Temperature insensitive silicon oscillator and precision voltage reference formed therefrom

• US 5,783,973 A
• Filed: 02/24/1997
• Issued: 07/21/1998
• Est. Priority Date: 02/24/1997
• Status: Expired due to Term

• Current Assignee: Charles Stark Draper Laboratory Incorporated
• Original Assignee: Charles Stark Draper Laboratory Incorporated
• Inventors: Weinberg, Marc S., Ward, Paul A., Kourepenis, Anthony S.
• Primary Examiner(s): NGUYEN, TAN
• Application Number:
  US08/804,796
• Time in Patent Office: 512 Days
• Field of Search: 331/35, 331/116 M, 331/156, 331/176, 327/512, 327/513, 327/545, 327/540, 361/278, 361/296
• US Class Current: 331/35
• CPC Class Codes: G01C 19/574 the devices having two sensing masses in anti-phase motion
• CPC Class Codes: H03H 2009/02496 Horizontal, i.e. parallel to the substrate plane
• CPC Class Codes: H03H 2009/02511 Vertical, i.e. perpendicular to the substrate plane
• CPC Class Codes: H03H 9/02448 of temperature influence
• CPC Class Codes: H03H 9/2405 of microelectro-mechanical resonators
• CPC Class Codes: H03H 9/2426 in combination with other electronic elements
• CPC Class Codes: H03L 1/02 against variations of temperature only
• CPC Class Codes: H03L 7/099 concerning mainly the controlled oscillator of the loop

Abstract

Micromachined, thermally insensitive silicon resonators are provided having accuracy equivalent or superior to that of quartz resonators, and are fabricated from a micromechanical, silicon-on-glass process. In one embodiment, such a resonator is realized using a tuning fork gyroscope. Radiation-hard precision voltage references (PVRs) are enabled using the silicon resonators. Thermal sensitivity is reduced relative to that of a silicon-on-silicon process oscillator, providing a thermal sensitivity comparable to that of a quartz oscillator. By employing a micromechanical device based upon a tuning fork gyroscope, resonators are made from either or both of the gyro drive and sense axes. A resonator constructed as an oscillator loop whose resonant frequency is compared to a frequency standard provides a bias voltage as a reference voltage.

Claims

1. A reference oscillator having an inherent stability against temperature change, employing a micromechanical, silicon tuning fork gyroscope disposed on a glass substrate and having a proof mass translated by a force electrode and sensed by a sense electrode, said oscillator comprising:

a voltage source proximate said gyroscope providing a voltage signal to said force electrode; and

sense electronics proximate said gyroscope and in communication with said sense electrode for receiving a proof mass motion signal and for providing a reference frequency extracted therefrom.

2. The oscillator according to claim 1, further comprising a gain control circuit in communication with said voltage source.

3. A precision voltage reference having an inherent insensitivity to radiation, employing a micromechanical, silicon tuning fork gyroscope disposed on a glass substrate and having a proof mass translated by a force electrode and sensed by a sense electrode, said voltage reference comprising:

a frequency generator proximate said gyroscope for providing a reference frequency;

a voltage source proximate said gyroscope providing a voltage signal to said force electrode; and

sense electronics proximate said gyroscope and in communication with said sense electrode for receiving a proof mass motion signal, for receiving said reference frequency from said frequency generator, and for generating a difference signal between said proof mass motion signal and said reference frequency,

wherein said voltage source receives said difference signal and adjusts said voltage signal based thereupon, said voltage source providing said voltage signal as a voltage reference.

4. A micromechanical, thermally insensitive and radiation hard reference device fabricated from a micromechanical silicon-on-glass structure comprising:

a substantially planar glass substrate;

at least one silicon anchor disposed on said substrate;

a plurality of silicon beams extending from said at least one anchor and parallel to said substrate;

a first weighted element suspended from said plurality of beams above said substrate and relocatable along a first axis substantially orthogonal to said planar substrate;

a force electrode disposed on said substrate, substantially beneath said first weighted element;

a first electrical signal source in electrical communication with said force electrode for providing a first alternating potential between said force electrode and said first weighted element to cause said first weighted element to oscillate along said first axis;

a sense electrode disposed proximate said force electrode on said substrate, substantially beneath said first weighted element; and

a first frequency module proximate said reference device and receiving an electrical signal from said sense electrode reflective of capacitive fluctuations between said sense electrode and said first weighted element during relocation of said first weighted element along said first axis, said first frequency module providing a first measured frequency equivalent to the frequency of sensed capacitive fluctuations.

5. The reference device according to claim 4, further comprising:

a first frequency comparator in communication with said first frequency module for comparing said first measured frequency with a reference frequency and for providing an offset signal to said first electrical signal source,

wherein said first electrical signal source provides said first alternating potential as a first reference voltage.

6. The reference device according to claim 4, further comprising a gain control circuit in communication with said first electrical signal source.

7. The reference device according to claim 4, further comprising:

a second weighted element suspended from said plurality of beams above said substrate and translatable along a second axis substantially orthogonal to said first axis and parallel said substrate;

a set of driven finger electrodes projecting from said second weighted element substantially parallel said second axis;

a set of drive finger electrodes substantially parallel to and freely meshing with a first subset of said set of driven finger electrodes;

a second electrical signal source in electrical communication with said first subset of driven finger electrodes and said set of drive finger electrodes for providing a second alternating potential between said driven and drive finger electrodes to induce vibration of said second weighted element along said second axis;

a set of sense finger electrodes substantially parallel to and freely meshing with a second subset of said driven finger electrodes; and

a second frequency module proximate said reference device and receiving an electrical signal from said sense finger electrodes reflective of capacitive fluctuations between said sense finger electrodes and said second subset of driven finger electrodes during said vibration of said second weighted element along said second axis, said second frequency module providing a second measured frequency equivalent to the frequency of sensed capacitive fluctuations.

