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Spatial light modulator

  • US 5,784,189 A
  • Filed: 12/21/1995
  • Issued: 07/21/1998
  • Est. Priority Date: 03/06/1991
  • Status: Expired due to Fees
First Claim
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1. A device comprising:

  • a) a fixed electrode;

    b) a first high resistance layer on said fixed electrode; and

    c) a moveable electrode formed with a stress and affixed at one end and rotationally moveable about a single axis toward said fixed electrode by application of a suitable voltage to the device and rotatable in an opposite direction upon removal of said voltage, said stress biasing said moveable electrode toward movement in said opposite direction, said moveable electrode having a second high resistance layer formed between said moveable electrode and said first high resistance layer.

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