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Bulk fabricated electromagnetic micro-relays/micro-switches and method of making same

  • US 5,778,513 A
  • Filed: 02/09/1996
  • Issued: 07/14/1998
  • Est. Priority Date: 02/09/1996
  • Status: Expired due to Term
First Claim
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1. A micro-relay comprising:

  • a substrate having a magnetic pathway located therein;

    one or more coils located on the substrate over the magnetic pathway, wherein a current applied to the one or more coils magnetizes the magnetic pathway;

    a first electrically conductive contact pad coupled to the substrate, the first contact pad being electrically insulated from the substrate;

    a flexible monocrystalline structure suspended over the substrate;

    a second electrically conductive contact pad coupled to the monocrystalline structure and located above the first contact pad, the second contact pad being positioned such that when the monocrystalline structure flexes toward the substrate, the second contact pad touches the first contact pad, thereby providing an electrical connection between the first and second contact pads; and

    a pole piece coupled to the monocrystalline structure and positioned above the one or more coils, whereby a current applied to the one or more coils generates an electromagnetic force which flexes the monocrystalline structure toward the substrate, thereby causing the second contact pad to touch the first contact pad.

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