Hybrid sensor
First Claim
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1. A hybrid sensor comprising:
- an acceleration sensor for detecting acceleration based on a temperature distribution of a predetermined gas hermetically enclosed within a fluid-tight space, said acceleration sensor comprising heat-generating resistance means for heating said predetermined gas to form said temperature distribution within said fluid-tight space, and temperature-sensitive resistance means for detecting a change in said temperature distribution caused by acceleration acting on said hybrid sensor; and
an angular velocity sensor for detecting angular velocity based on a deviation of a flow of a predetermined gas, said angular velocity sensor comprising a gas passage through which said predetermined gas is caused to flow, and heat wire resistance means arranged within said gas passage for detecting said deviation of said flow of said predetermined gas caused by action of said angular velocity;
said acceleration sensor and said angular velocity sensor being formed in one piece by the use of semiconductor processing technology in a manner such that said acceleration sensor and said angular velocity sensor are formed on a plurality of semiconductor substrates, and then said plurality of semiconductor substrates are superimposed upon another and united into laminate, said acceleration sensor and said angular velocity sensor both being within the laminate,wherein said acceleration sensor and said angular velocity sensor being capable of detecting, respectively, said acceleration and said angular velocity simultaneously and independently of each other.
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Abstract
A hybrid sensor which is comprised of an acceleration sensor for detecting acceleration based on a temperature distribution of a predetermined gas hermetically enclosed within a fluid-tight space, and an angular velocity sensor for detecting angular velocity based on a deviation of a flow of a predetermined gas. The acceleration sensor and the angular velocity sensor are formed in one piece by the use of semiconductor processing technology in such a manner that the acceleration sensor and the angular velocity sensor are formed on a plurality of semiconductor substrates, and then the plurality of semiconductor substrates are superposed one upon another and united into a laminate.
52 Citations
17 Claims
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1. A hybrid sensor comprising:
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an acceleration sensor for detecting acceleration based on a temperature distribution of a predetermined gas hermetically enclosed within a fluid-tight space, said acceleration sensor comprising heat-generating resistance means for heating said predetermined gas to form said temperature distribution within said fluid-tight space, and temperature-sensitive resistance means for detecting a change in said temperature distribution caused by acceleration acting on said hybrid sensor; and an angular velocity sensor for detecting angular velocity based on a deviation of a flow of a predetermined gas, said angular velocity sensor comprising a gas passage through which said predetermined gas is caused to flow, and heat wire resistance means arranged within said gas passage for detecting said deviation of said flow of said predetermined gas caused by action of said angular velocity; said acceleration sensor and said angular velocity sensor being formed in one piece by the use of semiconductor processing technology in a manner such that said acceleration sensor and said angular velocity sensor are formed on a plurality of semiconductor substrates, and then said plurality of semiconductor substrates are superimposed upon another and united into laminate, said acceleration sensor and said angular velocity sensor both being within the laminate, wherein said acceleration sensor and said angular velocity sensor being capable of detecting, respectively, said acceleration and said angular velocity simultaneously and independently of each other. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16)
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17. A hybrid sensor comprising:
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an acceleration sensor for detecting acceleration based on a temperature distribution of a predetermined gas hermetically enclosed within a fluid-tight space, said acceleration sensor comprising heat-generating resistance means for heating said predetermined gas to form said temperature distribution within said fluid-tight space, and temperature-sensitive resistance means for detecting a change in said temperature distribution caused by acceleration acting on said hybrid sensor; and an angular velocity sensor for detecting angular velocity based on a deviation of a flow of a predetermined gas, said angular velocity sensor comprising a gas passage through which said predetermined gas is caused to flow, and heat wire resistance means arranged within said gas passage for detecting said deviation of said flow of said predetermined gas caused by action of said angular velocity; said acceleration sensor and said angular velocity sensor being positioned side by side and formed in one piece by the use of semiconductor processing technology in a manner such that said acceleration sensor and said angular velocity sensor are formed on a plurality of semiconductor substrates, said plurality of semiconductor substrates being superimposed upon another and united into laminate, said acceleration sensor and said angular velocity sensor both being within the laminate, wherein said acceleration sensor and said angular velocity sensor being capable of detecting, respectively, said acceleration and said angular velocity simultaneously.
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Specification