Large angle solid state position sensitive x-ray detector system

• US 5,784,432 A
• Filed: 08/22/1997
• Issued: 07/21/1998
• Est. Priority Date: 01/24/1996
• Status: Expired due to Fees

• Current Assignee: Nova Measuring Instruments Limited (Honeywell International Inc.)
• Original Assignee: Advanced Technology Materials, Inc. (Entegris Incorporated), Penn State Research Foundation
• Inventors: Kurtz, David S., Ruud, Clay O.
• Primary Examiner(s): WONG, DON KITSUN
• Application Number:
  US08/916,378
• Time in Patent Office: 333 Days
• Field of Search: 378/70, 378/71, 378/98.8, 250/367, 250/368, 250/370.11
• US Class Current: 378/70
• CPC Class Codes: G01N 23/20 by using diffraction of the radiation by the materials, e.g. for investigating crystal structure; by using scattering of the radiation by the materials, e.g. for investigating non-crystalline materials; by using reflection of the radiation by the materials

Abstract

A method and apparatus for x-ray measurement of certain properties of a solid material. In distinction to known methods and apparatus, this invention employs a specific fiber-optic bundle configuration, termed a reorganizer, itself known for other uses, for coherently transmitting visible light originating from the scintillation of diffracted x-radiation from the solid material gathered along a substantially one dimensional linear arc, to a two-dimensional photo-sensor array. The two-dimensional photodetector array, with its many closely packed light sensitive pixels, is employed to process the information contained in the diffracted radiation and present the information in the form of a conventional x-ray diffraction spectrum. By this arrangement, the angular range of the combined detector faces may be increased without loss of angular resolution. Further, the prohibitively expensive coupling together of a large number of individual linear diode photodetectors, which would be required to process signals generated by the diffracted radiation, is avoided.

Claims

1. A fiber-optic reorganizer for use in x-ray diffraction and/or scattering measurements, said reorganizer including a plurality of rectangular coherent optic fiber bundles, each bundle having a an input face and output face, each said face bordered by two sides and two ends, said faces of each bundle having a length greater than its ends, said input faces being serially aligned endwise and positioned tangentially along an arc with their respective ends contiguous to each other to thereby define an essentially one dimensional reorganizer input face formed from said bundle input faces, said output ends of said bundles being serially arranged side by side with their sides contiguous to each other to thereby define a two dimensional reorganizer output face, each of said bundle input ends being coated with a scintillation material to convert x-radiation into radiation of a longer wavelength, whereby x-radiation impinging upon said reorganizer input face exits from said reorganizer output face as radiation of a longer wavelength.

2. The reorganizer of claim 1 wherein said bundles are each bendable to permit positioning of said bundle input faces along different arcs.

3. The reorganizer of claim 1 wherein said bundle input faces are each provided with a circumferential rigid collar, said rigid collars beings pivoted together.

4. The reorganizer of claim 1 wherein said reorganizer output face is provided with a circumferential rigid collar.