Vibratory structure, method for controlling natural frequency thereof and sensor and actuator adopting the vibratory structure

• US 5,780,948 A
• Filed: 10/23/1996
• Issued: 07/14/1998
• Est. Priority Date: 10/28/1995
• Status: Expired due to Term

• Current Assignee: Korea Advanced Institute of Science and Technology, Samsung Electronics Co. Ltd.
• Original Assignee: Korea Advanced Institute of Science and Technology, Samsung Electronics Co. Ltd.
• Inventors: Cho, Young-ho, Lee, Ki Bang, Song, Ci-moo
• Primary Examiner(s): Stephan, Steven L.
• Assistant Examiner(s): ENAD, ELVIN GENARGUE
• Application Number:
  US08/731,964
• Time in Patent Office: 629 Days
• Field of Search: 310/20, 310/36, 310/37, 310/80, 310/81, 310/309, 310/316, 310/328
• US Class Current: 310/81
• CPC Class Codes: F16F 15/03 using magnetic or electromagnetic means F16F9/53, F16F15/005 take precedence
• CPC Class Codes: F16F 7/1011 by electromagnetic means
• CPC Class Codes: G01C 19/56 Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
• CPC Class Codes: G01P 1/00 Details of instruments
• CPC Class Codes: H02N 1/008 Laterally driven motors, e.g. of the comb-drive type

Abstract

A vibratory structure and a method for controlling the natural frequency thereof are provided. The vibratory structure has an elastic member one end portion of which is fixed to a first support end, an inertial object for vibrating by the elastic force of the elastic member, a moving electrode attached integrally to the inertial object, an effective stiffness controlling electrode fixed to a second support end, and a power supplier for generating electric force between the moving electrode and the effective stiffness controlling electrode. The moving electrode and the effective stiffness controlling electrode are formed into a predetermined shape, so that the electric force varies linearly according to the displacement of the inertial object. Thus, the natural frequency of the vibratory structure is controlled by changing the voltage applied across the moving electrode and the effective stiffness controlling electrode.

Claims

1. A vibratory structure comprising:

an elastic member one end portion of which is connected to a first support end and having an elastic force;

an inertial object vibrating by the elastic force of said elastic member;

a moving electrode attached to said inertial object;

an effective stiffness controlling electrode connected to a second support end; and

a power supplier generating electric force between said moving electrode and said effective stiffness controlling electrode, wherein said electric force linearly varies according to the displacement of said inertial object.

2. A vibratory structure as claimed in claim 1, wherein said moving electrode and said effective stiffness controlling electrode include elongated portions with one elongated portions of one electrode inserted adjacent to elongated portions of the other electrode, said elongated portion of said effective stiffness controlling electrode includes a curved portion extending for a length of x₁ from said second support end and a linear portion extending from the end of said curved portion to an end portion, and wherein, with respect to the displacement x of said inertial object, the distance s between said moving electrode and said curved portion of said effective stiffness controlling electrode is given by ##EQU15## where s₀ indicates the distance between said moving electrode and said linear portion of said effective stiffness controlling electrode, and s₁ denotes the distance between said effective stiffness controlling electrode on said second support end and said moving electrode.

3. A vibratory structure as claimed in claim 1, wherein said moving electrode includes a rod having a radius of r₁ and said effective stiffness controlling electrode includes a cylinder which is hollow and has an annular section, said moving electrode being inserted into said effective stiffness controlling electrode, and wherein with respect to the displacement x of said inertial object, the difference s between the radius of the inner hollow circle of said effective stiffness controlling electrode and the radius r₁ of said moving electrode is given by ##EQU16## where x₁ indicates the whole length of said cylinder of said effective stiffness controlling electrode and s₀ and s₁ indicate the differences between the radius r₁ of said rod of said moving electrode and radii of an inner surface of said cylinder of said effective stiffness controlling electrode on the end portion support end, respectively.

