Temperature distribution measurement methods and apparatus
First Claim
1. A method for obtaining a temperature profile of a specimen, the method comprising:
- (a) placing a specimen on a first major surface of a thin-film membrane made of a first thermo-electrically conductive material;
(b) contact-scanning a second major surface, opposite the first major surface, of the thin-film membrane using a probe, the probe including a tip radius contacting the second major surface, the tip radius comprising a second thermo-electrically conductive material that is different from the first thermo-electrically conductive material so as to generate, by the Seebeck effect, a thermo-electromotive force between the tip radius and the thin-film membrane; and
(c) measuring the thermo-electromotive force at plural locations on the second major surface corresponding to locations on the first major surface contacted by the specimen so as to obtain a temperature profile of the specimen.
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Accused Products
Abstract
Methods and apparatus are disclosed for measuring the temperature distribution or profile of a specimen at high resolution. An apparatus comprises a thin-film membrane formed of a first thermo-electrically conductive material, the membrane having a first major surface for holding the specimen. The apparatus also comprises a probe having a tip radius operable to contact a second major surface of the membrane opposite the first major surface. The tip radius comprises a second thermo-electrically conductive material that is different from the first thermo-electrically conductive material so as to generate, by the Seebeck effect, a thermo-electromotive force (TEMF) between the tip radius and the thin-film membrane. The probe can be scanned across the second major surface; the TEMF can be measured, processed, and displayed to produce a temperature profile of the specimen.
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Citations
16 Claims
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1. A method for obtaining a temperature profile of a specimen, the method comprising:
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(a) placing a specimen on a first major surface of a thin-film membrane made of a first thermo-electrically conductive material; (b) contact-scanning a second major surface, opposite the first major surface, of the thin-film membrane using a probe, the probe including a tip radius contacting the second major surface, the tip radius comprising a second thermo-electrically conductive material that is different from the first thermo-electrically conductive material so as to generate, by the Seebeck effect, a thermo-electromotive force between the tip radius and the thin-film membrane; and (c) measuring the thermo-electromotive force at plural locations on the second major surface corresponding to locations on the first major surface contacted by the specimen so as to obtain a temperature profile of the specimen. - View Dependent Claims (2, 3)
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4. An apparatus for obtaining a temperature profile of a specimen, the apparatus comprising:
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(a) a thin-film membrane formed of a first thermo-electrically conductive material, the thin-film membrane having a first major surface and a second major surface opposite the first major surface, the first major surface holding a specimen in contact with the first major surface; (b) a probe comprising a tip radius operable to contact the second major surface, the tip radius comprising a second thermo-electrically conductive material that is different from the first thermo-electrically conductive material so as to generate, by the Seebeck effect, a thermo-electromotive force between the tip radius and the thin-film membrane; (c) a probe actuator operable to move the probe in a manner by which the tip radius scans across the second major surface; and (d) a TEMF measurement device connected to the thin-film membrane and to the tip radius, and wherein the TEMF measurement device measures the thermo-electromotive force, generated between the tip radius and the thin-film membrane, at multiple loci on the second major surface as the tip radius is scanned across the second major surface, the loci corresponding to locations on the first major surface contacted by the specimen so as to obtain a temperature profile of the specimen. - View Dependent Claims (5, 6, 7, 8, 9, 10, 11, 12, 13)
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14. An apparatus for measuring the temperature of a locus of a specimen, the apparatus comprising:
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(a) a thin-film membrane formed of a first thermo-electrically conductive material, the thin-film membrane having a first major surface and a second major surface opposite the first major surface, the first major surface holding a specimen in contact with the first major surface; (b) a probe comprising a tip radius operable to contact the second major surface, the tip radius comprising a second thermo-electrically conductive material that is different from the first thermo-electrically conductive material so as to generate, by the Seebeck effect, a thermo-electromotive force between the tip radius and the thin-film membrane; and (c) a TEMF measurement device connected to the thin-film membrane and to the tip radius, and wherein the TEMF measurement device measures the thermo-electromotive force, generated between the tip radius and the thin-film membrane, at a locus on the second major surface corresponding to a location on the first major surface contacted by the specimen so as to obtain a temperature of the locus of the specimen. - View Dependent Claims (15, 16)
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Specification