Tapered capillary optics

• US 5,772,903 A
• Filed: 09/27/1996
• Issued: 06/30/1998
• Est. Priority Date: 09/27/1996
• Status: Expired due to Fees

• Current Assignee: Gregory Hirsch
• Original Assignee: Gregory Hirsch
• Inventors: Hirsch, Gregory
• Primary Examiner(s): Breneman, R. Bruce
• Assistant Examiner(s): ALANKO, ANITA KAREN
• Application Number:
  US08/721,871
• Time in Patent Office: 641 Days
• Field of Search: 216/11, 216/24, 216/56, 216/84, 216/85, 216/92, 156/345, 427/163.2, 427/534, 65/31, 65/387, 65/429, 185/12, 185/31, 185/43, 185/47, 185/48
• US Class Current: 216/11
• CPC Class Codes: C03C 15/00 Surface treatment of glass, not in the form of fibres or filaments, by etching etching or surface-brightening compositions, in general C09K13/00
• CPC Class Codes: C03C 25/68 by etching
• CPC Class Codes: G02B 6/10 of the optical waveguide type G02B6/02, G02B6/24 take precedence; devices or arrangements for the control of light by electric, magnetic, electro-magnetic or acoustic means G02F1/00; transferring the modulation of modulated light G02F2/00; optical logic elements G02F3/00; optical analogue/digital converters G02F7/00
• CPC Class Codes: G02B 6/262 Optical details of coupling light into, or out of, or between fibre ends, e.g. special fibre end shapes or associated optical elements
• CPC Class Codes: G21K 1/06 using diffraction, refraction or reflection, e.g. monochromators G21K1/10, G21K7/00 take precedence
• CPC Class Codes: G21K 2201/068 specially adapted for particle beams

Abstract

A metal or glass wire is etched with great precision into a very narrowly tapering cone which has the shape of the desired final capillary-optics bore. By controlling the rate of removal of the wire from an etchant bath, a carefully controlled taper is produced. A sensor measures the diameter of the wire as it leaves the surface of the etchant. This signal is used for feedback control of the withdrawal speed. The etched wire undergoes a treatment to produce an extremely low surface-roughness. The etched and smoothed wire is coated with the material of choice for optimizing the reflectivity of the radiation being focused. This could be a vacuum evaporation, sputtering, CVD or aqueous chemical process. The coated wire is either electroplated, built up with electroless plating, or encapsulated in a polymer cylinder such as epoxy to increase the diameter of the wire for easier handling and greater robustness. During this process, the wire is vertically oriented and tensioned to assure that the wire is absolutely straight. The coated and electroformed wire is bonded to a flat, rigid substrate and is then periodically segmented by cutting or etching a series of narrow slits or grooves into the wire. The wire is vertically oriented and tensioned during the bonding process to assure that it is straight. The original wire material is then chemically etched away through the slits or otherwise withdrawn to leave the hollow internal bore of the final tapered-capillary optical element.

Claims

1. A process for producing a tapered capillary optic of desired taper for focusing radiation comprising the steps of:

providing an etchant bath;

providing a wire to be etched by the etchant bath;

placing the wire in the etchant bath to a preselected depth for etching;

withdrawing the wire from the preselected depth at a controlled rate to form a differential etch to form a tapered wire with a desired taper having the desired taper profile of the tapered capillary optic;

coating the tapered wire with a coating reflective of the radiation to be focused by the capillary optic to produce a coated wire; and

,

removing the tapered wire from the coated wire to leave only a coated bore having the desired taper for focussing radiation.

2. A process for producing a tapered capillary optic for focusing radiation according to claim 1 comprising the further steps of:

reinforcing the coating reflective of the radiation to be focused by applying further coating to the wire.

3. A process for producing a tapered capillary optic for focusing radiation according to claim 1 comprising the further steps of:

fastening the coating reflective of the radiation to a supporting substrate.

4. A process for producing a tapered capillary optic for focusing radiation according to claim 2 comprising the further steps of:

tensioning the tapered wire during the reinforcing step to maintain the wire linear.