4. A vibratory structure as claimed in claim 1, wherein said moving electrode and said effective stiffness controlling electrode each include a plurality of fingers intermeshed with each other, each finger of said effective stiffness controlling electrode is of the same length, and the fingers of said moving electrode vary in length and include end portions which are in a straight line, and linearly symmetrical with respect to the longitudinal direction of the longest finger of said moving electrode.

5. A vibratory structure as claimed in claim 1, wherein said moving electrode and said effective stiffness controlling electrode include plates and spaced by a predetermined distance from each other and are in parallel, and said moving electrode overlaps said effective stiffness controlling electrode in a triangle section.

6. A vibratory structure as claimed in claim 5, wherein said portion of said moving electrode which overlaps said effective stiffness controlling electrode has the shape of an isosceles triangle.

7. A vibratory structure as claimed in claim 1, wherein said inertial object includes a plate having at least one slit, said effective stiffness controlling electrode includes a plate, said inertial object being spaced from and parallel to said effective stiffness controlling electrode by a predetermined distance, and said inertial object overlapping said effective stiffness controlling electrode in a portion having a triangle shape.

8. A vibratory structure as claimed in claim 1, wherein said inertial object includes a plate having at least one slit, said effective stiffness controlling electrode includes a plate, said inertial object being spaced from and parallel to said effective stiffness controlling electrode by a predetermined distance, and said slit of said inertial object overlapping said effective stiffness controlling electrode in a portion having a triangle shape.

9. A vibratory structure as claimed in claim 1, wherein said moving electrode includes a plurality of fingers each having a triangular end portion, and spaced from one another by a predetermined distance, said effective stiffness controlling electrode includes a plurality of fingers and spaced from one another by a predetermined distance, and the fingers of said moving electrode and said effective stiffness controlling electrode being mutually intermeshed.

10. A method for controlling the natural frequency of a vibratory structure comprising:

an elastic member one end portion of which is connected to a first support end and having an elastic force;

an inertial object vibrating by the elastic force of said elastic member;

a moving electrode formed into a first predetermined shape and attached to said inertial object;

an effective stiffness controlling electrode connected to a second support end and formed into a second predetermined shape; and

a power supplier for generating electric force between said moving electrode and said effective stiffness controlling electrode,

wherein said electric force linearly varies according to the displacement of said inertial object, and thus the natural frequency of said vibratory structure is controlled by changing the voltage applied between said moving electrode and said effective stiffness controlling electrode.

11. An actuator comprising:

an elastic member one end of which is connected to a support end and having an elastic force;

an inertial object vibrating by the elastic force of said elastic member;

means for vibrating said inertial object and detecting the vibration of said inertial object;

a moving electrode formed into fingers at one side of said inertial object;

an effective stiffness controlling electrode formed into fingers to be inserted with said moving electrode; and

a power supplier for applying a voltage to generate electric force between said moving electrode and said effective stiffness controlling electrode,

wherein said electric force linearly varies according to the displacement of said inertial object.

12. An actuator comprising:

an elastic member one end portion of which is supported by a support end and having an elastic force;

an inertial object formed into a plate, for vibrating by the elastic force of said elastic member and having at least one slit;

means for exciting said inertial object and detecting the vibration of said inertial object;

at least one effective stiffness controlling electrode formed into a plate, spaced from and parallel to said inertial object by a predetermined distance, and overlapping said inertial object in a portion having a triangle shape;

and a power supplier for applying a predetermined voltage between said inertial object and said effective stiffness controlling electrode.

13. An actuator comprising:

an elastic member one end portion of which is supported by a support end and having an elastic force;

an inertial object shaped into a circular plate and having at least one slit, for rotating by the elastic force of said elastic member;

means for exciting said inertial object and detecting the vibration of said inertial object; and

at least one effective stiffness controlling electrode spaced from and parallel to said inertial object by a predetermined distance, and overlapping said inertial object in a portion having a triangle shape.