Film measurement system with improved calibration

• US 5,771,094 A
• Filed: 01/29/1997
• Issued: 06/23/1998
• Est. Priority Date: 01/29/1997
• Status: Expired due to Term

• Current Assignee: Tencor Instruments (KLA Corporation)
• Original Assignee: KLA-Tencor Corporation (KLA Corporation)
• Inventors: Carter, Joseph, Chen, Jennming, Chen, Xing
• Primary Examiner(s): McGraw, Vincent P.
• Application Number:
  US08/790,090
• Time in Patent Office: 510 Days
• Field of Search: 356/326, 356/328, 356/369
• US Class Current: 356/326
• CPC Class Codes: G01J 2003/2866 Markers; Calibrating of scan
• CPC Class Codes: G01J 3/36 Investigating two or more bands of a spectrum by separate detectors
• CPC Class Codes: G01J 4/00 Measuring polarisation of light

Abstract

The pixel position-to-wavelength calibration function of film measurement devices such as spectroscopic ellipsometers and spectroreflectometers may shift due to temperature and humidity changes and mechanical factors. One or more wavelength markers provided by the light source or reference sample may be used to correct the calibration function. The pixel positions of one or more persistent wavelength markers are noted during the calibration process and the current positions of such markers are again noted to account for shifts due to various factors to correct the calibration function.

Claims

1. A method for measuring one or more films of a sample, comprising the steps of:

directing a beam of broadband radiation towards the sample such that radiation from the beam modified by the sample includes at least one persistent wavelength marker;

detecting intensity of radiation of spectral components from the beam that is modified by the sample to measure the one or more films at a plurality of wavelengths in the broadband simultaneously by means of a first detector array of multiple pixels, said array having been calibrated with respect to a calibration function and having a prior pixel position of the marker associated with the calibration function;

determining a current pixel position of the at least one persistent wavelength marker from the beam that is modified by the sample; and

correcting said calibration by reference to said prior and current pixel positions of the at least one persistent wavelength marker.

2. The method of claim 1, said directing step directing a beam of radiation having a persistent wavelength marker.

3. The method of claim 2, said correcting step including creating a linear correction function to correct said calibration.

4. The method of claim 2, said directing step directing a beam of radiation having a plurality of persistent wavelength markers.

5. The method of claim 3, said correcting step comprising creating a linear or non-linear correction function to correct said calibration.

6. The method of claim 2, said directing step directing a beam of radiation from a mercury or xenon lamp, a laser source or through a filter.

7. The method of claim 1, further comprising detecting said marker by means of a second detector array of multiple pixels different from the first detector array of multiple pixels.

8. The method of claim 1, wherein said detecting step detects the radiation reflected from the sample.

9. The method of claim 1, further comprising controlling gains of detectors in the array.

10. The method of claim 1, wherein said current pixel position of the marker is determined to subpixel accuracy, and said calibration is corrected to subpixel accuracy.

11. A method for measuring one or more films of a sample, comprising the steps of:

directing a first beam of radiation towards a reference sample, said reference sample being such that radiation from the beam modified by the reference sample includes at least one persistent wavelength marker;

determining a current pixel position of said marker at a detector array of multiple pixels and a difference between the current and a prior pixel position of said marker at said detector array;

correcting a pixel position-to-wavelength calibration of said detector array by reference to said difference;

directing a second beam of broadband radiation towards the sample;

detecting radiation from the second beam that is modified by the sample; and

providing a measurement of the one or more films at a plurality of wavelengths in the broadband simultaneously by means of the detector array of multiple pixels and in reference to the corrected calibration.

12. The method of claim 11, further comprising providing a reference sample having a persistent absorption or fluorescence peak or valley or an interference pattern.

13. The method of claim 11, wherein the determining step includes detecting intensity of radiation directed towards the reference sample after modification by the reference sample.

14. The method of claim 11, said detecting step detecting radiation that is reflected by the sample.

15. An apparatus for measuring one or more films of a sample, comprising:

means for directing a beam of broadband radiation towards the sample such that radiation from the beam modified by the sample includes at least one persistent wavelength marker;

a first detector array of multiple pixels detecting radiation from the beam that is modified by the sample to measure the one or more films at a plurality of wavelengths in the broadband simultaneously, said array having been calibrated with respect to a calibration function and having a prior pixel position of the marker associated with the calibration function;

means for determining a current pixel position of the at least one persistent wavelength marker from the beam that is modified by the sample; and

means for correcting said calibration by reference to said prior and current pixel positions of the at least one persistent wavelength marker.

16. The apparatus of claim 15, said directing means including a broadband radiation source having one or more persistent wavelength markers.

17. The apparatus of claim 16, said radiation source including a mercury or xenon lamp, a laser source or a filter.

18. The apparatus of claim 15, said determining means comprising a second detector array of multiple pixels.

19. The apparatus of claim 15, wherein said first detector array detects radiation that is reflected by the sample.

20. The apparatus of claim 15, said apparatus being a spectroscopic ellipsometer or a spectroreflectometer.

21. The apparatus of claim 15, further comprising:

a calibration sample;

a calibration radiation source;

a first optical path supplying radiation from the calibration radiation source to the calibration sample for calibrating the first detector array, said directing means including a second radiation source and a second optical path.

22. An apparatus for measuring one or more films of a sample, comprising:

a reference sample;

means for directing a beam of radiation towards the reference sample, said reference sample being such that radiation from the beam modified by the reference sample includes at least one persistent wavelength marker;

means for determining a current pixel position of said marker;

means for correcting a pixel position-to-wavelength calibration of a detector array of multiple pixels by reference to the current pixel position and a prior pixel position of said marker at the detector array;

means for directing a beam of radiation towards the sample, said beam including broadband radiation, wherein the detector array of multiple pixels detects radiation from the beam that is modified by the sample; and

means for providing a measurement of the one or more films at a plurality of wavelengths in the broadband simultaneously by reference to the corrected calibration.

23. The apparatus of claim 22, said reference sample having a persistent absorption or fluorescence peak or valley or interference pattern.

24. The apparatus of claim 22, wherein the detector array of multiple pixels detects radiation from the beam that is reflected by the sample.

25. The apparatus of claim 22, said apparatus being a spectroscopic ellipsometer or a spectroreflectometer.