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Temperature insensitive silicon oscillator and precision voltage reference formed therefrom

  • US 5,783,973 A
  • Filed: 02/24/1997
  • Issued: 07/21/1998
  • Est. Priority Date: 02/24/1997
  • Status: Expired due to Term
First Claim
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1. A reference oscillator having an inherent stability against temperature change, employing a micromechanical, silicon tuning fork gyroscope disposed on a glass substrate and having a proof mass translated by a force electrode and sensed by a sense electrode, said oscillator comprising:

  • a voltage source proximate said gyroscope providing a voltage signal to said force electrode; and

    sense electronics proximate said gyroscope and in communication with said sense electrode for receiving a proof mass motion signal and for providing a reference frequency extracted therefrom.

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