Vacuum oven chamber for making laminated integrated circuit devices
First Claim
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1. An oven for heat-curing a workpiece, comprising:
- a chamber with at least one access opening;
a closure member for the access opening, the closure member being capable of hermetically sealing the chamber;
a hermetic connection for supplying power to within the chamber;
means permitting the withdrawal of air and other gases from within the chamber;
first hermetic means permitting the application of a press force to a workpiece within the chamber from an actuator outside the chamber;
means for heating the workpiece within the chamber;
means for cooling the workpiece within the chamber;
second hermetic means for sensing the temperature of the workpiece within the chamber; and
,a programmable controller for adjusting the press force and the temperature of the workpiece in the chamber, the controller adjusting each of the press force and the temperature in respective sequences having at least two discrete upward ramps to an operating pressure and an operating temperature.
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Abstract
An oven for making laminated integrated circuit cubes includes an oven chamber with at least one access opening. A closure member for the access opening is capable of hermetically sealing the chamber. A hermetic connection is provided for supplying power to within the chamber. Structure permits the withdrawal of air and other gases from within the chamber. Hermetic structure permits the application of a press force to a workpiece within the chamber from an actuator outside the chamber. Hermetic temperature sensing devices measure the temperature of a workpiece within the chamber.
36 Citations
20 Claims
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1. An oven for heat-curing a workpiece, comprising:
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a chamber with at least one access opening; a closure member for the access opening, the closure member being capable of hermetically sealing the chamber; a hermetic connection for supplying power to within the chamber; means permitting the withdrawal of air and other gases from within the chamber; first hermetic means permitting the application of a press force to a workpiece within the chamber from an actuator outside the chamber; means for heating the workpiece within the chamber; means for cooling the workpiece within the chamber; second hermetic means for sensing the temperature of the workpiece within the chamber; and
,a programmable controller for adjusting the press force and the temperature of the workpiece in the chamber, the controller adjusting each of the press force and the temperature in respective sequences having at least two discrete upward ramps to an operating pressure and an operating temperature. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16)
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17. An oven for heat-curing a workpiece, comprising:
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a chamber with at least one access opening; a closure member for the access opening, the closure member being capable of hermetically sealing the chamber; a hermetic connection for supplying power to within the chamber; means permitting the withdrawal of air and other gases from within the chamber; first hermetic means permitting the application of a press force to a workpiece within the chamber from an actuator outside the chamber; means for heating the workpiece within the chamber; means for cooling the workpiece within the chamber; second hermetic means for sensing the temperature of the workpiece within the chamber; and
,a programmable controller for adjusting the press force and the temperature of the workpiece in the chamber, the controller first adjusting each of the press force and the temperature upwardly to an operating pressure and an operating temperature, secondly maintaining the operating temperature and pressure at substantially uniform values for a dwell time related to characteristics of the workpiece, and thirdly adjusting the temperature of the workpiece in the chamber downwardly from the operating temperature in a substantially continuous ramp and adjusting the press force downwardly from the operating pressure in at least two discrete downward ramps substantially coextensively with the downward temperature adjustment.
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18. An oven for heat-curing a workpiece, comprising:
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a chamber with at least one access opening; a closure member for the access opening, the closure member being capable of hermetically sealing the chamber; a hermetic connection for supplying power to within the chamber; means permitting the withdrawal of air and other gases from within the chamber; first hermetic means permitting the application of a press force to a workpiece within the chamber from an actuator outside the chamber; means for heating the workpiece within the chamber; means for cooling the workpiece within the chamber; second hermetic means for sensing the temperature of the workpiece within the chamber; and
,a programmable controller for adjusting the press force and the temperature of the workpiece in the chamber, the controller firstly adjusting each of the press force and the temperature in respective sequences having at least two discrete upward ramps to an operating pressure and an operating temperature, secondly maintaining the operating temperature and pressure at substantially uniform values for a dwell time related to characteristics of the workpiece, and thirdly adjusting the temperature of the workpiece in the chamber downwardly from the operating temperature in a substantially continuous ramp and adjusting the press force downwardly from the operating pressure in at least two discrete downward ramps substantially coextensively with the downward temperature adjustment. - View Dependent Claims (19, 20)
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Specification