Fluid dispensing system having independently operated pumps

• US 5,772,899 A
• Filed: 02/23/1996
• Issued: 06/30/1998
• Est. Priority Date: 03/28/1989
• Status: Expired due to Term

• Current Assignee: Entegris Incorporated
• Original Assignee: Millipore Investment Holdings, Ltd.
• Inventors: Farney, Michael K., Gibson, Gregory M., Snodgrass, Ocie T.
• Primary Examiner(s): Drodge, Joseph W.
• Application Number:
  US08/605,878
• Time in Patent Office: 858 Days
• Field of Search: 210/143, 210/257.1, 210/257.2, 210/258, 210/416.1, 210/416.4, 210/416.5, 210/767, 210/136, 417/2, 417/62, 417/246, 417/313, 417/383, 417/395, 417/413.1, 417/413.2, 417/413.3, 417/426, 417/540, 417/199.1, 417/205, 418/206.9, 222/23, 222/52, 222/189.06, 222/255, 222/541.1
• US Class Current: 210/767
• CPC Class Codes: B01D 29/15 arranged for inward flow filtration
• CPC Class Codes: B01D 29/46 of flat, stacked bodies
• CPC Class Codes: B01D 35/26 Filters with built-in pumps filters provided with a pump mounted in or on the casing aquarium pumps or filters A01K63/04
• CPC Class Codes: F04B 15/02 the fluids being viscous or non-homogeneous
• CPC Class Codes: F04B 43/067 the fluid being actuated directly by a piston
• CPC Class Codes: F04B 7/0076 the members being actuated by electro-magnetic means
• CPC Class Codes: F04B 9/02 the means being mechanical
• CPC Class Codes: F04B 9/1095 having two or more pumping chambers in series
• CPC Class Codes: Y10S 210/90 Ultra pure water, e.g. conductivity water
• CPC Class Codes: Y10T 428/1234 Honeycomb, or with grain orientation or elongated elements in defined angular relationship in respective components [e.g., parallel, inter- secting, etc.]

Abstract

A fluid dispensing system is provided which has first diaphragm pump means, a filter connected to receive the discharge of said first pump, and accumulator/second diaphragm pump means connected to receive the discharge of said filter. Hydraulic fluids pumped by cylinder/piston/stepper assemblies independently actuate each of the diaphragm pumps, providing accurate, controllable and repeatable dispense of the subject fluid.

Claims

1. In a device for dispensing an industrial fluid which is viscous and/or high purity and/or shear-sensitive, the combination of first pumping means;

and second pumping means adapted to receive said fluid after said fluid has been pumped by said first pumping means, said second pumping means including a diaphragm-type pump whereby said first pumping means draws said fluid from a reservoir and said second pumping means subsequently receives said fluid and said fluid is subsequently dispensed from said second pumping means; and

means for dispensing said fluid from said second pumping means at intervals independent of the operation of said first pumping means, in which said first and second pumping means include diaphragm-type pumps.

2. The device of claim 1 in which said diaphragm-type pumps are actuated by hydraulic stepper assemblies.

3. In a device for filtering and dispensing an industrial fluid which is viscous and/or high purity and/or shear-sensitive:

a reservoir;

valve means connected to said reservoir;

first pumping means connected to said valve means;

filter means connected to said valve means; and

second pumping means connected to said filter mean s in which said fluid is drawn from said reservoir by said first pumping means and through said valve means into said first pumping means, and is then pumped from said first pumping means through said valve means and through said filter means and is subsequently received by said second pumping means, and said second pumping means can subsequently dispense said fluid, in which each of said first and second pumping means includes surfaces that contact said fluid, said surfaces being of materials that are non-contaminating to said fluid.

4. A method for filtering and dispensing an industrial fluid which is viscous and/or high purity and/or shear sensitive, comprising the steps of:

pumping said fluid with first pumping means through valve means and filtering means;

receiving said fluid in second pumping means;

preventing backflow of filtered fluid; and

dispensing said fluid by operating said second pumping means, in which each of said first and second pumping means include s surfaces that contact said fluid, said surfaces being of materials that are non-contaminating to said fluid.

5. A method for filtering and dispensing an industrial fluid which is viscous and/or high purity and/or shear sensitive, comprising the steps of:

pumping said fluid with first pumping means through filtering means and valve means;

receiving said fluid in second pumping means;

preventing backflow of filtered fluid; and

dispensing said fluid by operating said second pumping means, in which each of said first and second pumping means includes surfaces that contact said fluid, said surfaces being of materials that are non-contaminating to said fluid.

