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Durable platinum/polyimide sensing structures

  • US 5,780,173 A
  • Filed: 09/04/1996
  • Issued: 07/14/1998
  • Est. Priority Date: 09/06/1995
  • Status: Expired due to Fees
First Claim
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1. A thin film structure comprising a supported, thermally insulative polyimide layer, a layer of a metal oxide selected from the group consisting of aluminum oxide, chromium oxide and tantalum oxide and deposited on said polyimide layer and at least one metal strip on said metal oxide layer, said metal strip being composed of a metal selected from the group consisting of chromium, iron, nickel, palladium and platinum, the metal oxide layer being coextensive in area with the overlying metal strip so as to provide a chemical stabilization barrier between said polyimide layer and said metal.

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