Sensor for reducing or oxidizing gases

• US 5,783,154 A
• Filed: 11/18/1996
• Issued: 07/21/1998
• Est. Priority Date: 07/02/1994
• Status: Expired due to Term

• Current Assignee: Forschungszentrum Karlsruhe Gmbh
• Original Assignee: Forschungszentrum Karlsruhe Gmbh
• Inventors: Goschnick, Joachim, Althainz, Peter
• Primary Examiner(s): Warden, Jill
• Assistant Examiner(s): CARRILLO, BIBI SHARIDAN
• Application Number:
  US08/747,252
• Time in Patent Office: 610 Days
• Field of Search: 422/90, 422/94-95, 422/97, 422/98, 73/23.2, 73/23.31, 73/23.32, 73/23.34, 73/31.03, 73/31.05, 73/31.06, 338/24
• US Class Current: 422/98
• CPC Class Codes: G01N 27/12 of a solid body in dependence upon absorption of a fluid; of a solid body in dependence upon reaction with a fluid , for detecting components in the fluid
• CPC Class Codes: G01N 33/0031 comprising two or more sensors, e.g. a sensor array electrochemical electrode arrays G01N27/27

Abstract

In a gas sensor for sensing reducing or oxidizing gases which comprises a semiconductive metal oxide film, there are provided stripe-like outer electrodes which define therebetween a continuous surface area and stripe-like inner electrodes which extend between, and parallel to, the outer electrodes so as to divide the continuous surface area into longitudinal segments which have different properties with respect to reducing or oxidizing gases such that different conductivity changes are generated for the different segments upon exposure to oxidizing or reducing gases.

Claims

1. A gas sensor for reducing or oxidizing gases, comprising:

a) a number of gas sensitive, longitudinal segments consisting of a semiconductive metal oxide film,

b) each of said segments having two strip electrodes in contact therewith,

c) said segments having different properties with respect to reducing or oxidizing gases such that different conductivity changes are generated from said segments upon exposure to oxidizing or reducing gases,

d) said segments defining together a continuous surface area, and

e) said strip electrodes including outer electrodes extending at opposite ends of said continuous surface area so as to limit said continuous surface area, and inner electrodes extending between, and parallel to, said outer electrodes so as to divide said continuous surface area into said longitudinal segments.

2. A gas sensor according to claim 1, wherein said metal oxide film is provided with a coating having a permeability for reducing or oxidizing gases which changes continuously between said outer electrodes.

3. A gas sensor according to claim 1, wherein said metal oxide thin film has a coating which reacts with the gas to be measured so as to convert said gas to a reducing or oxidizing gas.

4. A gas sensor according to claim 2, wherein said changing permeability for reducing and oxidizing gases is obtained by a continuously changing chemical composition of said coating.

5. A gas sensor according to claim 2, wherein said continuous surface area includes a metal oxide film which is doped in such a way that its composition changes continuously between said outer electrodes.

6. A gas sensor according to claim 1, wherein said continuous surface area is disposed on a first side of a substrate and meandering heating elements are disposed on a second side of said substrate, said heating elements being arranged opposite one or respective ones of said segments.