Spatial light modulator
First Claim
Patent Images
1. A device comprising:
- a) a fixed electrode;
b) a first high resistance layer on said fixed electrode; and
c) a moveable electrode formed with a stress and affixed at one end and rotationally moveable about a single axis toward said fixed electrode by application of a suitable voltage to the device and rotatable in an opposite direction upon removal of said voltage, said stress biasing said moveable electrode toward movement in said opposite direction, said moveable electrode having a second high resistance layer formed between said moveable electrode and said first high resistance layer.
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Abstract
A spatial light modulator formed of a moveable electrode which is disposed opposite a fixed electrode and is biased to roll in a preferred direction upon application of an electric field across the electrodes to produce a light valve or light shutter. In one embodiment, the moveable electrode is restrained at one end and coils about the fixed end in a preferential roll direction. The bias is achieved by inducing anisotropic stress or anisotropic stiffness.
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Citations
38 Claims
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1. A device comprising:
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a) a fixed electrode; b) a first high resistance layer on said fixed electrode; and c) a moveable electrode formed with a stress and affixed at one end and rotationally moveable about a single axis toward said fixed electrode by application of a suitable voltage to the device and rotatable in an opposite direction upon removal of said voltage, said stress biasing said moveable electrode toward movement in said opposite direction, said moveable electrode having a second high resistance layer formed between said moveable electrode and said first high resistance layer. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10)
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11. A device comprising:
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a) a substrate; b) a fixed electrode on the substrate; c) a first high resistance body covering a surface of the fixed electrode opposite the substrate; and d) a moveable electrode fixed at one end and stressed, as formed, to roll up in a coil, said moveable electrode having a second high resistance body formed between said moveable electrode and said first high resistance body; and
wherein upon application of an electric potential to the device, the moveable electrode unrolls in a preferential roll direction to cover a substantial portion of the fixed electrode. - View Dependent Claims (12, 13, 14, 15, 16, 17, 18, 19, 20)
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21. A light modulator comprising:
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a) a fixed electrode; b) an insulator over the fixed electrode; and c) a moveable electrode adjacent said fixed electrode and attached at one end to said insulator which moveable electrode is rotatable about said one end and biased, as formed, in a manner which causes said moveable electrode to coil in a direction away from said fixed electrode, wherein a first resistive layer is formed on a surface of the fixed electrode facing the moveable electrode and a second resistive layer is formed on a surface of said moveable electrode facing the fixed electrode. - View Dependent Claims (22, 23, 24, 25)
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26. A light modulator comprising:
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a) a fixed electrode; and b) a moveable electrode adjacent said fixed electrode which moveable electrode is anisotropically stiffened, as formed, in a manner which tends to cause said moveable electrode to coil in a preferred coil direction. - View Dependent Claims (27)
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28. A light valve comprising:
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a) a substrate; b) a fixed electrode on the substrate; and c) a moveable electrode fixed at one end and anisotropically biased to roll up in a coil in a preferential direction; and
wherein upon application of an electric potential the moveable electrode unrolls in an opposite direction to cover a substantial portion of the fixed electrode. - View Dependent Claims (29, 30, 31, 32, 33)
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34. A light valve comprising:
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a) a substrate; b) a fixed electrode on the substrate; c) a moveable electrode fixed at one end and anisotropically biased to roll up in a coil in a preferential direction; and
wherein one of said electrodes is divided into spaced apart conductive strips and wherein upon application of a first electric potential across said fixed and moveable electrodes the moveable electrode unrolls in an opposite direction to cover a portion of the fixed electrode; and
upon application of a second electric potential across an electrode and one or more conductive strips, the moveable electrode assumes a fixed position.
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35. A spatial light modulator comprising:
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a) an array of light valves, each valve comprising a fixed electrode and a moveable electrode and wherein the moveable electrode is fixed at one end and anisotropically biased to roll up in a coil in a preferential direction; and
wherein upon application of an electric potential across said electrodes, the moveable electrode unrolls in an opposite direction to cover a substantial portion of the fixed electrode;b) an array of address pads coupled to a respective one of said valves to apply said potential across said electrodes; and c) a source of light adjacent said array for projecting light at said array to form a pixel image in space, each pixel thereof formed in response to the respective potentials applied to said electrodes.
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36. A microwave switch comprising:
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a) a fixed conductive member and a moveable conductive member with an insulator formed therebetween and wherein the moveable member is fixed at one end and is anisotropically biased to roll up in a coil in a preferential direction; and
wherein upon application of an electric potential across said members, the moveable member unrolls in an opposite direction to contact a substantial portion of the fixed electrode;b) an input lead coupling a source of microwave energy to one member; and c) an output lead coupled to the remaining member; whereby when the moveable member unrolls, a large capacitance is formed across the switch, producing low impedance coupling of the microwave energy from the source to the output lead.
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37. A DC switch for switching DC voltage comprising:
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a) an array of switches, each switch comprising a fixed current carrying electrode on a substrate and a moveable cantilevered electrode fixed at one end with opposed contact areas on said moveable electrode and said fixed electrode; b) at least one potential supplying electrode; and wherein upon application of an electric potential to said potential supplying electrode, the moveable electrode moves in a direction to bring the contact areas in contact. - View Dependent Claims (38)
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Specification