5. A process for producing a tapered capillary optic for focusing radiation according to claim 1 comprising the further steps of:

the removing step includes;

placing the coated wire on a supporting substrate;

cutting the coated wire to produce at least one cut at a selected intervals on the supporting substrate; and

,

etching the coated wire through the at least one cut to remove the tapered wire.

6. A process for producing a tapered capillary optic for focusing radiation according to claim 1 comprising the further steps of:

withdrawing the tapered wire from the preselected depth at a controlled rate includes;

measuring dimension of the tapered wire at the etchant bath; and

,

varying the controlled rate of withdrawal of the tapered wire dependent upon the measured dimension.

7. A process for producing a tapered capillary optic for focusing radiation according to claim 6 comprising the further steps of:

measuring slope of the tapered wire as it leaves the etchant bath; and

,

controlling the rate of withdrawal from the etchant bath dependant upon the slope.

8. A process for producing a tapered capillary optic for focusing radiation according to claim 1 wherein the step of removing the wire to leave only the coating includes:

coating the tapered wire with a release coating for releasing the coating reflective of the radiation to be focused by the capillary optic; and

,

pulling the wire from the release coating.

9. The product of the process of claim 1.

20. The process for producing a tapered capillary optic of desired taper for focussing radiation according to claim 1 and wherein the coating step includes:

a first coating for smoothing the wire; and

,

a second coating for being reflective of the radiation interior of the bore.

21. The process for producing a tapered capillary optic of desired taper for focussing radiation according to claim 1 and including the further step of:

heating the tapered wire to smooth the surface of the tapered wire.

22. The process for producing a tapered capillary optic of desired taper for focussing radiation according to claim 1 and wherein the coating step includes:

critical point drying the interior of the bore after removal of the tapered wire.

10. A process for producing a tapered capillary optic of desired taper for focusing radiation comprising the steps of:

providing a tapered wire with the desired taper profile of the tapered capillary optic;

coating the tapered wire with a coating reflective of the radiation to be focused by the capillary optic to produce a coated wire; and

,

removing the tapered wire from the coated wire to leave only a coated bore having the desired taper for focussing radiation.

11. A process for producing a tapered capillary optic for focusing radiation according to claim 10 comprising the further steps of:

reinforcing the coating reflective of the radiation to be focused by applying further coating to the coated wire.

12. A process for producing a tapered capillary optic for focusing radiation according to claim 10 comprising the further steps of:

fastening the coating reflective of the radiation to a supporting substrate.

13. A process for producing a tapered capillary optic for focusing radiation according to claim 11 comprising the further steps of:

tensioning the tapered wire during the reinforcing step to maintain the tapered wire linear.

14. A process for producing a tapered capillary optic for focusing radiation according to claim 10 comprising the further steps of:

the removing step includes;

placing the coated wire on a supporting substrate;

cutting the coated wire to produce at least one cut at a selected intervals on the supporting substrate; and

,

etching the coated wire through the at least one cut to remove the tapered wire.

15. A process for producing a tapered capillary optic for focusing radiation according to claim 10 wherein the step of removing the wire to leave only the coating includes:

coating the tapered wire with a release coating for releasing the coating reflective of the radiation to be focused by the capillary optic; and

,

pulling the wire from the release coating.

16. The product of the process of claim 10.

17. A process for producing a tapered capillary optic for focusing radiation according to claim 10 wherein the step of removing the wire to leave only the coating includes:

coating the tapered wire with a release coating for releasing the coating reflective of the radiation to be focused by the capillary optic; and

,

pulling the wire from the release coating.

18. Apparatus for producing a tapered capillary optic for focusing radiation comprising:

an etchant bath;

a wire to be etched by the bath;

means for placing the wire in the bath to a preselected depth for etching by the bath and withdrawing the wire from the preselected depth at a controlled rate to form a differential etch on the wire to taper the wire with the desired taper profile of the capillary optic;

means for coating the tapered wire with a coating reflective of the radiation to be focused by the capillary optic; and

,

means for removing the wire to leave only the coating with an internally tapered bore for focussing radiation.

19. Apparatus for producing a tapered capillary optic for focusing radiation according to claim 18 further comprising:

means for measuring the dimension of the wire at the etchant bath; and

,

means for controlling the rate of withdrawal of the wire dependent upon the measurement including a feedback loop.