;

a magnet mounted to the other of said two members;

a tube surrounding said coil;

a supply system that supplies fluid into said tube; and

a detecting device that detects a parameter indicative

a detecting device that detects a parameter indicative of pressure of said fluid in said tube.

19. A linear motor according to claim 18, wherein said fluid is liquid.

20. A linear motor according to claim 18, further comprising:

a temperature sensor that measures temperature of said fluid in said tube.

21. A linear motor according to claim 18, wherein said detecting device directly detects pressure of said fluid.

22. A linear motor according to claim 18, further comprising:

a cooling system that cools said fluid.

23. A linear motor according to claim 18, further comprising:

a controller that controls an operation of said supply system based on an output of said detecting device.

24. A linear motor according to claim 23, wherein said controller controls said supply system to reduce an output of said supply system when a detection result of said detecting device exceeds a threshold value determined based on atmospheric pressure and a thickness of said tube.

25. A linear motor according to claim 23, wherein said controller controls the operation of said supply system to stop an output of said supply system when a detection result of said detecting device exceeds a threshold value determined based on atmospheric pressure and a thickness of said tube.

26. A linear motor according to claim 23, wherein said controller reduces or stops an output of said supply system when a parameter of an output of said detecting device exceeds a predetermined limit.

27. A linear motor according to claim 18, wherein one of said two members is fixed, and said coil is mounted to said one member.

28. A linear motor according to claim 18, further comprising:

a suction device that is connected to said tube, and that sucks said fluid supplied in said tube based on an output of said detecting device.

29. A linear motor according to claim 18, wherein said detecting device detects flow rate of said fluid.

30. A linear motor comprising:

two relatively moveable members;

a coil mounted to one of said two members;

a magnet mounted to the other of said two members;

a tube surrounding said coil;

a supply system that supplies fluid into said tube; and

a controller that is connected to said supply system, and that adjusts pressure of said fluid in said tube.

31. A linear motor according to claim 30, wherein said fluid is liquid.

32. A linear motor according to claim 30, further comprising:

a temperature sensor that measures temperature of said fluid in said tube.

33. A linear motor according to claim 32, wherein said controller adjusts pressure of said fluid in accordance with an output of said temperature sensor.

34. A linear motor according to claim 30, further comprising:

a cooling system that cools said fluid.

35. A linear motor comprising:

a coil;

a tube surrounding said coil;

a member that is opposed to said tube at a predetermined distance, and that is movable relative to said tube;

a supply system that supplies fluid into said tube; and

a detecting device that detects a parameter indicative of a deformation state of said tube.

36. A linear motor according to claim 35, wherein said member is a magnet.

37. A linear motor according to claim 35, wherein said detecting device directly detects pressure of said fluid in said tube.

38. A linear motor according to claim 35, wherein said fluid is liquid.

39. A linear motor according to claim 35, wherein said detecting device detects a parameter related to pressure of said fluid.

40. A linear motor according to claim 35, further comprising:

a cooling system that cools said fluid.

41. A linear motor according to claim 35, further comprising:

a controller that controls an operation of said supply system based on an output of said detecting device.

42. A linear motor according to claim 41, wherein said controller controls said supply system to reduce an output of said supply system when a detection result of said detecting device exceeds a threshold value determined based on atmospheric pressure and a thickness of said tube.

43. A linear motor according to claim 41, wherein said controller controls said supply system to stop an output of said supply system when a detection result of said detecting device exceeds a threshold value determined based on atmospheric pressure and a thickness of said tube.

44. A linear motor according to claim 41, wherein said controller reduces or stops an output of said supply system when a parameter of an output of said detecting device exceeds a predetermined limit.

45. A linear motor according to claim 35, wherein said coil is mounted to a fixed member of said linear motor.

46. A linear motor according to claim 35, further comprising:

a suction device that is connected to said tube, and that sucks said fluid supplied in said tube based on an output of said detecting device.

47. A linear motor according to claim 35, wherein said detecting device detects flow rate of said fluid.

48. A linear motor comprising:

a coil;

a tube surrounding said coil;

a supply system that supplies fluid into said tube; and

a detecting device that detects a parameter indicative of pressure of said fluid in said tube.

49. A linear motor according to claim 48, wherein said fluid is liquid.

50. A linear motor according to claim 48, further comprising:

a temperature sensor that measures temperature of said fluid in said tube.

51. A linear motor according to claim 48, wherein said detecting device directly detects pressure of said fluid.

52. A linear motor according to claim 48, further comprising:

a cooling system that cools said fluid.

53. A linear motor according to claim 48, further comprising:

a controller that controls an operation of said supply system based on an output of said detecting device.

54. A linear motor according to claim 53, wherein said controller controls said supply system to reduce an output of said supply system when a detection result of said detecting device exceeds a threshold value determined based on atmospheric pressure and a thickness of said tube.

55. A linear motor according to claim 53, wherein said controller controls said supply system to stop an output of said supply system when a detection result of said detecting device exceeds a threshold value determined based on atmospheric pressure and a thickness of said tube.

56. A linear motor according to claim 53, wherein said controller reduces or stops an output of said supply system when a parameter of an output of said detecting device exceeds a predetermined limit.

