Method for probing a semiconductor wafer using a motor controlled scrub process

• US 5,773,987 A
• Filed: 02/26/1996
• Issued: 06/30/1998
• Est. Priority Date: 02/26/1996
• Status: Expired due to Term

• Current Assignee: Freescale Semiconductor, Inc. (NXP Semiconductors NV)
• Original Assignee: Motorola, Inc. (Motorola Solutions, Inc.)
• Inventors: Montoya, Thomas T.
• Primary Examiner(s): Nguyen, Vinh P.
• Application Number:
  US08/606,630
• Time in Patent Office: 855 Days
• Field of Search: 324/754, 324/755, 324/757, 324/758, 324/158.1, 324/765, 437/8, 439/482, 439/824, 438/14, 438/17, 257/48, 257/40
• US Class Current: 324/754.2
• CPC Class Codes: G01R 1/06733 Geometry aspects G01R1/06727 takes precedence
• CPC Class Codes: G01R 1/06738 related to tip portion
• CPC Class Codes: G01R 1/0675 Needle-like
• CPC Class Codes: G01R 1/07342 the body of the probe being at an angle other than perpendicular to test object, e.g. probe card
• CPC Class Codes: G01R 1/07357 with flexible bodies, e.g. buckling beams
• CPC Class Codes: G01R 31/2887 involving moving the probe head or the IC under test; docking stations moving single probes G01R1/06705; moving individual probes in multiple probes G01R1/07392
• CPC Class Codes: H01L 2224/02166 Collar structures
• CPC Class Codes: H01L 2224/05554 being square

Abstract

A process for probing a semiconductor wafer involves bringing the bond pads (63) of a semiconductor die (114) into contact with probes (122) of a probe card (120) by moving a probe chuck (110) in the Z-direction. Initial contact is made with "zero-overdrive." The probe chuck is then moved in a small amount in the Z-direction to induce a pressure in the probe. Scrubbing of the probes against the pads is then performed by moving the probe chuck in the X and Y directions. During movement in the X and Y directions, the pressured induced in the probe is released, causing the probe to begin to break through an oxide layer (62) of the bond pad. If the oxide layer is not completely broken, the movement of the probe chuck in the Z and then X & Y directions is repeated until electrical contact between the probes and the bond pads is made.

Claims

1. A method for probing a semiconductor wafer comprising the steps of:

providing a semiconductor die having a surface and a plurality of pads;

providing a prober having a probe chuck;

providing a probe card having a plurality of probes;

placing the semiconductor die on the probe chuck;

moving the probe chuck in a vertical direction toward the probe card until physical contact is made between the plurality of probes and the plurality of pads; and

scrubbing the plurality of pads with the plurality of probes, wherein the step of scrubbing comprises;

while the plurality of probes is in physical contact with the plurality of pads, moving the probe chuck in a vertical direction by an amount less than 10 μ

m;

while the plurality of probes is in physical contact with the plurality of pads, rotating the probe chuck in a horizontal plane by motor control while maintaining the probe card stationary, without moving the probe chuck away from the probe card; and

if the plurality of probes is not in electrical contact with the plurality of pads, then repeating the step of moving the probe chuck in a vertical direction and the step of rotating the probe chuck in a horizontal plane until the plurality of probes is in electrical contact with the plurality of pads.

2. The method of claim 1 wherein the step of moving the probe chuck in the vertical direction comprises moving the probe chuck by an amount less than 1 μ

m.

3. The method of claim 1 wherein the step of providing a probe card comprises providing a probe card wherein each probe of the plurality of probes has a diameter of less than 20 μ

m.

4. The method of claim 1 wherein the step of providing a probe card comprises providing a probe card wherein each probe of the plurality of probes has a beam section and a tip section, and wherein an angle between the beam section and the tip section is less than 100°

.

5. The method of claim 1 wherein the step of providing a probe card comprises providing a probe card wherein each probe of the plurality of probes has a planar tip, and wherein the planar tip of each probe remains parallel to the surface of the semiconductor die during the step of scrubbing.

6. The method of claim 1 wherein the step of rotating comprises moving the probe chuck in a horizontal direction by an amount not greater than a diameter of each probe of the plurality of probes.

