Method for producing composite sintered body of silicon carbide and silicon nitride
First Claim
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1. A method for producing a composite sintered body of silicon carbide and silicon nitride, comprising the steps of:
- (a) adding sintering aid powder, boron powder and carbon powder to a mixture of 15-50 weight % of silicon carbide powder and 85-50 weight % of silicon nitride powder to form a green body, said sintering aid powder being a mixture of (i) aluminum oxide or aluminum nitride, and (ii) at least one oxide of an element selected from the group consisting of Y2 O3, Yb2 O3, Er2 O3, ZrO2 and HfO2, with a weight ratio of said (i) to said (ii) being from 2;
1 to 1;
15, and(b) subjecting said green body to a HIP sintering at an atmosphere gas pressure of 1033-2000 kgf/cm2.
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Abstract
A composite sintered body of silicon carbide and silicon nitride having a nano-composite structure in which fine SiC particles are dispersed in Si3 N4 particles and grain boundaries and fine Si3 N4 particles are dispersed in SiC particles is produced by (a) adding at least one sintering aid, boron and carbon to a mixed powder of silicon carbide and silicon nitride to form a green body, the sintering aid being (i) Al2 O3 or AlN and/or (ii) at least one oxide of an element selected from Groups 3A and 4A of the Periodic Table, and (b) sintering the green body by HIP or by a high-temperature normal sintering method.
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Citations
5 Claims
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1. A method for producing a composite sintered body of silicon carbide and silicon nitride, comprising the steps of:
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(a) adding sintering aid powder, boron powder and carbon powder to a mixture of 15-50 weight % of silicon carbide powder and 85-50 weight % of silicon nitride powder to form a green body, said sintering aid powder being a mixture of (i) aluminum oxide or aluminum nitride, and (ii) at least one oxide of an element selected from the group consisting of Y2 O3, Yb2 O3, Er2 O3, ZrO2 and HfO2, with a weight ratio of said (i) to said (ii) being from 2;
1 to 1;
15, and(b) subjecting said green body to a HIP sintering at an atmosphere gas pressure of 1033-2000 kgf/cm2. - View Dependent Claims (2, 3)
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4. A method for producing a composite sintered body of silicon carbide and silicon nitride, comprising the steps of:
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(a) adding at least one sintering aid powder, boron powder and carbon powder to a mixture of 5-50 weight % of silicon carbide powder and 85-50 weight % of silicon nitride powder to form a green body, said sintering aid powder being a mixture of (i) aluminum oxide or aluminum nitride, and (ii) at least one oxide of an element selected from the group consisting of Y2 O3, Yb2 O3, Er2 O3, ZrO2 and HfO2, with a weight ratio of said (i) to said (ii) being from 2;
1 to 1;
15, and(b) subjecting said green body to a gas pressure sintering at a temperature of 2000°
C. or higher and an atmosphere gas pressure of 9-50 kgf/cm2. - View Dependent Claims (5)
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Specification