Baseband V-I probe

• US 5,770,922 A
• Filed: 07/22/1996
• Issued: 06/23/1998
• Est. Priority Date: 07/22/1996
• Status: Expired

• Current Assignee: MKS Instruments Incorporated
• Original Assignee: ENI Technology, Inc. (MKS Instruments Incorporated)
• Inventors: Gerrish, Kevin S., Vona, Daniel F. Jr.
• Primary Examiner(s): Lee, Benny
• Assistant Examiner(s): Philogene, Haissa
• Application Number:
  US08/684,833
• Time in Patent Office: 701 Days
• Field of Search: 315/111.21, 315/111.51, 315/111.41, 315/111.71, 315/224, 315/39, 333/32, 330/294, 330/295, 330/291, 330/124 R, 219/121.21, 219/121.36, 219/121.43, 219/250
• US Class Current: 315/111.21
• CPC Class Codes: H01J 37/32082 Radio frequency generated discharge H01J37/32357, H01J37/32366, H01J37/32394 and H01J37/32403 take precedence
• CPC Class Codes: H01J 37/32935 Monitoring and controlling tubes by information coming from the object and/or discharge
• CPC Class Codes: H05H 1/0081 by electric means

Abstract

An RF probe for a plasma chamber picks up current and voltage samples of the RF power applied to an RF plasma chamber, and the RF voltage and current waveforms are supplied to respective mixers. A local oscillator supplies both mixers with a local oscillator signal at the RF frequency plus or minus about 15 KHz, so that the mixers provide respective voltage and current baseband signals that are frequency shifted down to the audio range. The phase relation of the applied current and voltage is preserved in the baseband signals. These baseband signals are then applied to a stereo, two-channel A/D converter, which provides a serial digital signal to a digital signal processor or DSP. A local oscillator interface brings a feedback signal from the DSP to the local oscillator. The DSP can be suitably programmed to obtain complex Fast Fourier Transforms of the voltage and current baseband samples. The frequency-domain spectra are analyzed to obtain, with great accuracy, magnitude of voltage and current and phase angle. Other parameters are derived from these three.

Claims

1. A plasma arrangement in which an RF power generator supplies an RF electrical wave in an RF frequency range to a power input of a plasma chamber within which said RF electrical wave produces a plasma, and in which a plasma probe picks up an RF voltage waveform of said electrical wave and an RF current waveform of said electrical wave;

comprising the improvement wherein said plasma probe comprises a controllable local oscillator providing a local oscillator signal;

a voltage signal mixer having inputs receiving said RF voltage waveform and said local oscillator signal, respectively, and an output providing a baseband voltage signal;

a current signal mixer having inputs receiving said RF current waveform and said local oscillator signal, respectively, and having an output providing a baseband current signal;

an A/D converter having a first channel input to which said baseband voltage signal is applied, a second channel input to which said baseband current signal is applied, and a serial output providing a time-synchronous serial digital signal containing digital representations of said baseband voltage waveform and said baseband current waveform;

a digital signal processor having an input coupled to the serial output of said A/D converter, said digital signal processor being suitably programmed to compute amplitude and relative phase of said voltage baseband signal and said current baseband signal;

external interface means for providing an output determination based on said amplitudes and relative phase; and

local oscillator interface means coupled to said digital signal processor and to said local oscillator permitting said digital signal processor to control the frequency of said local oscillator.

2. The arrangement of claim 1, wherein said local oscillator provides said local oscillator frequency within approximately 0.2 KHz to 20 KHz of the frequency of the power input wave.

3. The arrangement of claim 1 wherein said A/D converter is a high-fidelity audio-frequency stereo converter.

4. The arrangement of claim 1 wherein said local oscillator provides said local oscillator signal at a local oscillator frequency that differs from the frequency of said input power wave by a difference of within 20 KHz.

5. The arrangement of claim 1 wherein said local oscillator comprises a programmable oscillator.

6. The arrangement of claim 1 wherein said local oscillator also comprises a divide-by-two frequency divider following said programmable oscillator.

7. The arrangement of claim 1 wherein said A/D converter includes a matched two-channel 20-bit stereo A/D converter.

8. The arrangement of claim 1 wherein said serial output provides said time-synchronous serial digital signal containing digital representations of said baseband voltage waveform and said baseband current waveform so that said representation of current and voltage appear alternately.

9. A method of deriving amplitude and relative phase information for current and voltage of an RF power wave that is applied at a radio frequency (RF) to a power input of a plasma chamber within which said RF power wave produces a plasma, and in which a plasma probe picks up an RF voltage waveform and an RF current waveform of said power wave;

comprising the steps of generating a local oscillator signal;

mixing said local oscillator signal and said RF voltage waveform to produce a voltage baseband signal at an audio frequency;

mixing said local oscillator signal and said RF current waveform to produce a current baseband signal at said audio frequency;

supplying a feedback signal from said digital signal processor to control the frequency of said local oscillator signal. converting said voltage baseband signal and said current baseband signal to a serial digital signal;

supplying said serial digital signal to a suitably programmed digital signal processor;

supplying a feedback signal from said digital signal processor to control the frequency of said local oscillator signal; and

computing the amplitudes and relative phase of said voltage and current baseband signals.

10. The method of claim 9, wherein said step of providing said local oscillator signal includes providing said local oscillator signal at a frequency that is within between 0.20 KHz and 20 KHz of the frequency of the applied RF power wave.

11. The method of claim 9, wherein said step of computing the amplitudes and relative phase of said voltage and current baseband signals includes calculating a Fast Fourier Transform of the current and voltage baseband waveforms, and making phase and magnitude measurements of the voltage and current baseband signals by tracking the baseband frequency of said baseband signals.

12. The method of claim 11, wherein said step of making phase and magnitude measurements includes, following said calculating of said Fast Fourier Transform, extracting frequency spectra of said voltage and current waveforms from said fast Fourier transform.

13. The method of claim 12, further comprising computing, from said spectra of said voltage and current waveforms, a phase difference as between said voltage and current waveforms.

14. The method of claim 12, wherein said computing the amplitudes and relative phase of said voltage and current baseband signals comprises transferring a plurality of samples of said serial digital signal representing said baseband voltage waveform and said baseband current waveform, respectively;

multiplying said samples by a predetermined window function to produce windowed current and voltage signals;

processing the respective voltage samples V and associated current samples I as a complex waveform, W=V+j*I (where j is the root of minus one), performing a complex Fast Fourier Transform operation on said complex waveform FFT(W) to produce a complex output, and extracting the current and voltage spectra from said complex output.

15. The method of claim 14, wherein said computing the amplitudes and relative phase of said voltage and current baseband signals comprises extracting said relative phase angle by finding the vector sums of said voltage and current spectra, and computing arctangents of the resulting vector sums.