Photoelectrochemical wet etching of group III nitrides

• US 5,773,369 A
• Filed: 04/30/1996
• Issued: 06/30/1998
• Est. Priority Date: 04/30/1996
• Status: Expired due to Term

• Current Assignee: Regents of the University of California (University of California)
• Original Assignee: Regents of the University of California (University of California)
• Inventors: Hu, Evelyn Lynn, Minsky, Milan Singh
• Primary Examiner(s): Breneman, R. Bruce
• Assistant Examiner(s): ALANKO, ANITA KAREN
• Application Number:
  US08/641,234
• Time in Patent Office: 791 Days
• Field of Search: 156/643.1, 156/644.1, 156/656.1, 216/94, 205/655, 205/656, 205/666, 205/667, 205/674, 438/746
• US Class Current: 438/746
• CPC Class Codes: C25F 3/12 of semiconducting materials
• CPC Class Codes: C25F 3/14 locally
• CPC Class Codes: H01L 21/30635 of AIIIBV compounds

Abstract

A method of processing semiconductor films and layers, especially Group III Nitride films, has been achieved, using laser-enhanced, room-temperature wet etching with dilute etchants. Etch rates of a few hundred Å/min up to a few thousand Å/min have been achieved for unintentionally doped n-type Group III Nitride films grown by MOCVD on a sapphire substrate. The etching is thought to take place photoelectrochemically with holes and electrons generated by incident illumination from 4.5 mW of HeCd laser power enhancing the oxidation and reduction reactions in an electrochemical cell.

Claims

1. A method of wet etching a Group III Nitride semiconductor layer, comprising the steps of:

overlaying the Group III Nitride semiconductor layer with a mask, wherein the mask defines a pattern to be transferred to the Group III Nitride semiconductor layer and facilitates a flow of photogenerated carriers from an area of the Group III Nitride semiconductor layer to be etched;

immersing the Group III Nitride semiconductor layer in an etchant solution, the etchant solution being unable to etch the Group III Nitride semiconductor layer, the etchant solution further being unheated; and

illuminating the immersed Group III Nitride semiconductor layer using an optical source containing frequencies above the bandgap of the Group III Nitride semiconductor layer, wherein the step of illuminating etches the Group III Nitride layer.

2. The method of claim 1, wherein the method further comprises the step of coupling the mask to a conductive path which draws electrons from the mask to a higher electrical potential.

3. The method of claim 1, wherein a sidewall of the area to be etched substantially mirrors the geometry of the mask.

4. The method of claim 1, wherein an etch rate exceeds 100 angstroms per minute.

5. The method of claim 1, wherein the temperature of the etchant solution is less than 40 degrees centigrade.

6. The method of claim 1, wherein the mask comprises at least one of the group comprising:

gold;

silver;

titanium;

or

composite metals.

7. The method of claim 1, wherein the power of the optical source is 4.5 mW.

8. The method of claim 1, wherein a concentration of the etchant solution is less than the concentration required to etch the Group III Nitride semiconductor layer without the optical source.

9. The method of claim 1, wherein the type of etchant solution is selected from the group comprising:

Potassium Hydroxide; and

Hydrochloric Acid.

10. The method of claim 1, wherein the Group III Nitride semiconductor layer comprises a heterostructure.

11. A method of etching a Group III Nitride layer, comprising the steps of:

overlaying the Group III Nitride layer with a mask, wherein the mask ensures an unimpeded flow of photogenerated carriers from an area of the layer to be etched;

immersing the Group III Nitride layer in an etchant solution, the etchant solution being unable to etch the Group III Nitride layer, the etchant solution further being unheated;

coupling the mask to a conductive path which draws electrons from the mask to a higher electrical potential; and

illuminating the immersed Group III Nitride layer using an optical source containing frequencies above the bandgap of the Group III Nitride layer, wherein the step of illuminating etches the Group III Nitride layer.