6. In a device for dispensing industrial fluid which is viscous and/or high purity and/or shear-sensitive, the combination of:

first pumping means; and

second pumping means adapted to receive said fluid after said fluid has been pumped by said first pumping means, whereby said first pumping means includes a diaghragm-type pump and is actuated by displacement of a relatively incompressible fluid, and said first pumping means draws said fluid from a reservoir and said second pumping means receives said fluid and said fluid is subsequently dispensed from said second pumping means; and

means for dispensing said fluid from said second pumping means at rates independent of the operation of said first pumping means, in which each of said first and second pumping means includes surfaces that contact said fluid, said surfaces being of materials that are non-contaminating to said fluid.

7. The device of claim 6 in which said second pumping means also includes a diaphragm-type pump.

8. In a device for dispensing industrial fluid which is viscous and/or high purity and/or shear-sensitive the combination of:

first pumping means; and

second pumping means adapted to receive said fluid after said fluid has been pumped by said first pumping means whereby said first pumping means draws said fluid from a reservoir and said second pumping means receives said fluid and said fluid is subsequently dispensed from said second pumping means; and

means for dispensing said fluid from said second pumping means at rates independent of the operation of said first pumping means in which each of said first and second pumping means includes surfaces that contact said fluid, said surfaces being of materials that are non-contaminating to said fluid, in which said first and second pumping means include diaphragm-type pumps, in which said diaphragm-type pumps are actuated by hydraulic stepper assemblies.

9. In a device for filtering and dispensing industrial fluid which is viscous and/or high purity and/or shear-senisitive:

a reservoir;

valve means connected to said reservoir;

first pumping means connected to said valve means;

filter means connected to said valve means; and

second pumping means adapted to receive said fluid after said fluid has been filtered by said filter means, in which said fluid is drawn from said reservoir by said first pumping means and through said valve means into said first pumping means, and is then pumped from said first pumping means through said valve means and through said filter means and is subsequently received by said second pumping means; and

means for dispensing said fluid from said second pumping means at rates independent of the operation of said first pumping means, in which each of said first and second pumping means includes surfaces that contact said fluid, said surfaces being of materials that are non-contaminating to said fluid.

10. In a device for filtering and dispensing industrial fluid which is viscous and/or high purity and/or shear-sensitive:

a reservoir;

valve means connected to said reservoir;

first pumping means connected to said valve means;

filter means connected to said valve means; and

second pumping means adapted to receive said fluid after said fluid has been filtered by said filter means, in which said fluid is drawn from said reservoir by said first pumping means and through said valve means into said first pumping means, and is then pumped from said first pumping means through said valve means and through said filter means and is subsequently received by said second pumping means; and

means for dispensing said fluid from said second pumping means at intervals independent of the operation of said first pumping means, in which each of said first and second pumping means includes surfaces that contact said fluid, said surfaces being of materials that are non-contaminating to said fluid.

11. In a device for filtering and dispensing industrial fluid which is viscous and/or high purity and/or shear-sensitive, the combination of:

first pumping means for pumping said fluid through filtering means;

accumulating means for accumulating said fluid after said fluid has been pumped by said first pumping means;

second pumping means adapted to receive said fluid, said second pumping means constituting means for facilitating precise dispense of said fluid; and

control means for controlling operation of said first pumping means and said second pumping means independently of each other, in which each of said first and second pumping means includes surfaces that contact said fluid, said surfaces being of materials that are non contaminating to said fluid.

12. The device of claim 11, in which said second pumping means includes incremental pump advancement means.

13. The device of claim 11 or claim 12, in which said second pumping means is operable to cause dispense of said fluid without manipulation of said first pumping means.

14. In a device for filtering industrial fluid which is viscous and/or high purity and/or shear-sensitive, the combination of:

first pumping means for pumping said fluid, said first pumping means including incremental pump advancement means for precisely pumping said fluid;

accumulating means for accumulating said fluid after said fluid has been pumped by said first pumping means;

filtering means between said first pumping means and said accumulating means; and

control means for controlling operation of said first pumping means and said accumulating means independently of each other.

