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Distance measuring confocal microscope

  • US 5,785,651 A
  • Filed: 06/07/1995
  • Issued: 07/28/1998
  • Est. Priority Date: 06/07/1995
  • Status: Expired due to Fees
First Claim
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1. A method for scanning a distance measuring confocal microscope to produce a profile of an object, the steps of said method comprising:

  • (A) moving the confocal microscope over a known position such that an imaging beam of polychromatic light is approximately normal to the surface of the object at the known position;

    (B) imaging the known position on the object with the confocal microscope and correlating the image data with the position data;

    (C) repeating steps A and B for a new known position until a suitable profile of the object is complete.

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