8. The reference device according to claim 7, further comprising:

a second frequency comparator in communication with said second frequency module for comparing said second measured frequency with a reference frequency and for providing an offset signal to said second electrical signal source,

wherein said second electrical signal source provides said second alternating potential as a second reference voltage.

9. The reference device according to claim 7, further comprising a gain control circuit in communication with said second electrical signal source.

10. The reference device according to claim 7, wherein said first and second weighted elements are each comprised of complimentary left and right portions parallel to said substrate.

11. A micromechanical reference frequency device comprising:

a substantially planar glass substrate;

a micromechanical tuning fork gyroscope disposed on said substrate, said tuning fork comprising

a plurality of silicon anchors disposed on said substrate,

a plurality of silicon beams extending from said plurality of anchors, parallel to said substrate,

first and second weighted elements each suspended from respective ones of said plurality of beams above said substrate, said weighted elements rotatable about a first axis parallel and above said substrate,

at least one force electrode disposed on said substrate under each of said first and second weighted elements, and

at least one sense electrode disposed on said substrate under each of said first and second weighted elements;

a first source of electrical bias in communication with said force electrodes for establishing an alternating bias between each of said weighted elements and respective force electrodes for oscillating said weighted elements about said first axis; and

a first frequency module in communication with said sense electrodes for determining a frequency of capacitive fluctuation between said weighted elements and respective sense electrodes during oscillation of said weighted elements about said first axis and for providing a first measured frequency reflective of said capacitive fluctuation.

12. The reference device according to claim 11, wherein

said first and second weighted elements are further translatable along a second axis substantially orthogonal to said first axis and parallel said substrate.

13. The reference device according to claim 12, further comprising:

a set of driven finger electrodes projecting from each of said weighted elements substantially parallel said second axis;

a set of drive finger electrodes, disposed on drive anchors attached to said substrate, said drive finger electrodes substantially parallel to and freely meshing with a first subset of said set of driven finger electrodes;

a second source of electrical bias in communication with said first subset of driven finger electrodes and said set of drive finger electrodes for providing an alternating bias between said driven and drive finger electrodes for translating said weighted elements along said second axis;

a set of sense finger electrodes, disposed on sense anchors attached to said substrate, said sense finger electrodes substantially parallel to and freely meshing with a second subset of said driven finger electrodes;

a second frequency module in communication with said set of sense finger electrodes for determining a frequency of capacitive fluctuation between said set of sense electrodes and said second subset of said driven finger electrodes during translation of said weighted elements along said second axis and for providing a second measured frequency reflective of said capacitive fluctuation.

14. A micromechanical reference voltage device comprising:

a substantially planar glass substrate;

a micromechanical tuning fork gyroscope disposed on said substrate, said tuning fork comprising

a plurality of silicon anchors disposed on said substrate,

a plurality of silicon beams extending from said plurality of anchors, parallel to said substrate,

first and second weighted elements each suspended from respective ones of said plurality of beams above said substrate, said weighted elements rotatable about a first axis parallel and above said substrate,

at least one force electrode disposed on said substrate under each of said first and second weighted elements, and

at least one sense electrode disposed on said substrate under each of said first and second weighted elements;

a first source of electrical bias in communication with said force electrodes for establishing an alternating bias between each of said weighted elements and respective force electrodes for oscillating said weighted elements about said first axis;

a first frequency module in communication with said sense electrodes for determining a frequency of capacitive fluctuation between said weighted elements and respective sense electrodes during oscillation of said weighted elements about said first axis and for providing a first measured frequency reflective of said capacitive fluctuation; and

a first frequency comparator for comparing said first measured frequency with a frequency standard and for providing said first source of electrical bias with a first feedback signal,

wherein said first source of electrical bias provides a first bias standard.

15. The reference device according to claim 14, wherein

said first and second weighted elements are further translatable along a second axis substantially orthogonal to said first axis and parallel said substrate.

16. The reference device according to claim 15, further comprising:

a set of driven finger electrodes projecting from each of said weighted elements substantially parallel said second axis;

a set of drive finger electrodes, disposed on drive anchors attached to said substrate, said drive finger electrodes substantially parallel to and freely meshing with a first subset of said set of driven finger electrodes;

a second source of electrical bias in communication with said first subset of driven finger electrodes and said set of drive finger electrodes for establishing an alternating bias between said driven and drive finger electrodes for translating said weighted elements along said second axis;

a set of sense finger electrodes, disposed on sense anchors attached to said substrate, said sense finger electrodes substantially parallel to and freely meshing with a second subset of said driven finger electrodes;

a second frequency module in communication with said set of sense finger electrodes for determining a frequency of capacitive fluctuation between said set of sense electrodes and said second subset of said driven finger electrodes during translation of said weighted elements along said second axis and for providing a second measured frequency reflective of said capacitive fluctuation; and

a second frequency comparator for comparing said second measured frequency with a frequency standard and for providing said second source of electrical bias with a second feedback signal,

wherein said second source of electrical bias provides a second bias standard.