15. The device of claim 14, further including dispensing means for precisely dispensing said fluid subsequent to said accumulation of said fluid, in which said first pumping means includes surfaces that contact said fluid, said surfaces being of materials that are non-contaminating to said fluid, and control means for controlling operation of said first pumping means and said dispensing means independently of each other.

16. Apparatus for filtering and dispensing industrial fluid which is viscous and/or high purity and/or shear-sensitive, including:

first pumping means for pumping said fluid through filtering means;

second pumping means adapted to receive the filtered fluid; and

control means for controlling said first pumping means and said second pumping means independently of each other, said control means capable of operating said first pumping means to filter fluid at substantially the same rate as said second pumping means is operated to receive said fluid, in which each of said first and second pumping means includes surfaces that contact said fluid, said surfaces being of materials that are non-contaminating to said fluid.

17. The apparatus of claim 16, in which said second pumping means is a pump operable by incremental pump advancement means, and incremental pump advancement means is controlled by said control means.

18. The apparatus of claim 16 or claim 17, in which said control means includes computer software and computer hardware in connection with which said software is utilized, and further includes components manipulated by said computer software and computer hardware.

19. The apparatus of claim 16 or claim 17, in which said control means is capable of operating said first pumping means independently of said second pumping means.

20. Apparatus for filtering and dispensing industrial fluid which is viscous and/or high purity and/or shear-sensitive, including a second pump downstream of a filter, said second pump having a rate of operation independent of a first pump upstream of said filter;

at least one of said first or second pumps being a diaphragm-type pump; and

control means for controlling operation of said first pump and said second pump independently of each other in which said control means includes said pump or pumps being a diaphragm-type pump operable by incremental pump advancement means.

21. Apparatus for filtering and dispensing industrial fluid which is viscous and/or high purity and/or shear-sensitive, including a second pump downstream of a filter, said second pump having a period of operation independent of a first pump upstream of said filter;

at least one of said first or second pumps being a diaphragm-type pump; and

control means for controlling operation of said first pump and said second pump independently of each other, in which said control means includes said pump or pumps being a diaphragm-type pump operable by incremental pump advancement means.

22. Apparatus for filtering and dispensing industrial fluid which is viscous and/or high purity and/or shear-sensitive, including a second pump downstream of a filter, said second pump having a rate of operation independent of a first pump upstream of said filter;

both of said first and second pumps being diaphragm-type pumps; and

control means for controlling operation of said first pump and said second pump independently of each other, in which said control means includes said pump or pumps being a diaphragm-type pump operable by incremental pump advancement means.

23. Apparatus for filtering and dispensing industrial fluid which is viscous and/or high purity and/or shear-sensitive, including a second pump downstream of a filter, said second pump having a period of operation independent of a first pump upstream of said filter;

both of said first and second pumps being diaphragm-type pumps; and

control means for controlling operation of said first pump and said second pump independently of each other, in which said control means includes said pump or pumps being a diaphragm-type pump operable by incremental pump advancement means.

24. Apparatus for filtering and dispensing industrial fluid which is viscous and/or high purity and/or shear-sensitive, including a second pump downstream of a filter said second pump having a rate of operation independent of a first pump upstream of said filter;

at least one of said first or second pumps being a diaphragm-type pump actuated by displacement of a relatively incompressible fluid; and

control means for controlling operation of said first pump and said second pump independently of each other.

25. Apparatus for filtering and dispensing industrial fluid which is viscous and/or high purity and/or shear-sensitive, including a second pump downstream of a filter said second pump having a period of operation independent of a first pump upstream of said filter, at least one of said first or second pumps being a diaphragm-type pump actuated by displacement of a relatively incompressible fluid, and control means for controlling operation of said first pump and said second pump independently of each other.

26. Apparatus for filtering and dispensing industrial fluid which is viscous and/or high purity and/or shear-sensitive, including a second pump downstream of a filter, said second pump having a rate of operation independent of a first pump upstream of said filter;

both of said first and second pumps being diaphragm-type pumps actuated by displacement of a relatively incompressible fluid; and

control means for controlling operation of said first pump and said second pump independently of each other.

27. Apparatus for filtering and dispensing industrial fluid which is viscous and/or high purity and/or shear-sensitive, including a second pump downstream of a filter, said second pump having a period of operation independent of a first pump upstream of said filter;

both of said first and second pumps being diaphragm-type pumps actuated by displacement of a relatively incompressible fluid; and

control means for controlling operation of said first pump and said second pump independently of each other.