7. A method for probing a semiconductor wafer comprising the steps of:

(a) providing a semiconductor wafer having a top surface, the semiconductor wafer having a plurality of bond pads located on the top surface of the semiconductor wafer, the plurality of bond pads comprising a conductive material and an overlying dielectric layer;

(b) placing the semiconductor wafer onto a probe chuck within a prober assembly, the prober assembly comprising a probe board having a plurality of probe needles, wherein the step of placing the semiconductor wafer onto the probe chuck defines an x-axis parallel to the top surface of the semiconductor wafer, a y-axis parallel to the top surface of the semiconductor wafer and perpendicular to the x-axis, and a z-axis perpendicular to both the x-axis and the y-axis;

(c) moving the probe chuck in a direction of the z-axis to physically contact the plurality of probe needles to the overlying dielectric layer; and

(d) using motor control to move the probe chuck with respect to the probe board in a direction of the x-axis to scrub a portion of the overlying dielectric layer from the plurality of bond pads while maintaining the probe card stationary, without moving the probe chuck away from the probe board.

8. The method of claim 7 further comprising the steps of:

(e) further moving the probe chuck in the direction of the z-axis to move the plurality of probe needles closer to the conductive material of the plurality of bond pads; and

(f) repeating step (d).

9. The method of claim 7 further comprising the step of:

(e) repeating step (d) while periodically moving the probe chuck closer to the probe board in the direction of the z-axis and without moving the probe chuck away from the probe board.

10. The method of claim 9 wherein periodic movement of the probe chuck in the direction of the z-axis occurs in increments of less than 1 μ

m at a time.

11. The method of claim 7 wherein the step (d) comprises:

moving the probe chuck with respect to the probe board in both the direction of the x-axis and a direction of the y-axis to scrub a portion of the overlying dielectric layer from the plurality of bond pads.

12. The method of claim 11 wherein the step (d) comprises:

moving the probe chuck with respect to the probe board in the direction of the x-axis by transmitting electrical signals to an x-axis motor and moving the probe chuck with respect to the probe board in the direction of the y-axis by transmitting electrical signals to a y-axis motor.

13. The method of claim 7 wherein the step (d) comprises:

moving the probe chuck with respect to the probe board in all of the direction of the x-axis, a direction of the y-axis, and the direction of the z-axis to scrub a portion of the overlying dielectric layer from the plurality of bond pads.

14. The method of claim 13 wherein the step (d) comprises:

moving the probe chuck with respect to the probe board in the direction of the x-axis by transmitting electrical signals to an x-axis motor, moving the probe chuck with respect to the probe board in the direction of the y-axis by transmitting electrical signals to a y-axis motor, and moving the probe chuck with respect to the probe board in the direction of the z-axis by transmitting electrical signals to a z-axis motor.

15. The method of claim 7 further comprising the steps of:

(e) using the step (d) to provide electrical connection between the plurality of probe needles and the plurality of bond pads to allow for testing of at least one semiconductor die on the semiconductor wafer;

(f) moving the probe chuck with respect to the probe board to position the plurality of probe needles over a new selected semiconductor die on the semiconductor wafer which is different from the at least one semiconductor die in step (e); and

(g) repeating steps (c) and (d) for the new selected semiconductor die.

16. The method of claim 7 wherein the step (d) further comprises:

moving the probe chuck with respect to the probe board in both the direction of the x-axis and a direction of the y-axis to scrub a portion of the overlying dielectric layer from the plurality of bond pads using a substantially circular rotation in a plane defined by the x-axis and the y-axis.

17. The method of claim 7 wherein the step b) comprises placing the semiconductor wafer within the prober assembly, and wherein each probe needle of the plurality of probe needles has a tip diameter of less than 20 μ

m.

18. The method of claim 7 wherein the step (d) further comprises:

periodically moving the probe chuck closer to the probe board in the direction of the z-axis wherein a total distance traveled in the direction of the z-axis from when the overlying dielectric layer is physically contacted by the plurality of probe needles to when the plurality of probe needles make electrical contact to the conductive material of the plurality of bond pads is less than 1 μ

m.

19. The method of claim 7, wherein each probe needle of the plurality of probe needles has a planar tip.

20. A method for probing a semiconductor wafer comprising the steps of:

placing a semiconductor wafer having a top surface onto a probe chuck;

bringing the semiconductor wafer into contact with a plurality of probe needles, each probe needle in the plurality of probe needles having a tip diameter of less than 20 μ

m and extending from a probe card;

moving the semiconductor wafer horizontally while the plurality of probe needles is in contact with the semiconductor wafer by motor control while maintaining the probe card stationary, without moving the semiconductor wafer vertically away from the plurality of probe needles; and

testing at least one integrated circuit on the semiconductor wafer by transmitting electrical signals through the plurality of probe needles to the at least one integrated circuit.

21. The method of claim 20 wherein the step of bringing comprises wherein the step of bringing comprises bringing the semiconductor wafer into contact with the plurality of probe needles, wherein each probe needle of the plurality of probe needles has a tip portion and a stem portion, and wherein an angle between the tip portion and the stem portion is less than 100°

.

22. The method of claim 20, wherein each probe needle of the plurality of probe needles has a planar tip.