57. A linear motor according to claim 48, wherein said coil is mounted to a fixed member of said linear motor.

58. A linear motor according to claim 48, further comprising:

a suction device that is connected to said tube, and that sucks said fluid supplied in said tube based on an output of said detecting device.

59. A linear motor according to claim 48, wherein said detecting device detects flow rate of said fluid.

60. An operation method of a linear motor comprising the steps of:

supplying fluid into a tube surrounding a coil mounted to one of two relatively moveable members of said linear motor, a magnet being mounted to the other of said two members; and

detecting a parameter indicative of pressure of fluid in said tube.

61. A method according to claim 60, wherein said fluid is liquid.

62. A method according to claim 60, wherein said parameter is temperature of said fluid.

63. A method according to claim 60, wherein said parameter is pressure of said fluid.

64. A method according to claim 60, further comprising the step of cooling said fluid.

65. A method according to claim 60, further comprising the step of controlling said supplying based on a result of said detecting.

66. A method according to claim 65, wherein said controlling includes reducing the supply of fluid to said tube when the result of said detecting exceeds a threshold value based on atmospheric pressure and a thickness of said tube.

67. A method according to claim 65, wherein said controlling includes stopping the supply of fluid to said tube when the result of said detecting exceeds a threshold value based on atmospheric pressure and a thickness of said tube.

68. A method according to claim 65, wherein said controlling includes reducing or stopping the supply of fluid to said tube when a parameter based on change of the detecting result exceeds a predetermined limit.

69. A method according to claim 60, wherein said member to which the coil is mounted is a fixed member.

70. A method according to claim 60, wherein said supplying includes sucking fluid into said tube with a suction device connected to said tube, and further comprising the step of controlling said suction device based on a result of said detecting.

71. A method according to claim 60, wherein said parameter is flow rate of said fluid.

72. An operation method of a linear motor comprising the steps of:

supplying fluid into a tube surrounding a coil mounted to one of two relatively moveable members of said linear motor, a magnet being mounted to the other of said two members; and

adjusting the pressure of said fluid in said tube with a controller that is connected to said supply system.

73. A method according to claim 72, wherein said fluid is liquid.

74. A method according to claim 72, further comprising measuring temperature of said fluid in said tube with a temperature sensor.

75. A method according to claim 74, wherein said controller adjusts pressure of said fluid in accordance with an output of said temperature sensor.

76. A method according to claim 72, further comprising the step of cooling said fluid.

77. An operation method of a linear motor comprising:

supplying fluid into a tube surrounding a coil of said linear motor, said tube being opposed at a predetermined distance to a member of said linear motor that is moveable relative to said tube; and

detecting a parameter indicative of a deformation state of said tube.

78. A method according to claim 77, wherein said member is a magnet.

79. A method according to claim 77, wherein said parameter is pressure of fluid in said tube.

80. A method according to claim 77, wherein said fluid is liquid.

81. A method according to claim 77, wherein said parameter is related to pressure of said fluid.

82. A method according to claim 77, further comprising the step of cooling said fluid.

83. A method according to claim 77, further comprising the step of controlling said supplying based on a result of said detecting.

84. A method according to claim 83, wherein said controlling includes reducing the supply of fluid to said tube when the result of said detecting exceeds a threshold value based on atmospheric pressure and a thickness of said tube.

85. A method according to claim 83, wherein said controlling includes stopping the supply of fluid to said tube when the result of said detecting exceeds a threshold value based on atmospheric pressure and a thickness of said tube.

86. A method according to claim 83, wherein said controlling includes reducing or stopping the supply of fluid to said tube when a parameter based on change of the detecting result exceeds a predetermined limit.

87. A method according to claim 77, wherein said coil is mounted to a fixed member of said linear motor.

88. A method according to claim 77, wherein said supplying includes sucking fluid into said tube with a suction device connected to said tube, and further comprising the step of controlling said suction device based on a result of said detecting.

89. A method according to claim 77, wherein said parameter is flow rate of said fluid.

90. An operation method of a linear motor comprising:

supplying fluid into a tube surrounding a coil of said linear motor; and

detecting a parameter indicative of pressure of said fluid in said tube.

91. A method according to claim 90, wherein said fluid is liquid.

92. A method according to claim 90, wherein said parameter is temperature of said fluid.

93. A method according to claim 90, wherein said parameter is pressure of said fluid.

94. A method according to claim 90, further comprising the step of cooling said fluid.

95. A method according to claim 90, further comprising the step of controlling said supplying based on a result of said detecting.

96. A method according to claim 95, wherein said controlling includes reducing the supply of fluid to said tube when the result of said detecting exceeds a threshold value based on atmospheric pressure and a thickness of said tube.

97. A method according to claim 95, wherein said controlling includes stopping the supply of fluid to said tube when the result of said detecting exceeds a threshold value based on atmospheric pressure and a thickness of said tube.

98. A method according to claim 95, wherein said controlling includes reducing or stopping the supply of fluid to said tube when a parameter based on change of the detecting result exceeds a predetermined limit.

99. A method according to claim 90, wherein said coil is mounted to a fixed member of said linear motor.

100. A method according to claim 90, wherein said supplying includes sucking fluid into said tube with a suction device connected to said tube, and further comprising the step of controlling said suction device based on a result of said detecting.

101. A method according to claim 90, wherein said parameter is flow rate of said fluid.