Apparatus for stripping pellicle

• US 5,772,842 A
• Filed: 11/22/1995
• Issued: 06/30/1998
• Est. Priority Date: 11/28/1994
• Status: Expired due to Term

• Current Assignee: Renesas Electronics Corporation, Ryoden Semiconductor System Engineering Corporation
• Original Assignee: Mitsubishi Denki Kabushiki Kaisha (Mitsubishi Electric Corporation), Ryoden Semiconductor System Engineering Corporation
• Inventors: Tanaka, Shinichiro, Kusunose, Haruhiko, Wada, Sigeru
• Primary Examiner(s): Osele, Mark A.
• Application Number:
  US08/561,065
• Time in Patent Office: 951 Days
• Field of Search: 156/344, 156/584, 29/402.03, 29/426.1, 29/426.2, 29/426.4, 29/564.1
• US Class Current: 156/718
• CPC Class Codes: B29C 63/0013 Removing old coatings
• CPC Class Codes: G03F 1/64 characterised by the frames, e.g. structure or material, including bonding means therefor
• CPC Class Codes: Y10T 156/11 Methods of delaminating, per se; i.e. , separating at bonding face
• CPC Class Codes: Y10T 156/1111 Using solvent during delaminating [e.g., water dissolving adhesive at bonding face during delamination, etc.]
• CPC Class Codes: Y10T 156/1189 with shearing during delaminating
• CPC Class Codes: Y10T 29/49721 with disassembling
• CPC Class Codes: Y10T 29/49817 with other than ancillary treating or assembling
• CPC Class Codes: Y10T 29/49821 by altering or destroying work part or connector

Abstract

A pellicle stripping apparatus includes a supporting section for supporting a photomask, the supporting section having gripping portions for gripping at least two edges of a pellicle frame of a pellicle adhered to the photomask; and a steam generating section for generating high temperature steam and contacting the pellicle adhered to the photomask with the steam, the steam generating section including a container having a steam vent directly opposite a portion of the pellicle adhered to the photomask and a heater for boiling water in the container.

Claims

1. A pellicle stripping apparatus comprising:

a supporting section for supporting a photomask, said supporting section having gripping portions for gripping at least two edges of a pellicle frame of a pellicle adhered to the photomask; and

a steam generating section for generating high temperature steam and contacting the pellicle adhered to the photomask with the steam, said steam generating section including a container having a steam vent directly opposite a portion of the pellicle adhered to the photomask and a heater for boiling water in said container.

2. The pellicle stripping apparatus in accordance with claim 1, wherein said gripping portions include a fixed claw fixed to said supporting section, a movable claw attached to said supporting section opposite said fixed claw and moving reciprocally, and a structure forcing said movable claw in a direction to grip the pellicle frame between said fixed claw and said movable claw.

3. The pellicle stripping apparatus in accordance with claim 2, wherein said structure forcing said movable claw comprises a spring.

4. The pellicle stripping apparatus in accordance with claim 3, wherein said spring is a leaf spring.

5. The pellicle stripping apparatus in accordance with claim 1, wherein said container includes a container body housing said heater, and a cover disposable on said container body and having said steam vent.