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Sensor structure with L-shaped spring legs

  • US 5,777,226 A
  • Filed: 06/09/1997
  • Issued: 07/07/1998
  • Est. Priority Date: 03/28/1994
  • Status: Expired due to Term
First Claim
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1. An improved sensor structure havinga frame,a moveable mass,four L-shaped springs which include a first leg joined to a second leg at a juncture region, where said first leg of each L-shaped spring is connected only to a side of the frame but not to said mass at a frame connection region and said second leg of said each L-shaped spring is connected only to a side of said mass but not to said frame at a mass connection region, andsaid juncture region of each of said L-shaped springs is positioned in a juncture space formed between the frame and the mass, andsaid frame connection region and said mass connection are characterized by widths which are greater than a width which characterizes said juncture region,where said four L-shaped springs are characterized by a lateral deflection breaking distance, and whereinan outer edge of each of said four L-shaped springs is separated by a lateral spring--spring gap distance from an inner edge of an adjacent spring, where said lateral spring--spring gap distance is less than said lateral deflection breaking distance.

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